US5497007A
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Method for automatically establishing a wafer coordinate system
Assignee: Applied Materials Inc
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Filing: 1995-01-27
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Granted: 1996-03-05
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Expires: 2015-01-27
Abstract
Abstract An automated method for establishing a wafer coordinate system for a wafer characterization system. Specifically, under computer control, a high-magnification imaging system images a wafer at a low, initial magnification level. From this imaging process, the method first determines the location of the center of the semiconductor wafer mounted within the imaging system and then determines the wafer orientation therein. The method then repeats the imaging process at increased magnification levels until a desired degree of magnification is used to accurately define the location of the wafer center and the wafer orientation. Together the wafer center and orientation define a wafer coordinate system. This wafer coordinate system is then related to the coordinate system of the imaging system by a coordinate system transformation. As such, once the coordinate systems are related, the imaging system can quickly and accurately determine any point on a wafer. The method uses various wafer edge locations to determine the wafer center location and wafer orientation. These edge locations are determined by either: (1) using a scanning electron microscope in conjunction with an image processing technique, or (2) using an energy dispersive x-ray detector to detect changes in the SiK alpha line intensity.
Inventors
- 👤 Yuri S. Uritsky
- 👤 Harry Q. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:39
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045; H01J2237/00; H01J2237/244; H01J2237/2441; H01J2237/24415; H01J2237/2442; H01J2237/25; H01J2237/2505; H01J2237/2594
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
113 words
A method for establishing a wafer coordinate system comprising the steps of: (a) setting an initial magnification level for a wafer imaging system; (b) determining coordinates of a wafer center location in an imaging system coordinate system; (c) increasing the magnification level of the wafer imaging system; (d) repeating step (b) and (c) until a maximum magnification level is attained; (e) resetting the magnification level to the initial magnification level; (f) determining coordinates of a wafer landmark location in an imaging system coordinate system; (g) increasing the magnification level of the wafer imaging system; (h) repeating step (f) and (g) until a maximum magnification level is attained; (i) defining a wafer coordinate system.
Claim 2
Independent Claim
113 words
A method for establishing a wafer coordinate system comprising the steps of: (a) setting an initial magnification level for a wafer imaging system; (b) determining coordinates of a wafer center location in an imaging system coordinate system; (c) increasing the magnification level of the wafer imaging system; (d) repeating step (b) and (c) until a maximum magnification level is attained; (e) resetting the magnification level to the initial magnification level; (f) determining coordinates of a wafer landmark location in an imaging system coordinate system; (g) increasing the magnification level of the wafer imaging system; (h) repeating step (f) and (g) until a maximum magnification level is attained; (i) defining a wafer coordinate system.
Claim 3
Dependent Claim
24 words
The method of claim 1 further comprising the step of determining a transformation between the imaging system coordinate system and the wafer coordinate system.
Claim 4
Dependent Claim
58 words
The method of claim 1 wherein step (b) further comprises the steps of: determining coordinates for a plurality of wafer edge locations; performing a least squares fit to a circle to determine a circle that passes through substantially all the coordinates for said plurality of wafer edge locations; and determining coordinates for a center location of said circle.
Claim 5
Dependent Claim
67 words
The method of claim 3 wherein the step of determining coordinates for a plurality of wafer edge locations further comprises the steps of: imaging the wafer; capturing an image containing a portion of the wafer having increased contrast over the brightness of a planar portion of the wafer; and analyzing the captured image to determine the coordinates of an edge location represented by the increased contrast portion.
Claim 6
Dependent Claim
81 words
The method of claim 3 wherein the step of determining coordinates for a plurality of wafer edge locations further comprises the steps of: monitoring an output signal from an energy dispersive x-ray detector that is responsive to SiK.sub.α intensity line emitted by the wafer when the wafer is bombarded by electrons; and capturing, as wafer edge coordinates, coordinates of the electron beam on the surface of the wafer at a point where the output signal falls below a predefined threshold level.
Claim 7
Dependent Claim
18 words
The method of claim 1 wherein said wafer landmark is a notch in the edge of the wafer.
Claim 8
Dependent Claim
19 words
The method of claim 1 wherein said wafer landmark is a flatted portion of the edge of the wafer.
Claim 9
Dependent Claim
75 words
The method of claim 1 wherein said step of defining said wafer coordinate system further comprises the steps of: defining an origin of a wafer coordinate system as the wafer center location; defining a first axis of said wafer coordinate system as a line extending from said origin through said landmark location; and defining a second axis of said wafer coordinate system as a line extending from said origin and orthogonal to said first axis.
Claim 10
Dependent Claim
24 words
The method of claim 8 further comprising the step of determining a transformation between the imaging system coordinate system and the wafer coordinate system.
Claim 11
Dependent Claim
66 words
The method of claim 9 wherein transformation determining step further comprises the steps of: determining a transformation vector defined by the origin of the imaging system coordinate system and the coordinates in the imaging system coordinate system of the wafer center; and determining a rotation angle from the angle between an axis of the imaging system coordinate system and an axis of the wafer coordinate system.
Claim 12
Independent Claim
205 words
A method for establishing a wafer coordinate system comprising the steps of: (a) setting an initial magnification level for a wafer imaging system; (b) determining a coordinate location on a wafer edge in an imaging system coordinate system; (c) increasing the magnification level of the wafer imaging system; (d) repeating steps (b) and (c) until a maximum magnification level is attained; (e) repeating steps (a), (b), (c) and (d) until a plurality of wafer edge coordinate locations are determined; (f) determining coordinates of a wafer center location in an imaging system coordinate system using the plurality of wafer edge coordinate locations; (h) setting an initial magnification level for the wafer imaging system; (i) determining a coordinate location of a landmark location in an imaging system coordinate system; (j) increasing the magnification level of the wafer imaging system; (k) repeating steps (i) and (j) until a maximum magnification level is attained; (l) repeating steps (h), (i), (j) and (k) until a plurality of landmark coordinate locations are determined; (m) determining coordinates of a composite landmark location in an imaging system coordinate system using the plurality of landmark coordinate locations; (f) defining a wafer coordinate system using said coordinates of said wafer center and said landmark locations.
Claim 13
Independent Claim
205 words
A method for establishing a wafer coordinate system comprising the steps of: (a) setting an initial magnification level for a wafer imaging system; (b) determining a coordinate location on a wafer edge in an imaging system coordinate system; (c) increasing the magnification level of the wafer imaging system; (d) repeating steps (b) and (c) until a maximum magnification level is attained; (e) repeating steps (a), (b), (c) and (d) until a plurality of wafer edge coordinate locations are determined; (f) determining coordinates of a wafer center location in an imaging system coordinate system using the plurality of wafer edge coordinate locations; (h) setting an initial magnification level for the wafer imaging system; (i) determining a coordinate location of a landmark location in an imaging system coordinate system; (j) increasing the magnification level of the wafer imaging system; (k) repeating steps (i) and (j) until a maximum magnification level is attained; (l) repeating steps (h), (i), (j) and (k) until a plurality of landmark coordinate locations are determined; (m) determining coordinates of a composite landmark location in an imaging system coordinate system using the plurality of landmark coordinate locations; (f) defining a wafer coordinate system using said coordinates of said wafer center and said landmark locations.
Claim 14
Dependent Claim
24 words
The method of claim 11 further comprising the step of determining a transformation between the imaging system coordinate system and the wafer coordinate system.
Claim 15
Dependent Claim
49 words
The method of claim 11 wherein step (f) further comprises the steps of: performing a least squares fit to a circle to determine a circle that passes through substantially all the coordinates for said plurality of wafer edge locations; and determining coordinates for a center location of said circle.
Claim 16
Dependent Claim
65 words
The method of claim 13 wherein the step of determining coordinates for a wafer edge location further comprises the steps of: imaging the wafer; capturing an image containing a portion of the wafer having increased contrast over the brightness of a planar portion of the wafer; and analyzing the captured image to determine the coordinates of an edge location represented by the increased contrast portion.
Claim 17
Dependent Claim
79 words
The method of claim 13 wherein the step of determining coordinates for a wafer edge locations further comprises the steps of: monitoring an output signal from an energy dispersive x-ray detector that is responsive to SiK.sub.α intensity line emitted by the wafer when the wafer is bombarded by electrons; and capturing, as wafer edge coordinates, coordinates of the electron beam on the surface of the wafer at a point where the output signal falls below a predefined threshold level.
Claim 18
Dependent Claim
17 words
The method of claim 11 wherein said landmark is a notch in the edge of the wafer.
Claim 19
Dependent Claim
18 words
The method of claim 11 wherein said landmark is a flatted portion of the edge of the wafer.
Claim 20
Dependent Claim
75 words
The method of claim 11 wherein said step of defining said wafer coordinate system further comprises the steps of: defining an origin of a wafer coordinate system as the wafer center location; defining a first axis of said wafer coordinate system as a line extending from said origin through said landmark location; and defining a second axis of said wafer coordinate system as a line extending from said origin and orthogonal to said first axis.
Claim 21
Dependent Claim
24 words
The method of claim 18 further comprising the step of determining a transformation between the imaging system coordinate system and the wafer coordinate system.
Claim 22
Dependent Claim
66 words
The method of claim 19 wherein transformation determining step further comprises the steps of: determining a transformation vector defined by the origin of the imaging system coordinate system and the coordinates in the imaging system coordinate system of the wafer center; and determining a rotation angle from the angle between an axis of the imaging system coordinate system and an axis of the wafer coordinate system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1999-03-05 | 1999-09-04 | 2000-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-05 | 2003-09-04 | 2004-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-05 | 2007-09-04 | 2008-03-05 | $7700.00 | Window Closed / Lapsed |