US5455205A
Expired / Lapsed
US
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Method of producing semiconductor device
Assignee: Panasonic Holdings Corp
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Filing: 1993-03-19
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Granted: 1995-10-03
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Expires: 2013-03-19
Abstract
Abstract There is disclosed a method of producing a semiconductor memory device. An interlayer insulation film is formed on a semiconductor substrate including a switching transistor. Then, a memory node pattern reaching an active region of the switching transistor is formed. A cell plate electrode pattern is formed through an insulation film formed on the memory node in such a manner that a value obtained by subtracting a thickness of a polycrystalline silicon film for a cell plate electrode from an overlapping dimension of a memory node pattern and the cell plate electrode pattern is not less than two times larger and not more than ten times larger than a thickness of deposition of a BPSG film. Then, the BPSG film is deposited on an entire surface, and then is caused to viscously flow by a heat treatment. Then, an aluminum wiring is formed on the BPSG film. With this construction, a step of the aluminum wiring in a boundary region between a memory cell array portion and a peripheral circuit portion, or in a word line-backing contact forming region, is decreased, thereby preventing the lowering of the yield of the aluminum wiring which is caused by the cutting of the aluminum wiring and the remaining of a residue of etching for a contact-forming electrode (for example, tungsten).
Inventors
- 👤 Hiroyuki Umimoto
- 👤 Shin Hashimoto
- 👤 Shinji Odanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:27
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/133; Y10S438/00; Y10S438/978
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
305 words
A method of producing a semiconductor device comprising the steps of: forming an interlayer insulation film on a semiconductor substrate including a semiconductor element formed thereon; forming a contact hole to said semiconductor substrate through said interlayer insulation film so as to expose an active region of said semiconductor element; depositing an impurity doped first polycrystalline silicon layer over said interlayer insulation film and in said contact hole so as to be in contact with said semiconductor element on said semiconductor substrate; patterning said first polycrystalline silicon layer by etching using a first photoresist layer to expose a portion of said interlayer insulation film, said first polycrystalline silicon layer extending by a first length on said interlayer insulation film; forming a dielectric film on a surface of said patterned first polycrystalline silicon layer; depositing an impurity doped second polycrystalline silicon layer on said dielectric film and over said first polycrystalline silicon layer on said interlayer insulation film so as to form a first step from a point where said second polycrystalline silicon layer is on said dielectric film to a point where said second polycrystalline silicon layer is on said interlayer insulation film; patterning said second polycrystalline silicon layer by etching using a second photoresist layer so that said second polycrystalline silicon layer extends by a second length on said interlayer insulation film outward from an outer periphery of said patterned first polycrystalline silicon layer, said second length being larger than a thickness of said second polycrystalline silicon layer so as to form a second step at the outer peripheral edge of said second polycrystalline silicon layer on said interlayer insulation film; depositing an impurity doped silicon oxide film on said second polycrystalline silicon layer and over said first and second steps; and causing said silicon oxide film to viscously flow by a heat treatment.
Claim 2
Independent Claim
305 words
A method of producing a semiconductor device comprising the steps of: forming an interlayer insulation film on a semiconductor substrate including a semiconductor element formed thereon; forming a contact hole to said semiconductor substrate through said interlayer insulation film so as to expose an active region of said semiconductor element; depositing an impurity doped first polycrystalline silicon layer over said interlayer insulation film and in said contact hole so as to be in contact with said semiconductor element on said semiconductor substrate; patterning said first polycrystalline silicon layer by etching using a first photoresist layer to expose a portion of said interlayer insulation film, said first polycrystalline silicon layer extending by a first length on said interlayer insulation film; forming a dielectric film on a surface of said patterned first polycrystalline silicon layer; depositing an impurity doped second polycrystalline silicon layer on said dielectric film and over said first polycrystalline silicon layer on said interlayer insulation film so as to form a first step from a point where said second polycrystalline silicon layer is on said dielectric film to a point where said second polycrystalline silicon layer is on said interlayer insulation film; patterning said second polycrystalline silicon layer by etching using a second photoresist layer so that said second polycrystalline silicon layer extends by a second length on said interlayer insulation film outward from an outer periphery of said patterned first polycrystalline silicon layer, said second length being larger than a thickness of said second polycrystalline silicon layer so as to form a second step at the outer peripheral edge of said second polycrystalline silicon layer on said interlayer insulation film; depositing an impurity doped silicon oxide film on said second polycrystalline silicon layer and over said first and second steps; and causing said silicon oxide film to viscously flow by a heat treatment.
Claim 3
Dependent Claim
18 words
A method according to claim 1, wherein said impurity doped silicon oxide film is made of borophosphosilicate glass.
Claim 4
Dependent Claim
37 words
A method according to claim 10, wherein viscous flowing of said silicon oxide film, occurring at said first step, and viscous flowing of said silicon oxide film, occurring at said second step, mutually interact with each other.
Claim 5
Dependent Claim
18 words
A method according to claim 3, wherein said impurity doped silicon oxide film is made of borophosphosilicate glass.
Claim 6
Independent Claim
340 words
A method of producing a semiconductor device comprising the steps of: forming an interlayer insulation film on a semiconductor substrate including a semiconductor element; forming a contact hole to said semiconductor substrate through said interlayer insulation film so as to expose an active region of said semiconductor element; depositing an impurity doped first polycrystalline silicon layer over said interlayer insulation film and in said contact hole so as to be in contact with said semiconductor element on said semiconductor substrate; patterning said first polycrystalline silicon layer by etching using a first photoresist layer, to expose a portion of said interlayer insulation film, said first polycrystalline silicon layer extending a first length on said interlayer insulation film; forming a dielectric film on a surface of said patterned first polycrystalline silicon layer; depositing an impurity doped second polycrystalline silicon layer on said dielectric film and over said first polycrystalline silicon layer on said interlayer insulation film so as to form a first step from a point where said second polycrystalline silicon layer is on said dielectric film to a position where said second polycrystalline silicon layer is on said interlayer insulation film; patterning said second polycrystalline silicon layer by etching, using a second photoresist layer, so that said second polycrystalline silicon layer extends by a second length on said interlayer insulation film outward from the outer periphery of said patterned first polycrystalline silicon layer so as to form a second step at the outer periphery of said second polycrystalline silicon layer on said interlayer insulation film; depositing an impurity doped silicon oxide film on said second polycrystalline silicon layer and over said first and second steps; and causing said silicon oxide film to viscously flow by a heat treatment; wherein a value obtained by subtracting the thickness of said second polycrystalline silicon layer from the second length of said second polycrystalline silicon layer on said interlayer insulation film is not less than two times larger and not more than ten times larger than the thickness of said impurity doped silicon oxide film.
Claim 7
Independent Claim
340 words
A method of producing a semiconductor device comprising the steps of: forming an interlayer insulation film on a semiconductor substrate including a semiconductor element; forming a contact hole to said semiconductor substrate through said interlayer insulation film so as to expose an active region of said semiconductor element; depositing an impurity doped first polycrystalline silicon layer over said interlayer insulation film and in said contact hole so as to be in contact with said semiconductor element on said semiconductor substrate; patterning said first polycrystalline silicon layer by etching using a first photoresist layer, to expose a portion of said interlayer insulation film, said first polycrystalline silicon layer extending a first length on said interlayer insulation film; forming a dielectric film on a surface of said patterned first polycrystalline silicon layer; depositing an impurity doped second polycrystalline silicon layer on said dielectric film and over said first polycrystalline silicon layer on said interlayer insulation film so as to form a first step from a point where said second polycrystalline silicon layer is on said dielectric film to a position where said second polycrystalline silicon layer is on said interlayer insulation film; patterning said second polycrystalline silicon layer by etching, using a second photoresist layer, so that said second polycrystalline silicon layer extends by a second length on said interlayer insulation film outward from the outer periphery of said patterned first polycrystalline silicon layer so as to form a second step at the outer periphery of said second polycrystalline silicon layer on said interlayer insulation film; depositing an impurity doped silicon oxide film on said second polycrystalline silicon layer and over said first and second steps; and causing said silicon oxide film to viscously flow by a heat treatment; wherein a value obtained by subtracting the thickness of said second polycrystalline silicon layer from the second length of said second polycrystalline silicon layer on said interlayer insulation film is not less than two times larger and not more than ten times larger than the thickness of said impurity doped silicon oxide film.
Claim 8
Dependent Claim
18 words
A method according to claim 5, wherein said impurity doped silicon oxide film is made of borophosphosilicate glass.
References Cited (Backward Citations)
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