Method and apparatus for checking automated optical system performance repeatability

Claim 2

An automated method for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, the automated method comprising the steps of: (a) selecting a lens having a first magnification characteristic; (b) inserting a calibration plate into the optical path, where the calibration plate includes a fiducial having a fiducial center, wherein the fiducial is located and centered in a field of view by i) grossly positioning the stage in a vicinity of the fiducial, ii) performing a focus pan, iii) determining a location of the fiducial center with respect to the optical axis, iv) translating the stage in an X, Y plane so as to center the fiducial at 0,0 in the field of view, where the X, Y plane is defined by a top surface of the stage; v) recording the location of the fiducial center; and (c) incrementally moving the stage in a star pattern so as to repeatedly move the fiducial out of the optical axis and then back into line with the optical axis for a predetermined number of repetitions, where each time the stage returns the fiducial to an original position, an image of the fiducial is captured and processed so as to determine a lateral position in X and Y of the fiducial center with respect to the optical axis.

Claim 3

The automated method for checking stage performance repeatability as set forth in claim 1, where the step of incrementally moving the stage further comprises the steps of moving the stage a distance to identify a position repeatability characteristic.

Claim 4

The automated method for checking stage performance repeatability of claim 2 further comprising the steps of: i) determining a true Z position of the image by generating a data array containing an X, Y and Z coordinate for each iteration; a) processing the data array to determine a set comprising a maximum coordinate and minimum coordinate in each axis; b) calculating an absolute value of a difference taken between each set so as to determine repeatability of stage movement in each axis.

Claim 5

The automated method for checking stage performance repeatability of claim 3 further comprising the steps of: a) checking repeatability along an X axis to a limit of repeatability of less than 15000 nm; b) checking repeatability along a Y axis to a limit of repeatability of less than 15000 nm; and c) checking repeatability along a Z axis to a limit of repeatability of Z cross coupling of less than 2000 nm.

Claim 6

An automated method for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, and where the stage is initially positioned at an origin, the automated method comprising the steps of: a) selecting a lens having a first magnification characteristic; b) inserting a calibration plate into the optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view; c) moving the stage along a Z axis, the Z axis being parallel to the optical axis of the lens, in a negative direction away from the lens a first distance; d) returning the stage to the origin; e) analyzing an actual Z position of an image; f) moving the stage is in a negative direction for a second distance and then returning to the origin; g) analyzing the actual Z position of the image; h) repeating steps b through g again in except reversing a direction of movement of the stage so that the stage is moved toward the lens; i) storing each Z coordinate in a data array; and j) processing the data array to determine a difference between a minimum and maximum Z coordinate where an absolute value of the difference is taken as a repeatability of the stage.

Claim 7

An automated method for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, and where the stage is initially positioned at an origin, the automated method comprising the steps of: a) selecting a lens having a first magnification characteristic; b) inserting a calibration plate into the optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view; c) moving the stage along a Z axis, the Z axis being parallel to the optical axis of the lens, in a negative direction away from the lens a first distance; d) returning the stage to the origin; e) analyzing an actual Z position of an image; f) moving the stage is in a negative direction for a second distance and then returning to the origin; g) analyzing the actual Z position of the image; h) repeating steps b through g again in except reversing a direction of movement of the stage so that the stage is moved toward the lens; i) storing each Z coordinate in a data array; and j) processing the data array to determine a difference between a minimum and maximum Z coordinate where an absolute value of the difference is taken as a repeatability of the stage.

Claim 8

The automated method for checking stage performance repeatability of claim 5 further comprising the step of checking repeatability along the Z axis to a limit of repeatability of less than 2000 nm.

Claim 9

An automated method for checking turret repeatability in an automated optical system having an automated microscope positioned to view along an optical path, the automated method comprising the steps of: a) selecting a lens having a first magnification characteristic; b) inserting a calibration plate into the optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view; c) incrementally moving a turret so as to repeatedly move the fiducial out of an optical axis and then back into line with the optical axis for a predetermined number of repetitions, where each time a stage returns the fiducial to an origin position, a fiducial image is captured and processed so as to determine a center of the fiducial in both axes relative to the optical axis.

Claim 10

An automated method for checking turret repeatability in an automated optical system having an automated microscope positioned to view along an optical path, the automated method comprising the steps of: a) selecting a lens having a first magnification characteristic; b) inserting a calibration plate into the optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view; c) incrementally moving a turret so as to repeatedly move the fiducial out of an optical axis and then back into line with the optical axis for a predetermined number of repetitions, where each time a stage returns the fiducial to an origin position, a fiducial image is captured and processed so as to determine a center of the fiducial in both axes relative to the optical axis.

Claim 11

The automated method for checking turret repeatability of claim 7 wherein turret movement alternates between clockwise and counter clockwise directions.

Claim 12

The automated method of claim 8 further comprising the steps of: a) developing an array of X and Y coordinates for each iteration; b) determining a maximum and minimum for each axis; and c) calculating an absolute value for a largest difference as a measure of turret repeatability

Claim 13

The automated method for checking turret repeatability of claim 9 further comprising the step of checking repeatability to a limit of repeatability of less than 7000 nm.

Claim 14

An automated method for testing objective centration and parfocality in an automated microscope system having multiple objective lenses, wherein each objective has its own optical axis, the automated method comprising the steps of: a) selecting a lens having a first magnification characteristic; b) inserting a calibration plate into a first optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view, and obtaining a first set of X,Y and Z coordinates; c) selecting a lens having a second magnification characteristic; d) inserting the calibration plate into a second optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view, and obtaining a second set of X,Y and Z coordinates; and e) subtracting the first set of X,Y and Z coordinates from the second set of X,Y and Z coordinates, where an X and Y difference comprises a centration characteristic of the objectives and a Z difference comprises a parfocality factor.

Claim 15

An automated method for testing objective centration and parfocality in an automated microscope system having multiple objective lenses, wherein each objective has its own optical axis, the automated method comprising the steps of: a) selecting a lens having a first magnification characteristic; b) inserting a calibration plate into a first optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view, and obtaining a first set of X,Y and Z coordinates; c) selecting a lens having a second magnification characteristic; d) inserting the calibration plate into a second optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view, and obtaining a second set of X,Y and Z coordinates; and e) subtracting the first set of X,Y and Z coordinates from the second set of X,Y and Z coordinates, where an X and Y difference comprises a centration characteristic of the objectives and a Z difference comprises a parfocality factor.

Claim 16

The automated method for checking stage performance repeatability of claim 11 further comprising the steps of: a) checking repeatability of centration to a limit of repeatability of less than 25000 nm; b) checking repeatability of parfocality to a limit of repeatability of less than 15000 nm.

Claim 17

An automated apparatus for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, the automated apparatus comprising: a) a lens having a first magnification characteristic; b) a calibration plate inserted into the optical path, where the calibration plate includes a fiducial having a fiducial center, wherein the fiducial is located and centered in a field of view; c) means, coupled to the stage, for grossly positioning the stage in a vicinity of the fiducial; d) means, coupled to the automated microscope, for performing a focus pan; e) means, coupled to the stage, for determining a location of a center of the fiducial with respect to an optical axis; f) means, coupled to the stage, for translating the stage in an X, Y plane so as to center the fiducial in the field of view, where the X, Y plane is defined by a top surface of the stage; g) means, coupled to the stage, for recording the location of the fiducial center; and h) means, coupled to the stage, for incrementally moving the stage in a star pattern so as to repeatedly move the fiducial out of the optical axis and then back into line with the optical axis for a predetermined number of repetitions, where each time the stage returns the fiducial to an original position, an image of the fiducial is captured and processed so as to determine a lateral position of a fiducial center in the X,Y plane with respect to the optical axis.

Claim 18

An automated apparatus for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, the automated apparatus comprising: a) a lens having a first magnification characteristic; b) a calibration plate inserted into the optical path, where the calibration plate includes a fiducial having a fiducial center, wherein the fiducial is located and centered in a field of view; c) means, coupled to the stage, for grossly positioning the stage in a vicinity of the fiducial; d) means, coupled to the automated microscope, for performing a focus pan; e) means, coupled to the stage, for determining a location of a center of the fiducial with respect to an optical axis; f) means, coupled to the stage, for translating the stage in an X, Y plane so as to center the fiducial in the field of view, where the X, Y plane is defined by a top surface of the stage; g) means, coupled to the stage, for recording the location of the fiducial center; and h) means, coupled to the stage, for incrementally moving the stage in a star pattern so as to repeatedly move the fiducial out of the optical axis and then back into line with the optical axis for a predetermined number of repetitions, where each time the stage returns the fiducial to an original position, an image of the fiducial is captured and processed so as to determine a lateral position of a fiducial center in the X,Y plane with respect to the optical axis.

Claim 19

The automated apparatus for checking stage performance repeatability as set forth in claim 13, where the means for incrementally moving the stage further comprises a means for moving the stage a distance suitable to identify a position repeatability characteristic.

Claim 20

The automated apparatus for checking stage performance repeatability of claim 13 further comprising: a) means, coupled to the stage, for determining a true Z position of the image by generating a data array containing an X, Y and Z coordinate for each iteration; b) means, coupled to the means for determining a true Z position, for processing the data array to determine a set comprising a maximum coordinate and minimum coordinate in each axis; and c) means, coupled to the means for processing the data arrays, for calculating an absolute value of a difference taken between each set so as to determine the repeatability of stage movement in each axis.

Claim 21

The automated apparatus for checking stage performance repeatability of claim 15 further comprising: a) means, coupled to the means for processing the data arrays, for checking repeatability along an X axis to a limit of repeatability of less than 15000 nm; b) means, coupled to the means for processing the data arrays, for checking repeatability along a Y axis to a limit of repeatability of less than 15000 nm; and c) means, coupled to the means for processing the data arrays, for checking repeatability along a Z axis to a limit of repeatability of Z cross coupling of less than 2000 nm.

Claim 22

An automated apparatus for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, and where the stage is initially positioned at an origin, the automated apparatus comprising: a) a lens having a first magnification characteristic; b) a calibration plate inserted into the optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view; c) means, coupled to the stage, for moving the stage along a Z axis, the Z axis being parallel to the optical axis of the lens, in a negative direction away from the lens a first distance; d) means, coupled to the stage, for returning the stage to the origin; e) means, coupled to the stage, for analyzing an actual Z position of an image; f) means, coupled to the stage, for moving the stage in a negative direction for a second distance and then returning to the origin; g) means, coupled to the stage, for analyzing the actual Z position of the image; h) means, coupled to the stage, for reversing a direction of movement of the stage so that the stage is moved toward the lens; i) means for storing each Z coordinate in a data array; and j) means, coupled to the storing means, for processing the data array to determine a difference between a minimum and maximum Z coordinate where an absolute value of the difference is taken as a repeatability of the stage.

Claim 23

An automated apparatus for checking stage performance repeatability in an automated optical system having an automated microscope positioned to view an object on a stage along an optical path, where the optical path includes an optical axis therethrough, and where the stage is initially positioned at an origin, the automated apparatus comprising: a) a lens having a first magnification characteristic; b) a calibration plate inserted into the optical path, where the calibration plate includes a fiducial and the fiducial is located and centered in a field of view; c) means, coupled to the stage, for moving the stage along a Z axis, the Z axis being parallel to the optical axis of the lens, in a negative direction away from the lens a first distance; d) means, coupled to the stage, for returning the stage to the origin; e) means, coupled to the stage, for analyzing an actual Z position of an image; f) means, coupled to the stage, for moving the stage in a negative direction for a second distance and then returning to the origin; g) means, coupled to the stage, for analyzing the actual Z position of the image; h) means, coupled to the stage, for reversing a direction of movement of the stage so that the stage is moved toward the lens; i) means for storing each Z coordinate in a data array; and j) means, coupled to the storing means, for processing the data array to determine a difference between a minimum and maximum Z coordinate where an absolute value of the difference is taken as a repeatability of the stage.