US5487785A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma treatment apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1994-03-25
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Granted: 1996-01-30
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Expires: 2014-03-25
Abstract
Abstract A semiconductor wafer plasma treatment apparatus comprising a processing vessel whose interior is maintained at a predetermined degree of vacuum; a plasma generation means which is arranged on an upper surface of the processing vessel and generates radio-frequency waves into the interior thereof, to cause the generation of a plasma in the process gas within the processing vessel; and a holder for holding a semiconductor wafer that is to be subjected to a predetermined treatment by the plasma generated from the process gas by the action of the plasma generation means, a supply means which supplies process gas into the processing vessel comprises first gas supply pipes that are arranged at positions equidistant in the peripheral direction around the processing vessel and a second gas supply pipe that is arranged at the center of an upper surface of the processing vessel, and gas exhaust means from exhaust gases from the processing vessel is arranged at positions equidistant in the peripheral direction around the processing vessel. This configuration counters any drop in the plasma density at the central portion of the processing vessel to obtain a uniformly high-density plasma, making it possible to subject large-diameter semiconductor wafers to uniform, rapid treatment.
Inventors
- 👤 Yasuhiro Horiike
- 👤 Takayuki Fukasawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:02
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; H; H10; H10P; H10P95/00; C23C16/50; C23C16/505; C23C16/507
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
202 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma in said process gas; and holder means provided in said processing vessel to hold an object to be subjected to treatment by said plasma, said object having a surface to be treated; said gas supply means comprising; a plurality of first gas supply means arranged equidistantly around a periphery of said processing vessel, said first gas supply means being provided to direct the process gas toward a center of said processing vessel and over said surface of the object; and second gas supply means arranged at a center of an upper portion of said processing vessel to supply the process gas toward a central portion of the processing vessel and over said surface of the object; said gas exhaust means comprising a plurality of gas exhaust structres arranged equidistantly around said periphery of said process vessel.
Claim 2
Dependent Claim
202 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma in said process gas; and holder means provided in said processing vessel to hold an object to be subjected to treatment by said plasma, said object having a surface to be treated; said gas supply means comprising; a plurality of first gas supply means arranged equidistantly around a periphery of said processing vessel, said first gas supply means being provided to direct the process gas toward a center of said processing vessel and over said surface of the object; and second gas supply means arranged at a center of an upper portion of said processing vessel to supply the process gas toward a central portion of the processing vessel and over said surface of the object; said gas exhaust means comprising a plurality of gas exhaust structres arranged equidistantly around said periphery of said process vessel.
Claim 3
Dependent Claim
170 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel, said gas supply means including a plurality of first gas supply means arranged equidistantly around a periphery of said processing vessel, and second gas supply means arranged at a center of aun upper portion of said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed, said gas exhaust means including a plurality of gas exhaust structures arranged equidistantly around said periphery of said processinmg vessel; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma in said process gas, said plasma generation means comprising a one-turn loop antenna having an outer diameter greater than that of an object to be treated; and holder means provided in said processing vessel to hold said object to be subjected to treatment by said plasma.
Claim 4
Dependent Claim
170 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel, said gas supply means including a plurality of first gas supply means arranged equidistantly around a periphery of said processing vessel, and second gas supply means arranged at a center of aun upper portion of said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed, said gas exhaust means including a plurality of gas exhaust structures arranged equidistantly around said periphery of said processinmg vessel; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma in said process gas, said plasma generation means comprising a one-turn loop antenna having an outer diameter greater than that of an object to be treated; and holder means provided in said processing vessel to hold said object to be subjected to treatment by said plasma.
Claim 5
Dependent Claim
41 words
A plasma treatment apparatus in accordance with claim 1, wherein said first gas supply means is positioned higher than said gas exhaust structures and is positioned between two neighboring gas exhaust structures with respect to the perimeter of said processing vessel.
Claim 6
Dependent Claim
44 words
A plasma treatment apparatus in accordance with claim 1, further comprising a capacitor for maintaining a bias potential of said holder means, said capacitor having a capacitance at least 10 times that of an ion sheath formed in the vicinity of said holder means.
Claim 7
Dependent Claim
25 words
A plasma treatment apparatus in accordance with claim 4, wherein the capacitance of said capacitor is at least 50 times that of said ion sheath.
Claim 8
Dependent Claim
25 words
A plasma treatment apparatus in accordance with claim 4, wherein the capacitance of said capacitor is at least 50 times that of said ion sheath.
Claim 9
Dependent Claim
105 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintaind at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; application means provided in an upper portion of said processing vessel; helical wave plasma generation means provided surrounding said application means and causing generation of a helical wave plasma; and second plasma generation means provided above said application means, to generate radio-frequency waves and direct them toward an interior of said application means and thus increase the density of said plasma.
Claim 10
Dependent Claim
105 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintaind at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; application means provided in an upper portion of said processing vessel; helical wave plasma generation means provided surrounding said application means and causing generation of a helical wave plasma; and second plasma generation means provided above said application means, to generate radio-frequency waves and direct them toward an interior of said application means and thus increase the density of said plasma.
Claim 11
Dependent Claim
36 words
A plasma treatment apparatus in accordance with claim 7, wherein said second plasma generation means comprises a loop antenna, a radio-frequency power source, and matching means inserted between said loop antenna and said radio-frequency power source.
Claim 12
Dependent Claim
69 words
A plasma treatment apparatus in accordance with claim 7, wherein said gas supply means comprises a plurality of first gas supply means arranged equidistantly around a periphery of said processing vessel and second gas supply means arranged at a center of an upper surface of said processing vessel, and wherein said gas exhaust means comprises a plurality of gas exhaust structures arranged equidistantly around periphery of said processing vessel.
Claim 13
Dependent Claim
162 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; holder means for holding an object to be treated in said processing vessel; and helical plasma generation means provided in a side portion of said processing vessel, to cause a helical wave plasma to be generated within said process gas in a flat-plate-shaped region interposed within a gap proximal to an object that is held on said holder means; said helical plasma generation means comprising: electromagnetic wave generation mean for generating electromagnetic waves parallel to said object on said holder means; and rectangular magnetic field shaping means for shaping a rectangular magnetic field in a same direction as electromagnetic waves from said electromagnetic wave generation means to cause generation of said helical wave plasma from said electrogmagnetic waves.
Claim 14
Dependent Claim
162 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; holder means for holding an object to be treated in said processing vessel; and helical plasma generation means provided in a side portion of said processing vessel, to cause a helical wave plasma to be generated within said process gas in a flat-plate-shaped region interposed within a gap proximal to an object that is held on said holder means; said helical plasma generation means comprising: electromagnetic wave generation mean for generating electromagnetic waves parallel to said object on said holder means; and rectangular magnetic field shaping means for shaping a rectangular magnetic field in a same direction as electromagnetic waves from said electromagnetic wave generation means to cause generation of said helical wave plasma from said electrogmagnetic waves.
Claim 15
Dependent Claim
31 words
A plasma treatment apparatus in accordance with claim 10, wherein said helical plasma generation means comprises a pair of means arranged symmetrically on sides of said facing toward said processing vessel.
Claim 16
Dependent Claim
49 words
A plasma treatment apparatus in accordance with claim 10, wherein said gas supply means comprises a plurality of scattered gas supply holes in a gas supply head, said gas supply head being positioned above said holder means for supplying said process gas in a direction toward said holder means.
Claim 17
Dependent Claim
33 words
A plasma treatment apparatus in accordance with claim 10, further comprising a magnetic path provided around the periphery of said holder means for reducing the magnetic field in the vicinity of said object.
Claim 18
Dependent Claim
69 words
A plasma treatment apparatus in accordance with claim 10, wherein said gas supply means comprises a plurality of first gas supply means arranged equidistantly around a periphery of said processing vessel, and second gas supply means provided at a center of an upper portion of said processing vessel, and wherein said gas exhaust means comprises a plurality of gas exhaust structure arranged around a periphery of said processing vessel.
Claim 19
Dependent Claim
187 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means exhausting gases from within said processing vessel after treatment is completed; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma; and holding means provided in said processing vessel to hold an object to be subjected to treatment by said plasma, said object having a surface to be treated; said gas supply means comprising: a plurality of first gas supply means arranged equidistantly around said processing vessel to supply the process gas toward a central portion within the processing vessel and over said surface of the object; and second gas supply means arranged at an upper portion of said processing vessel to supply the process gas downward toward a central portion of the processing vessel and over said surface of the objecgt; said gas exhaust means comprising a pluraity of gas exhaust structures arranged equidxistantly in the peripheral direction around said processing vessel.
Claim 20
Dependent Claim
187 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means exhausting gases from within said processing vessel after treatment is completed; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma; and holding means provided in said processing vessel to hold an object to be subjected to treatment by said plasma, said object having a surface to be treated; said gas supply means comprising: a plurality of first gas supply means arranged equidistantly around said processing vessel to supply the process gas toward a central portion within the processing vessel and over said surface of the object; and second gas supply means arranged at an upper portion of said processing vessel to supply the process gas downward toward a central portion of the processing vessel and over said surface of the objecgt; said gas exhaust means comprising a pluraity of gas exhaust structures arranged equidxistantly in the peripheral direction around said processing vessel.
Claim 21
Dependent Claim
188 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma, said plasma generation means comprising a one-turn loop antenna having an outer diameter greater than that of an object to be treated; and holding means provided in said processing vessel to hold said object to be subjected to treatment by said plasma; said gas supply means comprising: a plurailty of first gas supply means arranged equidistantly aroun said processing vessel to supply the process gas toward a central portion within the processing vesse; and second gas supply means arranged at an upper portion of said processing vessel to supply the process gas downward toward a central portion of the processing vessel; said gas exhaust means comprising a plurality of gas exhaust structures arranged equidistantly in the peripheral direction around said processing vessel.
Claim 22
Dependent Claim
188 words
A plasma treatment apparatus comprising: a processing vessel capable of being maintained at a degree of vacuum; gas supply means for supplying a process gas into said processing vessel; gas exhaust means for exhausting gases from within said processing vessel after treatment is completed; plasma generation means provided in said processing vessel to generate radio-frequency waves within said processing vessel to cause generation of a plasma, said plasma generation means comprising a one-turn loop antenna having an outer diameter greater than that of an object to be treated; and holding means provided in said processing vessel to hold said object to be subjected to treatment by said plasma; said gas supply means comprising: a plurailty of first gas supply means arranged equidistantly aroun said processing vessel to supply the process gas toward a central portion within the processing vesse; and second gas supply means arranged at an upper portion of said processing vessel to supply the process gas downward toward a central portion of the processing vessel; said gas exhaust means comprising a plurality of gas exhaust structures arranged equidistantly in the peripheral direction around said processing vessel.
Claim 23
Dependent Claim
41 words
A plasma treatment apparatus in accordance with claim 15, wherein said first gas supply means is positioned higher than said gas exhaust structures and is positioned between two neighboring gas exhaust structures with respect to the perimeter of said processing vessel.
Claim 24
Dependent Claim
44 words
A plasma treatment apparatus in accordance with claim 15, further comprising a capacitor for maintianing a bias potential of said holding means, said capacitor having a capacitance at least 10 times that of an ion sheath formed in the vicinity of said holding means.
Claim 25
Dependent Claim
25 words
A plasma treatment apparatus in accordance with claim 15, wherein the capacitance of said capacitance is at least 50 times that of said ion sheath.
Claim 26
Dependent Claim
25 words
A plasma treatment apparatus in accordance with claim 15, wherein the capacitance of said capacitor is at least 100 times that of said ion sheath.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-29 | 1999-07-31 | 2000-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-29 | 2003-07-31 | 2004-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-29 | 2007-07-31 | 2008-01-30 | $7700.00 | Window Closed / Lapsed |