US5480048A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multilayer wiring board fabricating method
Assignee: Hitachi Ltd
•
Filing: 1993-08-30
•
Granted: 1996-01-02
•
Expires: 2013-08-30
Abstract
Abstract A multilayer wiring board fabricating method and a multilayer wiring board fabricated with use of the method that a solvent-free fluid polymer precursor is put on a wiring layer of a base substrate, and space among the wirings is exhausted and is filled with the precursor, and the precursor is hardened under a hydrostatic pressure and then the next wiring layer is formed before the above process is repeated one or more times. The multilayer wiring board fabricating method is excellent in the mass productivity and low cost and in that the wiring can be made highly dense with the substrate having vertical via conductors for connection among the conductor layers.
Inventors
- 👤 Naoya Kitamura
- 👤 Hisashi Sugiyama
- 👤 Yoshihide Yamaguchi
- 👤 Masayuki Kyoui
- 👤 Hideyasu Murooka
- 👤 Ryoji Iwamura
- 👤 Makio Watanabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:30
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H05; H05K; H05K3/00; H05K3/46; H05K3/4644; H05K3/4647; H05K2203/00; H05K2203/06; H05K2203/066; H05K2203/07; H05K2203/0703; H05K2203/0733; H05K2203/11; H05K2203/1189; H05K3/10; H05K3/108; H05K3/22; H05K3/24; H05K3/243; H05K3/40; H05K3/42; H05K3/425; H05K3/427; H05K3/4602
Claims Analysis
Total Claims: 56
Claim 1
Independent Claim
191 words
A method of fabricating a multilayer wiring board, comprising the steps of: 1) forming a base substrate having at least one of a horizontal wiring conductor and a vertical via conductor as wiring layers on at least one of surfaces thereof; 2) putting a mold having a planar surface on a wiring layer side of said base substrate and supplying a solvent-free fluid polymer precursor into between said base substrate and said mold; 3) exhausting between said mold and said base substrate; 4) moving said mold toward said base substrate before filling gaps between at least adjacent ones of the conductors on said base substrate with said solvent-free fluid polymer precursor; 5) applying a hydrostatic pressure to said solvent-free fluid polymer precursor; 6) hardening said solvent-free fluid polymer precursor at said hydrostatic pressure; 7) exposing an upper surface of said horizontal wiring conductor or said vertical via conductor; and 8) forming a wiring layer comprising at least one of another horizontal wiring conductor and another vertical via conductor connected with said horizontal wiring conductor and said vertical via conductor; wherein the steps 2) to 8) are of at least one set.
Claim 2
Independent Claim
191 words
A method of fabricating a multilayer wiring board, comprising the steps of: 1) forming a base substrate having at least one of a horizontal wiring conductor and a vertical via conductor as wiring layers on at least one of surfaces thereof; 2) putting a mold having a planar surface on a wiring layer side of said base substrate and supplying a solvent-free fluid polymer precursor into between said base substrate and said mold; 3) exhausting between said mold and said base substrate; 4) moving said mold toward said base substrate before filling gaps between at least adjacent ones of the conductors on said base substrate with said solvent-free fluid polymer precursor; 5) applying a hydrostatic pressure to said solvent-free fluid polymer precursor; 6) hardening said solvent-free fluid polymer precursor at said hydrostatic pressure; 7) exposing an upper surface of said horizontal wiring conductor or said vertical via conductor; and 8) forming a wiring layer comprising at least one of another horizontal wiring conductor and another vertical via conductor connected with said horizontal wiring conductor and said vertical via conductor; wherein the steps 2) to 8) are of at least one set.
Claim 3
Dependent Claim
39 words
The method of fabricating the multilayer wiring board according to claim 1 wherein said base substrate is a board selected from the group consisting of a printed wiring board, a metal cored wiring board, and a ceramic wring board.
Claim 4
Dependent Claim
22 words
The method of fabricating the multilayer wiring board according to claim 1 wherein said wiring layer has at least a copper conductor.
Claim 5
Independent Claim
35 words
The method of fabricating the multilayer wiring board according to claim i wherein the steps 1) to 8) are made at the same time on the both obverse and reverse surfaces of said base substrate.
Claim 6
Dependent Claim
51 words
The method of fabricating the multilayer wiring board according to claim 2 wherein said base substrate is the printed wiring board having a plated through-hole, a patterned surface-layer conductor, and a via conductor connected with at least one selected from the group consisting of the plated through-hole and the surface-layer conductor.
Claim 7
Dependent Claim
30 words
The method of fabricating the multilayer wiring board according to claim 2 wherein said base substrate is the printed wiring board having a plated through-hole and a patterned surface-layer conductor.
Claim 8
Dependent Claim
32 words
The method of fabricating the multilayer wiring board according to claim 2 wherein said base substrate is the printed wiring board having a plated through-hole and a surface-layer conductor to be patterned.
Claim 9
Dependent Claim
99 words
The method of fabricating the multilayer wiring board according to claim 5 wherein the method uses the printed wiring board having the plated through-hole and a surface-layer conductor to be patterned that is fabricated by a method including the steps of: 1') forming a positive pattern of a resist at a desired position; 2') filling the positive pattern of the resist with the via conductor before removal of the resist; 3') forming a negative pattern of a resist at a desired position; and 4') patterning the surface-layer conductor to a desired shape by etching before removal of the resist.
Claim 10
Dependent Claim
37 words
The method of fabricating the multilayer wiring board according to claim 1 wherein said solvent-free fluid polymer precursor is one selected from the group consisting of a film, a powder, and a membrane coated to said mold.
Claim 11
Dependent Claim
32 words
The method of fabricating the multilayer wiring board according to claim 1 wherein said solvent-free fluid polymer precursor is a membrane coated to at least the wiring layer on said base substrate.
Claim 12
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 1 wherein at the step 3) of exhausting between said mold and said base substrate, a degree of vacuum is not higher than 20 torr.
Claim 13
Dependent Claim
55 words
The method of fabricating the multilayer wiring board according to claim 1 wherein at the step 4) of moving said mold toward said base substrate before filling gaps between at least adjacent ones of the conductors on said base substrate with said solvent-free fluid polymer precursor, said solvent-free fluid polymer precursor is heated to melt.
Claim 14
Dependent Claim
65 words
The method of fabricating the multilayer wiring board according to claim 1 wherein at the step 4) of moving said mold toward said base substrate before filling gaps between at least adjacent ones of the conductors on said base substrate with said solvent-free fluid polymer precursor, a pressure between said mold and said base substrate is decreased to move said mold toward said base substrate.
Claim 15
Dependent Claim
38 words
The method of fabricating the multilayer wiring board according to claim 1 wherein at the step 4), a vertical compression pressure is applied to said mold and said base substrate to move said mold toward said base substrate.
Claim 16
Dependent Claim
25 words
The method of fabricating the multilayer wiring board according to claim 14 wherein the vertical compression pressure is not higher than 30 kgf/cm 2 .
Claim 17
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 1 wherein at the steps 4) and 5), a vertical compression pressure and a horizontal compression gas pressure are applied to obtain the hydrostatic pressure.
Claim 18
Dependent Claim
24 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the hydrostatic pressure is not higher than 20 kgf/cm 2 .
Claim 19
Dependent Claim
29 words
The method of fabricating the multilayer wiring board according to claim 16 wherein the vertical compression pressure is made higher than or equal to the horizontal compression gas pressure.
Claim 20
Dependent Claim
35 words
The method of fabricating the multilayer wiring board according to claim 18 wherein a difference of the vertical compression pressure from the horizontal compression gas pressure is made not higher than 10 kgf/cm 2 .
Claim 21
Dependent Claim
54 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 6) has a multi-step hardening process, including a first hardening step of hardening with the hydrostatic pressure applied in said mold and a second hardening step of hardening with no hydrostatic pressure applied after release from the said mold.
Claim 22
Dependent Claim
26 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 7) is made by a wet etching or a dry etching.
Claim 23
Dependent Claim
28 words
The method of fabricating the multilayer wiring board according to claim 21 wherein the wet etching is made with a solution of permanganate or a solution of chromate.
Claim 24
Dependent Claim
26 words
The method of fabricating the multilayer wiring board according to claim 21 wherein the dry etching is made with an O 2 plasma or a UV/ozone.
Claim 25
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 7) is made while said solvent-free fluid polymer precursor is in an incomplete hardening state before the precursor is completely hardened.
Claim 26
Dependent Claim
61 words
The method of fabricating the multilayer wiring board according to claim 1, further comprising between the steps 7) and 8) an additional step of polishing to make a height of said horizontal wiring conductor or said vertical via conductor of which the upper surface is exposed uniform by way of at least one of a mechanical polishing and a chemical polishing.
Claim 27
Dependent Claim
122 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a conductive undercoat film connected with said vertical via conductor of the base substrate; 2') forming a positive pattern of a resist for said horizontal wiring conductor at a desired position on said conductive undercoat film; 3') filling the positive pattern of the resist with said horizontal wiring; 4') forming a positive pattern of a resist for said vertical via conductor at a desired position on said horizontal wiring conductor; 5') filling the positive pattern of the resist with said vertical via conductor; 6') removal of the two resist layers; and 7') etching unnecessary portions of said conductive undercoat film.
Claim 28
Dependent Claim
85 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a conductive undercoat film connected with said vertical via conductor of the base substrate; 2') forming a positive pattern of a resist for said horizontal wiring conductor at a desired position on said conductive undercoat film; 3') filling the positive pattern of the resist with said horizontal wiring; 4') removal of the resist; and 5') etching unnecessary portions of said conductive undercoat film.
Claim 29
Dependent Claim
85 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a conductive undercoat film connected with said vertical via conductor of the base substrate; 2') forming a conductor on said conductive undercoat film. 3') forming a negative pattern of a resist for said horizontal wiring conductor at a desired position on said conductor; and 4') patterning said conductor and said conductive undercoat film to desired shapes by etching before removal of the resist.
Claim 30
Dependent Claim
65 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a positive pattern of a resist for said vertical via conductor at a desired position on said horizontal wiring conductor of said base substrate; and 2') filling the positive pattern of the resist with said vertical via conductor before removal of the resist.
Claim 31
Dependent Claim
103 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a positive pattern of a resist for said vertical via conductor or said horizontal wiring at a desired position on a surface-layer conductor to be patterned of said base substrate; 2') filling the positive pattern of the resist with said vertical via conductor or said horizontal wiring before removal of the resist. 3') forming a negative pattern of a resist at a desired position; and 4') patterning said surface-layer conductor to a desired shape by etching before removal of the resist.
Claim 32
Dependent Claim
104 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a negative pattern of a resist at a desired position on a surface-layer conductor to be patterned of said base substrate; ' ) patterning said surface-layer conductor to a desired shape by etching before removal of the resist. 3') forming a positive pattern of a resist for said vertical via conductor or said horizontal wiring at a desired position; and 4') filling the positive pattern of the resist with said vertical via conductor or said horizontal wiring before removal of the resist.
Claim 33
Dependent Claim
76 words
The method of fabricating the multilayer wiring board according to claim 1 wherein the step 8) includes the steps of: 1') forming a conductor for said horizontal wiring or said vertical via conductor on an entire surface of a surface-layer conductor to be patterned of said base substrate; 2') forming a negative pattern of a resist at a desired position; and 3') patterning said conductor to a desired shape by etching before removal of the resist.
Claim 34
Dependent Claim
144 words
The method of fabricating the multilayer wiring board according to claim 26 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate includes the steps of: i) forming an organic insulation film with a conductor foil that put in between said mold and said solvent-free fluid polymer precursor at the steps 2) to 6) of claim 1; ii) forming a positive pattern of a resist at a desired position of the conductor foil; iii) etching the conductor foil on an upper portion of said vertical via conductor with a mask of the pattern of the resist before removal of the resist; iv) etching the insulation film on the upper portion of said vertical via conductor with a mask of a pattern of the conductor foil; and v) electroless-plating on an entire surface of the matter.
Claim 35
Dependent Claim
42 words
The method of fabricating the multilayer wiring board according to claim 33, further comprising a step of using a conductor foil formed on a metal foil as the conductor foil and hardening said solvent-free fluid polymer precursor before peeling the metal foil.
Claim 36
Dependent Claim
53 words
The method of fabricating the multilayer wiring board according to claim 33, wherein a surface contacting the insulation film for the conductor foil or the conductor foil and the wiring layer comprising at least one of said horizontal wiring or said vertical via conductor is made rough before the insulation film is formed.
Claim 37
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 26 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate is a dry filming step.
Claim 38
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 26 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate is an electroless plating step.
Claim 39
Dependent Claim
60 words
The method of fabricating the multilayer wiring board according to claim 1 wherein said solvent-free fluid polymer precursor comprises one or more kinds of organic compound which can be fluid under at least one condition selected from the group consisting of a temperature not higher than a hardening initiation temperature and a pressure, or comprises a composition containing said compound.
Claim 40
Dependent Claim
93 words
The method of fabricating the multilayer wiring board according to claim 38 wherein said solvent-free fluid polymer precursor comprises an epoxy resin composition, a compound having two or more maleimide moiety in each of molecules thereof or a composition containing the compound, a compound having two or more cyanate moiety in each of molecules thereof or a composition containing the compound, a compound having two or more benzocyclobutene moiety in each of molecules thereof or a composition containing the compound, or a mixture of two or more kinds of these compounds and compositions.
Claim 41
Independent Claim
81 words
The method of fabricating the multilayer wiring board according to any of claims 38 and 39 wherein said solvent-free fluid polymer precursor contains 1 to 300 wt % of at least one selected from the group consisting of an organic polymer powder and an organic polymer fiber said organic polymer powder and said organic polymer fiber having at least one property selected from the group consisting of a low dielectric constant, a low thermal expansion coefficient, and a high heat resistance.
Claim 42
Dependent Claim
27 words
The method of fabricating the multilayer wiring board according to claim 40 wherein said organic polymer powder and said organic polymer fiber are made of a polyimide.
Claim 43
Dependent Claim
28 words
The method of fabricating the multilayer wiring board according to claim 39 wherein said epoxy resin composition is made of a multifunctional epoxy resin and a multifunctional hardener.
Claim 44
Dependent Claim
46 words
The method of fabricating the multilayer wiring board according to claim 42 wherein said multifunctional epoxy resin is made of a compound having three or more epoxy groups and one selected from the group consisting of an aromatic ring and a heterocycle in a molecule thereof.
Claim 45
Dependent Claim
91 words
The method of fabricating the multilayer wiring board according to claim 43 wherein said multifunctional epoxy resin is made of a compound having a constitutional formula of ##STR21## where Ar is one polyvalent molecular structure selected from among molecular structures represented by a constitutional formula of ##STR22## where R is H or CH3, m is an integer of 0 to 4, and n is an integer of 3 to 6, and where X is at least one molecular structure selected from among molecular structures represented by a constitutional formula of ##STR23##
Claim 46
Dependent Claim
118 words
The method of fabricating the multilayer wiring board according to claim 42 wherein a major constituent of said multifunctional hardener is made of at least one compound selected from the group consisting of a group of a compound of six or more number of carbon atoms having two or more carboxylic anhydride groups, an aromatic amino compound having two or more amino groups and two or more aromatic rings, a heterocyclic compound having an amino group, a resin having a phenolic hydroxyl group, a heterocyclic compound having a phenolic hydroxyl group, a compound having three or more phenolic hydroxyl groups in a molecule thereof, and a compound having three or more aliphatic hydroxyl groups in a molecule thereof.
Claim 47
Dependent Claim
49 words
The method of fabricating the multilayer wiring board according to claim 45 wherein the hardener of multifunctional carboxylic anhydride is made of an alicyclic carboxylic anhyride, an aromatic carboxylic anhydride, or a mixture of at least one of these with a compound having one or two carboxylic anhydride groups.
Claim 48
Dependent Claim
37 words
The method of fabricating the multilayer wiring board according to claim 45 wherein said resin having the phenolic hydroxyl group contains at least the group consisting of a phenol resin, a cresol resin, and a pyrogallol resin.
Claim 49
Dependent Claim
23 words
The method of fabricating the multilayer wiring board according to claim 45 wherein the hardener of multifunctional aliphatic alcohol is a primary alcohol.
Claim 50
Dependent Claim
144 words
The method of fabricating the multilayer wiring board according to claim 27 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate includes the steps of: i) forming an organic insulation film with a conductor foil that put in between said mold and said solvent-free fluid polymer precursor at the steps 2) to 6) of claim 1; ii) forming a positive pattern of a resist at a desired position of the conductor foil; iii) etching the conductor foil on an upper portion of said vertical via conductor with a mask of the pattern of the resist before removal of the resist; iv) etching the insulation film on the upper portion of said vertical via conductor with a mask of a pattern of the conductor foil; and v) electroless-plating on an entire surface of the matter.
Claim 51
Dependent Claim
144 words
The method of fabricating the multilayer wiring board according to claim 28 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate includes the steps of: i) forming an organic insulation film with a conductor foil that put in between said mold and said solvent-free fluid polymer precursor at the steps 2) to 6) of claim 1; ii) forming a positive pattern of a resist at a desired position of the conductor foil; iii) etching the conductor foil on an upper portion of said vertical via conductor with a mask of the pattern of the resist before removal of the resist; iv) etching the insulation film on the upper portion of said vertical via conductor with a mask of a pattern of the conductor foil; and v) electroless-plating on an entire surface of the matter.
Claim 52
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 27 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate is a dry filming step.
Claim 53
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 28 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate is a dry filming step.
Claim 54
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 27 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate is an electroless plating step.
Claim 55
Dependent Claim
36 words
The method of fabricating the multilayer wiring board according to claim 28 wherein the step of forming the conductive undercoat film connected with said vertical via conductor of the base substrate is an electroless plating step.
Claim 56
Dependent Claim
77 words
The method of fabricating the multilayer wiring board according to claim 39 wherein said solvent-free fluid polymer precursor contains 1 to 300 wt % of at least one selected from the group consisting of an organic polymer powder and an organic polymer fiber said organic polymer powder and said organic polymer fiber having at least one property selected from the group consisting of a low dielectric constant, a low thermal expansion coefficient, and a high heat resistance.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-01 | 1999-07-03 | 2000-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-01 | 2003-07-03 | 2004-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-01 | 2007-07-03 | 2008-01-02 | $7700.00 | Window Closed / Lapsed |