US5464786A
Expired / Lapsed
US
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Method for forming a capacitor having recessed lateral reaction barrier layer edges
Assignee: Micron Technology Inc
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Filing: 1994-10-24
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Granted: 1995-11-07
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Expires: 2014-10-24
Abstract
Abstract A capacitor apparatus includes, a) a substrate having a node; b) an inner capacitor plate in ohmic electrical connection with the substrate node; c) an outer capacitor plate; d) a capacitor dielectric layer interposed between inner and outer capacitor plates; e) an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and f) oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate. Methods of forming such a capacitor are also disclosed.
Inventors
- 👤 Thomas A. Figura
- 👤 Paul J. Schuele
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:32
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10D; H10D1/00; H10D1/60; H10D1/68
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
221 words
A method of forming a capacitor comprising the following steps: providing a substrate having a node to which electrical connection to a capacitor is to be made; providing an electrically conductive reaction barrier layer over the substrate node; providing a male molding layer over the reaction barrier layer; etching the male molding layer into an external male shape having lateral confines corresponding to that of a finished lower capacitor plate shape; etching the reaction barrier layer to form opposing lateral recesses beneath the etched male molding layer, the recesses defining opposing recessed lateral reaction barrier layer edges; providing oxidation barrier blocks over the opposing recessed lateral reaction barrier layer edges; providing a female molding layer over the etched male molding layer and oxidation barrier blocks; etching back the female molding layer to outwardly expose the etched male molding layer; stripping the exposed etched male molding layer from the substrate to leave a female mold having lateral confines corresponding to that of a finished lower capacitor plate shape; providing electrically conductive material within the female mold; stripping the female molding layer from the substrate to leave a block of the electrically conductive material corresponding in lateral shape to that of a finished lower capacitor plate shape; and providing a capacitor dielectric layer and a cell capacitor layer over the electrically conductive block.
Claim 2
Independent Claim
221 words
A method of forming a capacitor comprising the following steps: providing a substrate having a node to which electrical connection to a capacitor is to be made; providing an electrically conductive reaction barrier layer over the substrate node; providing a male molding layer over the reaction barrier layer; etching the male molding layer into an external male shape having lateral confines corresponding to that of a finished lower capacitor plate shape; etching the reaction barrier layer to form opposing lateral recesses beneath the etched male molding layer, the recesses defining opposing recessed lateral reaction barrier layer edges; providing oxidation barrier blocks over the opposing recessed lateral reaction barrier layer edges; providing a female molding layer over the etched male molding layer and oxidation barrier blocks; etching back the female molding layer to outwardly expose the etched male molding layer; stripping the exposed etched male molding layer from the substrate to leave a female mold having lateral confines corresponding to that of a finished lower capacitor plate shape; providing electrically conductive material within the female mold; stripping the female molding layer from the substrate to leave a block of the electrically conductive material corresponding in lateral shape to that of a finished lower capacitor plate shape; and providing a capacitor dielectric layer and a cell capacitor layer over the electrically conductive block.
Claim 3
Dependent Claim
93 words
The method of forming a capacitor of claim 1 wherein, the step of etching the male molding layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; the female mold defined by the male molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; and the electrically conductive block defined by the female molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape.
Claim 4
Dependent Claim
25 words
The method of forming a capacitor of claim 1 wherein the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node.
Claim 5
Dependent Claim
16 words
The method of forming a capacitor of claim 1 wherein the oxidation barrier blocks are dielectric.
Claim 6
Dependent Claim
32 words
The method of forming a capacitor of claim 1 wherein the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node, and the oxidation barrier blocks are dielectric.
Claim 7
Dependent Claim
108 words
The method of forming a capacitor of claim 1 wherein, the step of etching the male molding layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; the female mold defined by the male molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; the electrically conductive block defined by the female molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; and the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node.
Claim 8
Dependent Claim
99 words
The method of forming a capacitor of claim 1 wherein, the step of etching the male molding layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; the female mold defined by the male molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; the electrically conductive block defined by the female molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; and the oxidation barrier blocks are dielectric.
Claim 9
Dependent Claim
114 words
The method of forming a capacitor of claim 1 wherein, the step of etching the male molding layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; the female mold defined by the male molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; the electrically conductive block defined by the female molding layer stripping step corresponds completely to the external edge confines of the finished lower capacitor plate shape; the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node; and the oxidation barrier blocks are dielectric.
Claim 10
Dependent Claim
18 words
The method of forming a capacitor of claim 1 wherein the etching back is conducted by chemical-mechanical polishing.
Claim 11
Dependent Claim
42 words
The method of forming a capacitor of claim 1 wherein the node comprises a silicon material, the electrically conductive material is platinum, the capacitor dielectric is a titanate, the male molding layer is polysilicon, and the female molding layer comprises silicon dioxide.
Claim 12
Independent Claim
132 words
A method of forming a capacitor comprising the following steps: providing a substrate having a node to which electrical connection to a capacitor is to be made; providing an electrically conductive reaction barrier layer over the substrate node; providing an electrically conductive lower capacitor plate layer over the reaction barrier layer; etching the lower capacitor plate layer into an external shape having lateral confines corresponding to that of a finished lower capacitor plate shape; etching the reaction barrier layer to form opposing lateral recesses beneath the etched lower capacitor plate layer, the recesses defining opposing recessed lateral reaction barrier layer edges; providing oxidation barrier blocks over the opposing recessed lateral reaction barrier layer edges; and providing a capacitor dielectric layer and a cell capacitor layer over the etched lower capacitor plate layer.
Claim 13
Independent Claim
132 words
A method of forming a capacitor comprising the following steps: providing a substrate having a node to which electrical connection to a capacitor is to be made; providing an electrically conductive reaction barrier layer over the substrate node; providing an electrically conductive lower capacitor plate layer over the reaction barrier layer; etching the lower capacitor plate layer into an external shape having lateral confines corresponding to that of a finished lower capacitor plate shape; etching the reaction barrier layer to form opposing lateral recesses beneath the etched lower capacitor plate layer, the recesses defining opposing recessed lateral reaction barrier layer edges; providing oxidation barrier blocks over the opposing recessed lateral reaction barrier layer edges; and providing a capacitor dielectric layer and a cell capacitor layer over the etched lower capacitor plate layer.
Claim 14
Dependent Claim
42 words
The method of forming a capacitor of claim 11 wherein, the step of etching the lower capacitor plate layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape.
Claim 15
Dependent Claim
25 words
The method of forming a capacitor of claim 11 wherein the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node.
Claim 16
Dependent Claim
16 words
The method of forming a capacitor of claim 11 wherein the oxidation barrier blocks are dielectric.
Claim 17
Dependent Claim
32 words
The method of forming a capacitor of claim 11 wherein the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node, and the oxidation barrier blocks are dielectric.
Claim 18
Dependent Claim
58 words
The method of forming a capacitor of claim 11 wherein, the step of etching the lower capacitor plate layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; and the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node.
Claim 19
Dependent Claim
49 words
The method of forming a capacitor of claim 11 wherein, the step of etching the lower capacitor plate layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; and the oxidation barrier blocks are dielectric.
Claim 20
Dependent Claim
64 words
The method of forming a capacitor of claim 11 wherein, the step of etching the lower capacitor plate layer comprises etching said layer into an external male shape corresponding completely to the external edge confines of the finished lower capacitor plate shape; the recessed lateral reaction barrier layer edges are positioned laterally outward away from the node; and the oxidation barrier blocks are dielectric.
Claim 21
Dependent Claim
29 words
The method of forming a capacitor of claim 11 wherein the node comprises a silicon material, the electrically conductive material is platinum, and the capacitor dielectric is a titanate.
References Cited (Backward Citations)
US5381302A
Cited
US5392189A
Cited
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