US5455612A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid jet recording head
Assignee: Canon Inc
•
Filing: 1994-09-01
•
Granted: 1995-10-03
•
Expires: 2014-09-01
Abstract
Abstract A liquid jet recording head comprises a substrate comprising a support, a resistive heater layer, electrodes electrically connected with the resistive heater layer, a portion of the resistive heater layer located between the electrodes being an electrothermal transducer, and an upper layer comprising a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material, wherein and the second protective layer and the third protective layer overlap each other in the vicinity of a portion where heat is generated by the electrothermal transducer and the overlapping width of the second protective layer and the third protective layer ranges from 10 mu m to 500 mu m. In another embodiment, the second protective layer extends along plural liquid flow paths for substantially less than the length thereof in a continuous strip that covers adjacent transducers.
Inventors
- 👤 Masami Ikeda
- 👤 Hiroto Matsuda
- 👤 Hirokazu Komuro
- 👤 Hiroto Takahashi
- 👤 Makoto Shibata
- 👤 Hisanori Tsuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 08:27
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14016; B41J2/14088; B41J2/14112; B41J2/14129; B41J2202/00; B41J2202/01; B41J2202/03
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
199 words
A liquid jet recording head comprising: a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms an electrothermal transducer; an upper layer comprising a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material; and a liquid flow path on the substrate corresponding to the electrothermal transducer; wherein the upper layer includes a region where the first protective layer overlies the electrothermal transducer and the second protective layer overlies said first protective layer, and another region, in the vicinity of the electrothermal transducer, where the first protective layer overlies portions of the electrodes corresponding to the liquid flow path and where the third protective layer overlies the first protective layer, wherein the second protective layer extends from the electrothermal transducer into the other region and the second protective layer and the third protective layer overlap in the other region with the overlapping width of the second protective layer and the third protective layer being in the range from 10 μm to 500 μm.
Claim 2
Dependent Claim
199 words
A liquid jet recording head comprising: a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms an electrothermal transducer; an upper layer comprising a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material; and a liquid flow path on the substrate corresponding to the electrothermal transducer; wherein the upper layer includes a region where the first protective layer overlies the electrothermal transducer and the second protective layer overlies said first protective layer, and another region, in the vicinity of the electrothermal transducer, where the first protective layer overlies portions of the electrodes corresponding to the liquid flow path and where the third protective layer overlies the first protective layer, wherein the second protective layer extends from the electrothermal transducer into the other region and the second protective layer and the third protective layer overlap in the other region with the overlapping width of the second protective layer and the third protective layer being in the range from 10 μm to 500 μm.
Claim 3
Dependent Claim
32 words
A liquid jet recording head according to claim 1 in which the first protective layer is composed of a material selected from inorganic oxides, transition metal oxides, metal oxides, and composites thereof.
Claim 4
Dependent Claim
22 words
A liquid jet recording head according to claim 1 in which the first protective layer is composed of a high resistance nitride.
Claim 5
Dependent Claim
36 words
A liquid jet recording head according to claim 1 in which the first protective layer is composed of a composite of two or more of inorganic oxides, transition metal oxides, metal oxides and high resistance nitrides.
Claim 6
Dependent Claim
22 words
A liquid jet recording head according to claim 1 in which the first protective layer is composed of a thin film material.
Claim 7
Dependent Claim
33 words
A liquid jet recording head according to claim in which the second protective layer contains an element selected from Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table and alloys thereof.
Claim 8
Dependent Claim
40 words
A liquid jet recording head according to claim 1 in which the second protective layer is composed of a material selected from carbides, silicides and nitrides of metals of Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table.
Claim 9
Dependent Claim
20 words
A liquid jet recording head according to claim 1 in which the third protective layer is composed of a resin.
Claim 10
Dependent Claim
19 words
A liquid jet recording head according to claim 1 in which the third protective layer is fabricated by micro-photolithography.
Claim 11
Dependent Claim
23 words
A liquid jet recording head according to claim 1 in which the third protective layer is fabricated by using a photosensitive polyimide resin.
Claim 12
Dependent Claim
19 words
A liquid jet recording head according to claim 1 in which there are a plurality of liquid flow paths.
Claim 13
Dependent Claim
52 words
A liquid jet recording head according to claim 1 further comprising a plurality of the heat generating portions and liquid flow paths wherein the second protective layer extends in a direction along the liquid flow paths for substantially less than the length thereof in a continuous strip covering adjacent heat generating portions.
Claim 14
Dependent Claim
198 words
A liquid jet recording head comprising: a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms an electrothermal transducer; and an upper layer comprising a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material; wherein the upper layer includes a region where the first protective layer overlies the electrothermal transducer and the second protective layer overlies the first protective layer, and another region, in the vicinity of the electrothermal transducer, where the first protective layer overlies portions of the electrodes corresponding to a liquid flow path .forming portion of the substrate that corresponds to the electrothermal transducer and where the third protective layer overlies the first protective layer, wherein the second protective layer extends from the electrothermal transducer into the other region and the second protective layer and the third protective layer overlap in the other region with the overlapping width of the second protective layer and the third protective layer being in the range from 10 μm to 500 μm.
Claim 15
Dependent Claim
198 words
A liquid jet recording head comprising: a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms an electrothermal transducer; and an upper layer comprising a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material; wherein the upper layer includes a region where the first protective layer overlies the electrothermal transducer and the second protective layer overlies the first protective layer, and another region, in the vicinity of the electrothermal transducer, where the first protective layer overlies portions of the electrodes corresponding to a liquid flow path .forming portion of the substrate that corresponds to the electrothermal transducer and where the third protective layer overlies the first protective layer, wherein the second protective layer extends from the electrothermal transducer into the other region and the second protective layer and the third protective layer overlap in the other region with the overlapping width of the second protective layer and the third protective layer being in the range from 10 μm to 500 μm.
Claim 16
Dependent Claim
32 words
A liquid jet recording head according to claim 13 in which the first protective layer is composed of a material selected from inorganic oxides, transition metal oxides, metal oxides, and composites thereof.
Claim 17
Dependent Claim
22 words
A liquid jet recording head according to claim 13 in which the first protective layer is composed of a high resistance nitride.
Claim 18
Dependent Claim
36 words
A liquid jet recording head according to claim 13 in which the first protective layer is composed of a composite of two or more of inorganic oxides, transition metal oxides, metal oxides and high resistance nitrides.
Claim 19
Dependent Claim
22 words
A liquid jet recording head according to claim 13 in which the first protective layer is composed of a thin film material.
Claim 20
Dependent Claim
34 words
A liquid jet recording head according to claim 13 in which the second protective layer contains an element selected from Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table and alloys thereof.
Claim 21
Dependent Claim
40 words
A liquid jet recording head according to claim 13 in which the second protective layer is composed of a material selected from carbides, silicides and nitrides of metals of Groups IIIa, IVa, Va, VIa, and VIII of the Periodic Table.
Claim 22
Dependent Claim
20 words
A liquid jet recording head according to claim 13 in which the third protective layer is composed of a resin.
Claim 23
Dependent Claim
19 words
A liquid jet recording head according to claim 13 in which the third protective layer is fabricated by micro-photolithography.
Claim 24
Dependent Claim
23 words
A liquid jet recording head according to claim 13 in which the third protective layer is fabricated by using a photosensitive polyimide resin.
Claim 25
Dependent Claim
20 words
A liquid jet recording head according to claim 13 in which a plurality of liquid flow path portions are provided.
Claim 26
Dependent Claim
54 words
A liquid jet recording head according to claim 13, further comprising a plurality of the heat generating portions and liquid flow path portions, wherein the second protective layer extends in a direction along the liquid flow path portions for substantially less than the length thereof in a continuous strip covering adjacent heat generating portions.
Claim 27
Dependent Claim
214 words
A liquid jet recording apparatus comprising: a liquid jet recording head comprising a substrate comprising; a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms an electrothermal transducer; an upper layer comprising: a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material; a liquid flow path on the substrate corresponding to the electrothermal transducer; wherein the upper layer includes a region where the first protective layer overlies the electrothermal transducer and the second protective layer overlies the first protective layer, and another region, in the vicinity of the electrothermal transducer, where the first protective layer overlies portions of the electrodes corresponding to the liquid flow path and where the third protective layer overlies the first protective layer, wherein the second protective layer extends from the electrothermal transducer into the other region and the second protective layer and the third protective layer overlap in the other region with the overlapping width of the second protective layer and the third protective layer being in the range from 10 μm to 500 μm; and means for supplying a signal to the electrothermal transducer.
Claim 28
Dependent Claim
214 words
A liquid jet recording apparatus comprising: a liquid jet recording head comprising a substrate comprising; a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms an electrothermal transducer; an upper layer comprising: a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material; a liquid flow path on the substrate corresponding to the electrothermal transducer; wherein the upper layer includes a region where the first protective layer overlies the electrothermal transducer and the second protective layer overlies the first protective layer, and another region, in the vicinity of the electrothermal transducer, where the first protective layer overlies portions of the electrodes corresponding to the liquid flow path and where the third protective layer overlies the first protective layer, wherein the second protective layer extends from the electrothermal transducer into the other region and the second protective layer and the third protective layer overlap in the other region with the overlapping width of the second protective layer and the third protective layer being in the range from 10 μm to 500 μm; and means for supplying a signal to the electrothermal transducer.
Claim 29
Dependent Claim
130 words
A liquid jet recording head comprising: a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms a plurality of adjacent electrothermal transducers; an upper layer comprising a first protective layer comprising an inorganic insulating material, and a second protective layer comprising an inorganic material; and a plurality of liquid flow paths on the substrate corresponding to the electrothermal transducers; wherein the first protective layer and the second protective layer are successively formed at least on the electrothermal transducers and the second protective layer extends in a direction along the liquid flow paths for substantially less than the length thereof in a continuous strip that covers the adjacent electrothermal transducers.
Claim 30
Dependent Claim
130 words
A liquid jet recording head comprising: a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms a plurality of adjacent electrothermal transducers; an upper layer comprising a first protective layer comprising an inorganic insulating material, and a second protective layer comprising an inorganic material; and a plurality of liquid flow paths on the substrate corresponding to the electrothermal transducers; wherein the first protective layer and the second protective layer are successively formed at least on the electrothermal transducers and the second protective layer extends in a direction along the liquid flow paths for substantially less than the length thereof in a continuous strip that covers the adjacent electrothermal transducers.
Claim 31
Dependent Claim
23 words
A liquid jet recording head according to claim 26 in which a third protective layer is further provided on the first protective layer.
Claim 32
Dependent Claim
20 words
A liquid jet recording head according to claim 27 in which the third protective layer is composed of a resin.
Claim 33
Dependent Claim
19 words
A liquid jet recording head according to claim 27 in which the third protective layer is fabricated by micro-photolithography.
Claim 34
Dependent Claim
23 words
A liquid jet recording head according to claim 27 in which the third protective layer is fabricated by using a photosensitive polyimide resin.
Claim 35
Dependent Claim
31 words
A liquid jet recording head according to claim 26 in which the first protective layer is composed of material selected from inorganic oxides, transition metal oxides, metal oxides, and composites thereof.
Claim 36
Dependent Claim
22 words
A liquid jet recording head according to claim 26 in which the first protective layer is composed of a high resistance nitride.
Claim 37
Dependent Claim
36 words
A liquid jet recording head according to claim 26 in which the first protective layer is composed of a composite of two or more of inorganic oxides, transition metal oxides, metal oxides and high resistance nitrides.
Claim 38
Dependent Claim
22 words
A liquid jet recording head according to claim 26 in which the first protective layer is composed of a thin film material.
Claim 39
Dependent Claim
34 words
A liquid jet recording head according to claim 26 in which the second protective layer contains an element selected from Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table and alloys thereof.
Claim 40
Dependent Claim
39 words
A liquid jet recording head according to claim in which the second protective layer is composed of a material selected from carbides, silicides and nitrides of metals of Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table.
Claim 41
Dependent Claim
129 words
A liquid jet recording head comprising: a substrate comprising; a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms a plurality of adjacent electrothermal transducers; and an upper layer comprising a first protective layer comprising an inorganic insulating material, and a second protective layer comprising an inorganic material; wherein the first protective layer and the second protective layer are successively formed at least on the electrothermal transducers and the second protective layer extends in a direction along a plurality of liquid flow path forming portions of the substrate that correspond to the electrothermal transducers for substantially less than the length thereof in a continuous strip that covers the adjacent electrothermal transducers.
Claim 42
Dependent Claim
129 words
A liquid jet recording head comprising: a substrate comprising; a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms a plurality of adjacent electrothermal transducers; and an upper layer comprising a first protective layer comprising an inorganic insulating material, and a second protective layer comprising an inorganic material; wherein the first protective layer and the second protective layer are successively formed at least on the electrothermal transducers and the second protective layer extends in a direction along a plurality of liquid flow path forming portions of the substrate that correspond to the electrothermal transducers for substantially less than the length thereof in a continuous strip that covers the adjacent electrothermal transducers.
Claim 43
Dependent Claim
23 words
A liquid jet recording head according to claim 37 in which a third protective layer is further provided on the first protective layer.
Claim 44
Dependent Claim
20 words
A liquid jet recording head according to claim 38 in which the third protective layer is composed of a resin.
Claim 45
Dependent Claim
19 words
A liquid jet recording head according to claim 38 in which the third protective layer is fabricated by micro-photolithography.
Claim 46
Dependent Claim
23 words
A liquid jet recording head according to claim 38 in which the third protective layer is fabricated by using a photosensitive polyimide resin.
Claim 47
Dependent Claim
31 words
A liquid jet recording head according to claim 37 in which the first protective layer is composed of material selected from inorganic oxides, transition metal oxides, metal oxides, and composites thereof.
Claim 48
Dependent Claim
22 words
A liquid jet recording head according to claim 37 in which the first protective layer is composed of a high resistance nitride.
Claim 49
Dependent Claim
36 words
A liquid jet recording head according to claim 37 in which the first protective layer is composed of a composite of two or more of inorganic oxides, transition metal oxides, metal oxides and high resistance nitrides.
Claim 50
Dependent Claim
22 words
A liquid let recording head according to claim 37 in which the first protective layer is composed of a thin film material.
Claim 51
Dependent Claim
34 words
A liquid jet recording head according to claim 37 in which the second protective layer contains an element selected from Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table and alloys thereof.
Claim 52
Dependent Claim
40 words
A liquid Jet recording head according to claim 37 in which the second protective layer is composed of a material selected from carbides, silicides and nitrides of metals of Groups IIIa, IVa, Va, VIa and VIII of the Periodic Table.
Claim 53
Dependent Claim
144 words
A liquid jet recording apparatus comprising: a liquid jet recording head comprising a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms a plurality of adjacent electrothermal transducers; an upper layer comprising a first protective layer comprising an inorganic insulating material, and a second protective layer comprising an inorganic material; a plurality of liquid flow paths on the substrate corresponding to the electrothermal transducers, wherein the first protective layer and the second protective layer are successively formed at least on the electrothermal transducers and the second protective layer extends in a direction along the liquid flow paths for substantially less than the length thereof in a continuous strip that covers the adjacent electrothermal transducers; and means for supplying signals to the electrothermal transducers.
Claim 54
Dependent Claim
144 words
A liquid jet recording apparatus comprising: a liquid jet recording head comprising a substrate comprising a support, a resistive heater layer, and electrodes electrically connected with the resistive heater layer, wherein a portion of the resistive heater layer located between the electrodes forms a plurality of adjacent electrothermal transducers; an upper layer comprising a first protective layer comprising an inorganic insulating material, and a second protective layer comprising an inorganic material; a plurality of liquid flow paths on the substrate corresponding to the electrothermal transducers, wherein the first protective layer and the second protective layer are successively formed at least on the electrothermal transducers and the second protective layer extends in a direction along the liquid flow paths for substantially less than the length thereof in a continuous strip that covers the adjacent electrothermal transducers; and means for supplying signals to the electrothermal transducers.
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