Digital force balanced instrument

Claim 2

A digital force balanced instrument for detecting an outside force comprising: a proofmass; a substrate; two electrodes disposed on the substrate straddling the proofmass, wherein each electrode is divided into a plurality of cells wherein each cell has a least significant bit of area; a circuit obtaining a digital signal of a value representing a velocity of the proofmass under the outside force during each of equal units of time, wherein the outside force moves the proofmass from a null position, and wherein the circuit also generates a constant voltage signal; whereby in accordance with the value of the digital signal, the circuit applies the constant voltage signal to selected cells to energize only such number of cells as is necessary to generate a force from an electric field resulting from the application of the constant voltage signal to the cells in order to urge the proofmass to return to the null position.

Claim 3

The digital force balanced instrument of claim 1, wherein the instrument further comprises arrays of cells, wherein each array of cells is selected in binary multiples of the least significant bit areas, and the constant voltage signal is applied to selected arrays of cells in binary multiples of the least significant bit areas.

Claim 4

The digital force balanced instrument of claim 2, wherein the electrodes further comprise a semiconductor material.

Claim 5

The digital force balanced instrument of claim 3, wherein the arrays of cells are electrically separated.

Claim 8

The method of applying force to a proofmass according to claim 5, wherein said constant voltage signal is applied to binary multiples of said cells.

Claim 9

The method of applying force to a proofmass according to claim 5, wherein during successive units of time, a particular number of said selected number S of cells is disconnected from the constant voltage signal, and then twice the number S is reconnected to the constant voltage signal, and such disconnecting and reconnecting is continued until the proofmass is returned to the null position.

Claim 10

The method of applying force to a proofmass according to claim 7, wherein the particular number S is varied in amount as necessary to cause the proofmass to return to the null position.

Claim 11

A digital force balanced instrument for detecting an outside force comprising: a substrate; a proofmass electrode for providing an output analog signal; a hinge connecting the proofmass to said substrate in a cantilever configuration; a plurality of electrostatic plates selectively operating in unison to form one or more functional cells disposed on either side of the proofmass electrode; control switches connected to each of said plates; a pick-off oscillator connected to said plates; an integrator responsive to the output analog signal to provide an output restore signal indicative of displacement of the proofmass; a cascading voltage level detector responsive to the output restore signal, to provide an output digital signal containing data proportional to the output restore signal; and a latch corresponding to one plate, receiving the output digital signal from the cascading voltage level detector, wherein the latch activates the respective control switch.

Claim 12

A digital force balanced instrument for detecting an outside force comprising: a substrate; a proofmass electrode for providing an output analog signal; a hinge connecting the proofmass to said substrate in a cantilever configuration; a plurality of electrostatic plates selectively operating in unison to form one or more functional cells disposed on either side of the proofmass electrode; control switches connected to each of said plates; a pick-off oscillator connected to said plates; an integrator responsive to the output analog signal to provide an output restore signal indicative of displacement of the proofmass; a cascading voltage level detector responsive to the output restore signal, to provide an output digital signal containing data proportional to the output restore signal; and a latch corresponding to one plate, receiving the output digital signal from the cascading voltage level detector, wherein the latch activates the respective control switch.

Claim 13

The instrument of claim 9, wherein the data further comprises a multiple bit word including a sign bit.

Claim 14

The instrument of claim 10, wherein the plurality of plates further comprise first plates disposed on an opposite side of second plates, and the latch further comprises first latches and second latches connected respectively to the first and second plates, wherein the output digital signal from the cascading voltage level detector is directed to the first and second latches depending on the sign bit.

Claim 15

The instrument of claim 9, wherein the instrument further comprises an amplifier and a demodulator interconnecting the proofmass to the integrator.

Claim 16

The instrument of claim 9, wherein the plates are activated according to a binary pattern.

Claim 17

The instrument of claim 9, wherein the cascading voltage level detector further comprises an analog to digital converter.

Claim 18

The instrument of claim 9, wherein the control switches further comprise field effect transistors.

Claim 19

The instrument of claim 9, wherein the plates are arranged in a predetermined grid pattern.

Claim 20

The instrument of claim 9, wherein the proofmass includes a centroid and the plates are disposed about the centroid.

Claim 21

A digital force balanced instrument for detecting an outside force comprising: a proofmass to provide an analog output signal; a substrate surrounding the proofmass; a hinge supporting said proofmass on said surrounding substrate; plurality of electrostatic plates selectively operating in unison to form one or more functional cells disposed on the surrounding substrate; a pickoff voltage oscillator connected to the electrostatic plates; an integrator receiving the analog output signal and providing a restore signal having an amplitude indicative of a displacement of the proofmass; an analog to digital converter receiving the restore signal and providing a digital output signal representative of the amplitude of the restore signal; a plurality of latches corresponding to the electrostatic plates, said latches responding to the digital output signal to selectively provide an output control signal in accordance with the digital output signal; and control switches connected to each corresponding electrostatic plate and each respective latch, wherein the output control signal selectively activates the control switches; whereby the electrostatic plates are individually activated and generate an electrostatic field that restores the proofmass to an initial position.

Claim 22

A digital force balanced instrument for detecting an outside force comprising: a proofmass to provide an analog output signal; a substrate surrounding the proofmass; a hinge supporting said proofmass on said surrounding substrate; plurality of electrostatic plates selectively operating in unison to form one or more functional cells disposed on the surrounding substrate; a pickoff voltage oscillator connected to the electrostatic plates; an integrator receiving the analog output signal and providing a restore signal having an amplitude indicative of a displacement of the proofmass; an analog to digital converter receiving the restore signal and providing a digital output signal representative of the amplitude of the restore signal; a plurality of latches corresponding to the electrostatic plates, said latches responding to the digital output signal to selectively provide an output control signal in accordance with the digital output signal; and control switches connected to each corresponding electrostatic plate and each respective latch, wherein the output control signal selectively activates the control switches; whereby the electrostatic plates are individually activated and generate an electrostatic field that restores the proofmass to an initial position.

Claim 23

The instrument of claim 18, wherein the proofmass includes a centroid, and the electrostatic plates are arranged on the surrounding substrate at a predetermined distance from the centroid.

Claim 24

The instrument of claim 19, wherein the proofmass includes silicon semiconductor material.

Claim 25

The instrument of claim 19, wherein a quantity of activated plates increases proportionally to a value contained in the digital output signal.

Claim 26

The instrument of claim 19, wherein each plate includes a silicon semiconductor material.

Claim 27

The instrument of claim 19, wherein each plate further comprises a square shape.

Claim 28

A digital force balanced instrument for detecting an outside force comprising: a semiconductor proofmass electrode, providing an analog output signal; a surrounding semiconductor substrate; a hinge supporting the proofmass on the surrounding substrate in a cantilevered position; gaps located between the proofmass and surrounding substrate; plurality of electrostatic plates selectively operating in unison to form one or more functional cells disposed in a grid pattern on the surrounding substrate, on opposite sides of the proofmass; a pickoff voltage oscillator connected to the electrostatic plates; an amplifier connected to the proofmass for amplifying the analog output signal; a demodulator connected to the amplifier for demodulating the analog output signal; an integrator receiving the analog output signal from the demodulator, and providing a restore signal having an amplitude indicative of a displacement of the proofmass; an analog to digital converter receiving the restore signal and providing a digital output signal representative of the amplitude of the restore signal; a plurality of latches corresponding to the electrostatic plates, receiving the digital output signal, wherein each latch selectively provides an output control signal in accordance with the digital output signal; FET switches connected to each corresponding electrostatic plate and to each corresponding latch, wherein the output control signal selectively activates the FET switches; whereby the electrostatic plates are individually activated and generate a voltage driven electrostatic field that restores the proofmass to an initial position.

Claim 29

A digital force balanced instrument for detecting an outside force comprising: a semiconductor proofmass electrode, providing an analog output signal; a surrounding semiconductor substrate; a hinge supporting the proofmass on the surrounding substrate in a cantilevered position; gaps located between the proofmass and surrounding substrate; plurality of electrostatic plates selectively operating in unison to form one or more functional cells disposed in a grid pattern on the surrounding substrate, on opposite sides of the proofmass; a pickoff voltage oscillator connected to the electrostatic plates; an amplifier connected to the proofmass for amplifying the analog output signal; a demodulator connected to the amplifier for demodulating the analog output signal; an integrator receiving the analog output signal from the demodulator, and providing a restore signal having an amplitude indicative of a displacement of the proofmass; an analog to digital converter receiving the restore signal and providing a digital output signal representative of the amplitude of the restore signal; a plurality of latches corresponding to the electrostatic plates, receiving the digital output signal, wherein each latch selectively provides an output control signal in accordance with the digital output signal; FET switches connected to each corresponding electrostatic plate and to each corresponding latch, wherein the output control signal selectively activates the FET switches; whereby the electrostatic plates are individually activated and generate a voltage driven electrostatic field that restores the proofmass to an initial position.

Claim 30

The instrument of claim 24, wherein the plates have a constant surface area.

Claim 31

The instrument of claim 24, wherein each plate when activated holds a constant DC voltage.

Claim 32

The instrument of claim 24, wherein the pickoff voltage oscillator generates an AC voltage.

Claim 33

The instrument of claim 24, wherein the plates further comprise a polygonal shape.

Claim 34

A digital force balanced instrument for detecting an outside force comprising: a proofmass, including a centroid, to provide an analog output signal; a substrate surrounding the proofmass; a hinge supporting said proofmass on said surrounding substrate; plurality of electrostatic plates disposed on the surrounding substrate at a predetermined distance from the centroid; a pickoff voltage oscillator connected to the electrostatic plates; an integrator receiving the analog output signal and providing a restore signal having an amplitude indicative of a displacement of the proofmass; an analog to digital converter receiving the restore signal and providing a digital output signal representative of the amplitude of the restore signal; a plurality of latches corresponding to the electrostatic plates, said latches responding to the digital output signal to selectively provide an output control signal in accordance with the digital output signal, wherein a quantity of activated plates increases proportionally to a value contained in the digital output signal; and control switches connected to each corresponding electrostatic plate and each respective latch, wherein the output control signal selectively activates the control switches; whereby the electrostatic plates are individually activated and generate an electrostatic field that restores the proofmass to an initial position.

Claim 35

A digital force balanced instrument for detecting an outside force comprising: a proofmass, including a centroid, to provide an analog output signal; a substrate surrounding the proofmass; a hinge supporting said proofmass on said surrounding substrate; plurality of electrostatic plates disposed on the surrounding substrate at a predetermined distance from the centroid; a pickoff voltage oscillator connected to the electrostatic plates; an integrator receiving the analog output signal and providing a restore signal having an amplitude indicative of a displacement of the proofmass; an analog to digital converter receiving the restore signal and providing a digital output signal representative of the amplitude of the restore signal; a plurality of latches corresponding to the electrostatic plates, said latches responding to the digital output signal to selectively provide an output control signal in accordance with the digital output signal, wherein a quantity of activated plates increases proportionally to a value contained in the digital output signal; and control switches connected to each corresponding electrostatic plate and each respective latch, wherein the output control signal selectively activates the control switches; whereby the electrostatic plates are individually activated and generate an electrostatic field that restores the proofmass to an initial position.