US5490220A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Solid state condenser and microphone devices
Assignee: Knowles Electronics LLC
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Filing: 1994-05-05
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Granted: 1996-02-06
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Expires: 2014-05-05
Abstract
Abstract A solid state miniature condenser and condenser microphone of good sensitivity is disclosed. The microphone comprises a fixed perforated backplate that constitutes a fixed electrode in a parallel plate condenser, a diaphragm sensitive to incident sound pressure waves that constitutes a moveable plate in the parallel plate condenser, keepers to position the diaphragm in relationship to the backplate without applying appreciable tension to the diaphragm, and FET circuitry which provides an output proportional to the change in capacitance of the condenser when the diaphragm moves in relationship to the backplate.
Inventors
- 👤 Peter V. Loeppert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 07:58
CPC Classifications
G; G01; G01H; G01H11/00; G01H11/06; B; B81; B81B; B81B3/00; B81B3/0064; B81B3/0067; B81B3/0072; H; H04; H04R; H04R19/00; H04R19/005; H04R19/04; B81B2201/00; B81B2201/02; B81B2201/0257; H04R25/00; H04R25/60; H04R25/604
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
100 words
A solid state condenser device comprising: a backplate constituting a fixed electrode in a parallel plate condenser; a diaphragm having a thickness, said diaphragm being sensitive to incident sound pressure waves, said diaphragm constituting a moveable electrode in said parallel plate condenser; and means comprising a keeper, said keeper being formed of a thin-film dielectric and having a keeper gap to receive said diaphragm in operative positional relationship with said backplate, said keeper gap having a thickness greater than the thickness of said diaphragm to retain said diaphragm without physical attachment thereto, to avoid applying appreciable tension to said diaphragm.
Claim 2
Dependent Claim
100 words
A solid state condenser device comprising: a backplate constituting a fixed electrode in a parallel plate condenser; a diaphragm having a thickness, said diaphragm being sensitive to incident sound pressure waves, said diaphragm constituting a moveable electrode in said parallel plate condenser; and means comprising a keeper, said keeper being formed of a thin-film dielectric and having a keeper gap to receive said diaphragm in operative positional relationship with said backplate, said keeper gap having a thickness greater than the thickness of said diaphragm to retain said diaphragm without physical attachment thereto, to avoid applying appreciable tension to said diaphragm.
Claim 3
Dependent Claim
10 words
The device of claim 1 wherein said backplate is perforated.
Claim 4
Dependent Claim
16 words
The device of claim 1 wherein said keeper is disposed at the periphery of said diaphragm.
Claim 5
Dependent Claim
25 words
The solid state condenser device of claim 1 wherein the means to retain the diaphragm includes clamps and a tail member fixed to the backplate.
Claim 6
Dependent Claim
21 words
The device of claim 1 wherein said keeper support extends from said keeper arm at an angle of substantially 90 degrees.
Claim 7
Dependent Claim
18 words
The device of claim 1 including a plurality of said keepers disposed about the periphery of said diaphragm.
Claim 8
Dependent Claim
20 words
The device of claim 6 wherein said plurality of keepers are substantially equally spaced about the periphery of said diaphragm.
Claim 9
Dependent Claim
18 words
The device of claim 1 wherein said keeper is disposed radially inward of the periphery of said diaphragm.
Claim 10
Dependent Claim
20 words
The device of claim 1 including a plurality of said keepers disposed radially inward of the periphery of said diaphragm.
Claim 11
Dependent Claim
26 words
The solid state condenser microphone device of claim 7 wherein the means to retain the diaphragm includes clamps and a tail member fixed to the backplate.
Claim 12
Dependent Claim
105 words
A solid state condenser device comprising: a fixed backplate constituting a fixed electrode in a parallel plate condenser; a diaphragm having a thickness, said diaphragm being sensitive to incident sound pressure waves, said diaphragm constituting a moveable electrode in said parallel plate condenser; and means comprising a plurality of keepers, each of said keepers being formed of a thin-film dielectric and having a keeper gap to receive said diaphragm in operative positional relationship with said backplate, said keeper gap having a thickness greater than the thickness of said diaphragm to retain said diaphragm, without physical attachment thereto to avoid applying appreciable tension to said diaphragm.
Claim 13
Dependent Claim
105 words
A solid state condenser device comprising: a fixed backplate constituting a fixed electrode in a parallel plate condenser; a diaphragm having a thickness, said diaphragm being sensitive to incident sound pressure waves, said diaphragm constituting a moveable electrode in said parallel plate condenser; and means comprising a plurality of keepers, each of said keepers being formed of a thin-film dielectric and having a keeper gap to receive said diaphragm in operative positional relationship with said backplate, said keeper gap having a thickness greater than the thickness of said diaphragm to retain said diaphragm, without physical attachment thereto to avoid applying appreciable tension to said diaphragm.
Claim 14
Dependent Claim
10 words
The device of claim 11 wherein said backplate is perforated.
Claim 15
Dependent Claim
18 words
The device of claim 11 wherein said plurality of keepers are disposed about the periphery of said diaphragm.
Claim 16
Dependent Claim
19 words
The device of claim 13 wherein said plurality of keepers are equally spaced about the periphery of said diaphragm.
Claim 17
Dependent Claim
20 words
The device of claim 11 wherein said plurality of keepers are disposed radially inward of the periphery of said diaphragm.
Claim 18
Dependent Claim
101 words
A solid state condenser device comprising: a fixed perforated backplate which constitutes a fixed electrode in a parallel plate condenser; a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; and means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm, said retaining means comprising a plurality of keepers, each of said keepers being formed of a thin-film dielectric and having a keeper gap to receive said diaphragm, said keeper gap having a thickness greater than the thickness of said diaphragm to retain said diaphragm.
Claim 19
Dependent Claim
101 words
A solid state condenser device comprising: a fixed perforated backplate which constitutes a fixed electrode in a parallel plate condenser; a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; and means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm, said retaining means comprising a plurality of keepers, each of said keepers being formed of a thin-film dielectric and having a keeper gap to receive said diaphragm, said keeper gap having a thickness greater than the thickness of said diaphragm to retain said diaphragm.
Claim 20
Dependent Claim
25 words
The solid state condenser microphone device of claim 14 wherein the means to retain the diaphragm clamps and a tail member fixed to the backplate.
Claim 21
Dependent Claim
16 words
The solid state condenser device of claim 16 wherein the diaphragm is a silicon nitride diaphragm.
Claim 22
Dependent Claim
117 words
A solid state condenser microphone device prepared on a single silicon wafer which comprises: a fixed perforated backplate, prepared from said silicon wafer, which constitutes a fixed electrode in a parallel plate condenser; a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm, wherein the diaphragm is retained in relation to said backplate by a plurality of thin-film dielectric keepers fixed to the backplate; and a Field Effect Transistor circuit electrically connected to said backplate and said diaphragm to provide an output when said diaphragm moves in relationship to said backplate.
Claim 23
Dependent Claim
117 words
A solid state condenser microphone device prepared on a single silicon wafer which comprises: a fixed perforated backplate, prepared from said silicon wafer, which constitutes a fixed electrode in a parallel plate condenser; a diaphragm sensitive to incident sound pressure waves which constitutes a moveable electrode in said parallel plate condenser; means to retain said diaphragm in operative relation to said backplate without applying appreciable tension to said diaphragm, wherein the diaphragm is retained in relation to said backplate by a plurality of thin-film dielectric keepers fixed to the backplate; and a Field Effect Transistor circuit electrically connected to said backplate and said diaphragm to provide an output when said diaphragm moves in relationship to said backplate.
Claim 24
Dependent Claim
20 words
The solid state condenser microphone device of claim 19 wherein the backplate is prepared from a boron doped silicon wafer.
Claim 25
Dependent Claim
17 words
The solid state condenser microphone device of claim 19 wherein the diaphragm is a silicon nitride diaphragm.
Claim 26
Dependent Claim
21 words
The solid state condenser microphone device of claim 19 wherein the Field Effect Transistor circuitry is integrated on the silicon wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-02-05 | 1999-08-07 | 2000-02-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-02-05 | 2003-08-07 | 2004-02-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-02-05 | 2007-08-07 | 2008-02-06 | $7700.00 | Window Closed / Lapsed |