US5468655A
Expired / Lapsed
US
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Method for forming a temporary attachment between a semiconductor die and a substrate using a metal paste comprising spherical modules
Assignee: Motorola Solutions Inc
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Filing: 1994-10-31
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Granted: 1995-11-21
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Expires: 2014-10-31
Abstract
Abstract A nodular metal paste (42) is used to temporarily attach the bumps (34) on a semiconductor die (32) to a substrate (38). The spherical nodules (44) composing the metal paste are dispensed onto contact pads (40) on the substrate, and then heated until they partially melt. The partial liquid region permits bonding of the individual metal nodules to the contact pads and to adjacent nodules. Subsequently, a bumped die is placed over the nodules and heated to a minimum temperature required to partially remelt to form a local tack joint. Because the metallurgical contact area between the paste nodules and the bumps is minimized, electrical contact can be sustained with a small cross-sectional area of connected material to create an electrically sound but physically weak link between die and the substrate. Once connected to the substrate, the die may be tested and burned-in, and removed afterwards with little damage to the bumps.
Inventors
- 👤 Stuart E. Greer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 13:26
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/30; H05K3/32; H05K3/34; H05K3/341; H05K3/3431; H05K3/3436; G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07314; H10; H10P; H10P72/00; H10P72/70; H10P72/74; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R31/2851; G01R31/2886; H05K2201/00; H05K2201/10; H05K2201/10613; H05K2201/10954; H05K2201/10992; H05K2203/00; H05K2203/04; H05K2203/041; H05K2203/16; H05K2203/162; H05K3/346; H05K3/3465; H05K3/3485; Y; Y02; Y02P; Y02P70/00; Y02P70/50; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49004
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
129 words
A method for forming a temporary attachment between a semiconductor die and a substrate, comprising the steps of: placing a metal paste, composed of substantially spherical metallic nodules, upon a contact pad of the substrate; partially melting the metal paste at approximately a lowest melting temperature of the metal paste to obtain a first partial liquidus region to partially fuse the spherical metallic nodules together; aligning an interconnect protrusion on an active surface of the semiconductor die to the contact pad; and reheating the metal paste at approximately a lowest melting temperature of the metal paste to obtain a second partial liquidus region to join the interconnect protrusion to the contact pad with a tack joint to form an electrical contact between the semiconductor die and the contact pad.
Claim 2
Independent Claim
129 words
A method for forming a temporary attachment between a semiconductor die and a substrate, comprising the steps of: placing a metal paste, composed of substantially spherical metallic nodules, upon a contact pad of the substrate; partially melting the metal paste at approximately a lowest melting temperature of the metal paste to obtain a first partial liquidus region to partially fuse the spherical metallic nodules together; aligning an interconnect protrusion on an active surface of the semiconductor die to the contact pad; and reheating the metal paste at approximately a lowest melting temperature of the metal paste to obtain a second partial liquidus region to join the interconnect protrusion to the contact pad with a tack joint to form an electrical contact between the semiconductor die and the contact pad.
Claim 3
Dependent Claim
18 words
The method of claim 1, wherein the step of placing the metal paste is performed through screen printing.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein the step of placing a metal paste is performed by dispensing a solder paste composed of 20 wt % to 97 wt % lead.
Claim 5
Dependent Claim
25 words
The method of claim 1, wherein the step of partially melting is performed at a temperature substantially in a range of 183° to 250° C.
Claim 6
Dependent Claim
18 words
The method of claim 1, wherein the step of aligning the interconnect protrusion comprises aligning a solder bump.
Claim 7
Dependent Claim
25 words
The method of claim 1, further comprising the step of: testing the semiconductor die which is electrically connected to the contact pad on the substrate.
Claim 8
Dependent Claim
14 words
The method of claim 6, further comprising the step of: burning-in the semiconductor die.
Claim 9
Independent Claim
134 words
A method for forming a temporary attachment between a semiconductor die and a substrate, comprising the steps of: placing a solder paste composed of substantially spherical solder nodules upon a contact pad on the substrate; partially melting the solder paste at approximately a lowest melting temperature of the solder paste to get a first partial liquidus region between the spherical solder nodules to partially fuse the spherical solder nodules together; aligning an interconnect protrusion on an active surface of the semiconductor die to the contact pad; and reheating the solder paste at approximately a lowest melting temperature of the solder paste to get a second partial liquidus region to join the interconnect protrusion to the contact pad with a tack joint to form an electrical contact between the semiconductor die and the contact pad.
Claim 10
Independent Claim
134 words
A method for forming a temporary attachment between a semiconductor die and a substrate, comprising the steps of: placing a solder paste composed of substantially spherical solder nodules upon a contact pad on the substrate; partially melting the solder paste at approximately a lowest melting temperature of the solder paste to get a first partial liquidus region between the spherical solder nodules to partially fuse the spherical solder nodules together; aligning an interconnect protrusion on an active surface of the semiconductor die to the contact pad; and reheating the solder paste at approximately a lowest melting temperature of the solder paste to get a second partial liquidus region to join the interconnect protrusion to the contact pad with a tack joint to form an electrical contact between the semiconductor die and the contact pad.
Claim 11
Dependent Claim
18 words
The method of claim 8, wherein the step of placing the solder paste is performed through screen printing.
Claim 12
Dependent Claim
33 words
The method of claim 8, wherein the step of placing a solder paste is performed by dispensing a eutectic solder paste composed of substantially 63 wt % tin and 37 wt % lead.
Claim 13
Dependent Claim
17 words
The method of claim 8, wherein the step of partially melting is performed at substantially 183° C.
Claim 14
Dependent Claim
23 words
The method of claim 8, wherein the step of aligning the interconnect protrusion comprises aligning a solder bump containing 3 wt % tin.
Claim 15
Dependent Claim
25 words
The method of claim 8, further comprising the step of: testing the semiconductor die which is electrically connected to the contact pad on the substrate.
Claim 16
Dependent Claim
14 words
The method of claim 13, further comprising the step of: burning-in the semiconductor die.
Claim 17
Independent Claim
169 words
A method for testing a semiconductor die, comprising the steps of: providing a test substrate having a pattern of conductive traces terminating in a plurality of contact pads on a surface of the test substrate; placing a metal paste, composed of substantially spherical metallic nodules, upon a contact pad of the plurality of contact pads; partially melting the metal paste at approximately a lowest melting temperature of the metal paste to obtain a first partial liquidus region to partially fuse the spherical metallic nodules together; aligning an interconnect protrusion on an active surface of the semiconductor die to said contact pad having the metal paste thereon; reheating the metal paste at approximately a lowest melting temperature of the metal paste to obtain a second partial liquidus region to join the interconnect protrusion to the contact pad with a tack joint to form an electrical contact between the semiconductor die and the contact pad; and testing the semiconductor die through contacting the pattern of conductive traces on the test substrate.
Claim 18
Independent Claim
169 words
A method for testing a semiconductor die, comprising the steps of: providing a test substrate having a pattern of conductive traces terminating in a plurality of contact pads on a surface of the test substrate; placing a metal paste, composed of substantially spherical metallic nodules, upon a contact pad of the plurality of contact pads; partially melting the metal paste at approximately a lowest melting temperature of the metal paste to obtain a first partial liquidus region to partially fuse the spherical metallic nodules together; aligning an interconnect protrusion on an active surface of the semiconductor die to said contact pad having the metal paste thereon; reheating the metal paste at approximately a lowest melting temperature of the metal paste to obtain a second partial liquidus region to join the interconnect protrusion to the contact pad with a tack joint to form an electrical contact between the semiconductor die and the contact pad; and testing the semiconductor die through contacting the pattern of conductive traces on the test substrate.
Claim 19
Dependent Claim
18 words
The method of claim 15, wherein the step of placing the metal paste is performed through screen printing.
Claim 20
Dependent Claim
32 words
The method of claim 15, wherein the step of placing a metal paste is performed by dispensing a solder paste having a lead content of 20 wt % to 97 wt %.
Claim 21
Dependent Claim
25 words
The method of claim 17, wherein the step of partially melting is performed at a temperature substantially in a range of 183° to 250° C.
Claim 22
Dependent Claim
18 words
The method of claim 15, wherein the step of providing a test substrate comprises providing ceramic test substrate.
Claim 23
Dependent Claim
20 words
The method of claim 15, wherein the step of providing a test substrate comprises providing printed circuit board test substrate.
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| 3.5 Years (Year 4) | 1998-11-20 | 1999-05-22 | 1999-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-11-20 | 2003-05-22 | 2003-11-21 | $3760.00 | Window Closed / Lapsed |
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