Micro-mechanical optical shutter

Claim 2

An array of micro-optical shutters, each for intermittently blocking the passage of radiation, comprising: a substrate having a plurality of vias through which said radiation may pass, each via associated with a shutter; each shutter comprising a rotor hub fabricated upon said substrate, a rotor fabricated above and spaced from said substrate for revolving around said rotor hub in a plane parallel to said substrate, said rotor having at least one opening that is aligned with at least one of said vias for a part of each revolution of said rotor, and a set of stator poles fabricated above said substrate around the perimeter of said rotor to which voltage may be applied for providing a rotor torque.

Claim 3

The array of claim 1, wherein each said rotor has a set of radial spokes.

Claim 4

The array of claim 1, wherein each said rotor is generally disk-shaped.

Claim 5

The array of claim 1, wherein each said rotor has a number of teeth around its perimeter.

Claim 6

The array of claim 1, wherein each said rotor is in the order of 100 microns in diameter.

Claim 7

The array of claim 1, wherein each said rotor has at least one filter for changing the wavelength of said light over said at least one opening.

Claim 8

The array of claim 1, wherein each said rotor has one or more dished portions of its underside.

Claim 9

The array of claim 1, wherein said vias are cylindrical in shape and of a size suitable for securing an optical fiber.

Claim 10

The array of claim 1, wherein said via are cone-shaped.

Claim 11

The array of claim 1, further comprising a control unit for controlling the timing of said voltage applied to said stator poles.

Claim 14

The method of claim 11, further comprising the steps of depositing a filter material over said at least one opening.

Claim 15

The method of claim 11, wherein said substrate is silicon and said step of etching vias is performed with a orientation directed etch, such that said vias are cone-shaped.

Claim 16

The method of claim 11, wherein said step of etching vias is performed such that said vias are cylindrical in shape and have a diameter suitable for inserting an optical fiber.

Claim 17

The method of claim 11, further comprising the step of etching a dished portion on the underside of each said rotor.

Claim 18

An optical correlation system for comparing multiple reference images to one or more acquired image, comprising: an array of micro-optical shutters fabricated on a substrate having a plurality of vias, each shutter comprising a rotor hub fabricated upon said substrate, a rotor fabricated above and spaced from said substrate for revolving around said rotor hub in a plane parallel to said substrate, said rotor having at least one opening that is aligned with one of said vias for a part of each revolution of said rotor, and a set of stator poles fabricated above said substrate around the perimeter of said rotor and substantially co-planar to said rotor, to which voltage may be applied for providing a rotor torque; an array of lenses, each lens for receiving light transmitted through a via when a corresponding shutter is open; a reference film having an array of reference images, each image associated with one of said shutters; a first transform lens for receiving a reference image from said reference film and for transforming said image into its Fourier transform image; a spatial light modulator having an array of reflective pixel elements, for displaying an image representing the complex conjugate of the Fourier transform of the acquired image and for reflecting said Fourier transform image of said reference image; a second transform lens for receiving the combination of the image displayed by said spatial light modulator and the image reflected by said spatial light modulator, and for Fourier transforming the combined images; and a sensor for receiving the image transmitted by said second transform lens.

Claim 19

An optical correlation system for comparing multiple reference images to one or more acquired image, comprising: an array of micro-optical shutters fabricated on a substrate having a plurality of vias, each shutter comprising a rotor hub fabricated upon said substrate, a rotor fabricated above and spaced from said substrate for revolving around said rotor hub in a plane parallel to said substrate, said rotor having at least one opening that is aligned with one of said vias for a part of each revolution of said rotor, and a set of stator poles fabricated above said substrate around the perimeter of said rotor and substantially co-planar to said rotor, to which voltage may be applied for providing a rotor torque; an array of lenses, each lens for receiving light transmitted through a via when a corresponding shutter is open; a reference film having an array of reference images, each image associated with one of said shutters; a first transform lens for receiving a reference image from said reference film and for transforming said image into its Fourier transform image; a spatial light modulator having an array of reflective pixel elements, for displaying an image representing the complex conjugate of the Fourier transform of the acquired image and for reflecting said Fourier transform image of said reference image; a second transform lens for receiving the combination of the image displayed by said spatial light modulator and the image reflected by said spatial light modulator, and for Fourier transforming the combined images; and a sensor for receiving the image transmitted by said second transform lens.

Claim 20

The optical correlation system of claim 16, wherein said vias are cylindrical in shape for inserting an optical fiber.

Claim 21

The optical correlation system of claim 16, wherein said vias are cone-shaped and further comprising an array of focussing lenses for focussing light from a source to each of said shutters.