US5497262A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Support posts for micro-mechanical devices
Assignee: Texas Instruments Inc
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Filing: 1995-06-07
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Granted: 1996-03-05
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Expires: 2015-06-07
Abstract
Abstract An improved support post (16, 23, 25) for micro-mechanical devices (10). A via (34a) that defines the outer surface of the support post (16) is etched into a spacer layer (34). An oxide layer (41) is conformally deposited over the spacer layer (34) and into the via (34a), and then etched back to the top surface of the spacer layer (34), leaving a sidewall ring (23a) on the inner surface of the via (34a). Next, a metal layer (61) is deposited over the spacer layer (34) and into the via (34a) so as to cover the sidewall ring (23a). This metal layer (61) is then etched to form a support post stem (23) inside the via (34a). The spacer layer (34) is removed, leaving the support post stem (23) and a sidewall ring (23a) around the stem (23).
Inventors
- 👤 Toshiyuki Kaeriyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:50
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
128 words
An improved method of fabricating support posts for a micro-mechanical device, wherein the improvement comprises: depositing a spacer layer over a substrate; etching vias into said spacer layer, each via defining the outer surface of a support post; depositing an oxide layer over said spacer layer and into said vias, such that said oxide layer substantially conformally coats the inside surface of said vias; etching back said oxide layer to the top surface of said spacer layer, such that a sidewall ring remaining from said oxide layer coats the inside surfaces of each via; depositing a post metal layer over said spacer layer, such that said post metal layer coats the inside surface of said sidewall rings; and etching said post metal layer to form said support posts.
Claim 2
Dependent Claim
128 words
An improved method of fabricating support posts for a micro-mechanical device, wherein the improvement comprises: depositing a spacer layer over a substrate; etching vias into said spacer layer, each via defining the outer surface of a support post; depositing an oxide layer over said spacer layer and into said vias, such that said oxide layer substantially conformally coats the inside surface of said vias; etching back said oxide layer to the top surface of said spacer layer, such that a sidewall ring remaining from said oxide layer coats the inside surfaces of each via; depositing a post metal layer over said spacer layer, such that said post metal layer coats the inside surface of said sidewall rings; and etching said post metal layer to form said support posts.
Claim 3
Dependent Claim
18 words
The method of claim 1, wherein said step of depositing an oxide layer is performed at room temperature.
Claim 4
Dependent Claim
24 words
The method of claim 1, wherein said step of depositing an oxide layer is performed at a temperature between room temperature and 120 degrees.
Claim 5
Dependent Claim
24 words
The method of claim 1, wherein said step of depositing an oxide layer is performed by depositing oxide by means of a fluorotriethoxysilane source.
Claim 6
Dependent Claim
22 words
The method of claim 1, wherein said depositing step is performed by depositing oxide by means of a tetramethyl siloxane (TMDS) source.
Claim 7
Dependent Claim
17 words
The method of claim 1, wherein said step of etching back is performed with an anisotropic etch.
Claim 8
Dependent Claim
18 words
The method of claim 1, wherein said step of depositing a post metal layer is performed by sputtering.
References Cited (Backward Citations)
US4592628A
Cited
US5083857A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-05 | 1999-09-04 | 2000-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-05 | 2003-09-04 | 2004-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-05 | 2007-09-04 | 2008-03-05 | $7700.00 | Window Closed / Lapsed |