US5455679A
Expired / Lapsed
US
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Position detecting system
Assignee: Canon Inc
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Filing: 1995-02-06
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Granted: 1995-10-03
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Expires: 2015-02-06
Abstract
Abstract A position detecting system includes a light source for producing a light beam for irradiating a reference mark formed on an object which is relatively displaceable relative to the light beam, a detector for detecting a light quantity distribution of the light from the reference mark, and a circuit for comparing a first light quantity distribution at a first position with a second light quantity distribution at a second position spaced from the first position by a predetermined distance, and for determining a reference position of the object on the basis of the comparison.
Inventors
- 👤 Sakae Houryu
- 👤 Kenji Saitoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:28
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
153 words
A position detecting system, comprising: a light source for producing a light beam for irradiating a reference mark formed on an object, which is relatively displaceable with respect to the light beam; a detector for detecting a light quantity distribution of the light from the reference mark; and circuit means comprising a first memory and a second memory, for storing, into said first memory, the light quantity distribution in relation to the relative position of the object and the light beam and for producing, from the data stored in said first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance, and for storing the produced data into said second memory, said circuit means determining the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in said first and second memories.
Claim 2
Dependent Claim
153 words
A position detecting system, comprising: a light source for producing a light beam for irradiating a reference mark formed on an object, which is relatively displaceable with respect to the light beam; a detector for detecting a light quantity distribution of the light from the reference mark; and circuit means comprising a first memory and a second memory, for storing, into said first memory, the light quantity distribution in relation to the relative position of the object and the light beam and for producing, from the data stored in said first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance, and for storing the produced data into said second memory, said circuit means determining the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in said first and second memories.
Claim 3
Dependent Claim
14 words
A system according to claim 1, wherein the reference mark has an optical power.
Claim 4
Dependent Claim
12 words
A system according to claim 1, wherein the object comprises a mask.
Claim 5
Dependent Claim
145 words
A position detecting method, comprising the steps of: projecting a light beam to a reference mark formed on an object, which is relatively displaceable with respect to the light beam; detecting a light quantity distribution of the light from the reference mark; providing circuit means comprising a first memory and a second memory; storing, into the first memory, the light quantity distribution in relation to the relative position of the object and the light beam; producing, from the data stored in the first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance; storing the produced data into the second memory; and determining, by the circuit means, the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in the first and second memories.
Claim 6
Dependent Claim
145 words
A position detecting method, comprising the steps of: projecting a light beam to a reference mark formed on an object, which is relatively displaceable with respect to the light beam; detecting a light quantity distribution of the light from the reference mark; providing circuit means comprising a first memory and a second memory; storing, into the first memory, the light quantity distribution in relation to the relative position of the object and the light beam; producing, from the data stored in the first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance; storing the produced data into the second memory; and determining, by the circuit means, the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in the first and second memories.
Claim 7
Dependent Claim
152 words
An exposure apparatus comprising: a light source for producing a light beam for irradiating a reference mark formed on an object, which is relatively displaceable with respect to the light beam; a detector for detecting a light quantity distribution of the light from the reference mark; and circuit means comprising a first memory and a second memory, for storing, into said first memory, the light quantity distribution in relation to the relative position of the object and the light beam and for producing, from the data stored in said first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance, and for storing the produced data into said second memory, said circuit means determining the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in said first and second memories.
Claim 8
Dependent Claim
152 words
An exposure apparatus comprising: a light source for producing a light beam for irradiating a reference mark formed on an object, which is relatively displaceable with respect to the light beam; a detector for detecting a light quantity distribution of the light from the reference mark; and circuit means comprising a first memory and a second memory, for storing, into said first memory, the light quantity distribution in relation to the relative position of the object and the light beam and for producing, from the data stored in said first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance, and for storing the produced data into said second memory, said circuit means determining the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in said first and second memories.
Claim 9
Independent Claim
147 words
A method of manufacturing semiconductor devices comprising the steps of: projecting a light beam to a reference mark formed on an object, which is relatively displaceable with respect to the light beam; detecting a light quantity distribution of the light from the reference mark; providing circuit means comprising a first memory and a second memory; storing, into the first memory, the light quantity distribution in relation to the relative position of the object and the light beam; producing, from the data stored in the first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance: storing the produced data into the second memory; and determining, by the circuit means, the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in the first and second memories.
Claim 10
Independent Claim
147 words
A method of manufacturing semiconductor devices comprising the steps of: projecting a light beam to a reference mark formed on an object, which is relatively displaceable with respect to the light beam; detecting a light quantity distribution of the light from the reference mark; providing circuit means comprising a first memory and a second memory; storing, into the first memory, the light quantity distribution in relation to the relative position of the object and the light beam; producing, from the data stored in the first memory, data corresponding to a light quantity distribution to be provided when the reference mark deviates by a predetermined distance: storing the produced data into the second memory; and determining, by the circuit means, the positional relationship between the object and the light beam on the basis of a comparison of the light quantity distributions stored in the first and second memories.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-02 | 1999-04-03 | 1999-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-02 | 2003-04-03 | 2003-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-02 | 2007-04-03 | 2007-10-03 | $7700.00 | Window Closed / Lapsed |