Bare die test and burn-in device

Claim 2

Device for use in testing bare die, said device for making temporary electrical connections between bonding pads on said bare die and external test connectors comprising: a fanout substrate having contact pads, conductive bumps and fanout conductors formed thereon with said fanout conductors interconnecting said contact pads and said conductive bumps; a substrate chuck for holding said fanout substrate; a die chuck for receiving said bare die, said die chuck having a passage; means for aligning said conductive bumps with said bonding pads, with said external test connectors extending through said passage and contacting said contact pads; and means for bringing said conductive bumps and said bonding pads into contact.

Claim 3

Device of claim 1 wherein said means for aligning said conductive bumps with said contact pads comprises means for aligning said die chuck with said substrate chuck.

Claim 4

Device of claim 2 wherein said means for aligning said die chuck with said substrate chuck comprises alignment pins.

Claim 5

Device of claim 3 wherein said die chuck has resilient means for supporting said die.

Claim 6

Device of claim 3 wherein said means for bringing said conductive bumps and said bonding pads into contact comprises means for clamping said substrate chuck to said die chuck and resilient means for resiliently forcing said die toward said substrate.

Claim 7

Device of claim 1 wherein said fanout substrate comprises; a silicon substrate; a layer of compliant material formed on said silicon substrate with said contact pads, conductive bumps and fanout conductors formed thereon, with said conductive bumps being shaped, with said shaped conductive bumps and said compliant material improving said electrical connections between said conductive bumps and said bonding pads by permitting sufficient plastic deformation to compensate for a lack of planarity in said bonding pads and in said bumps.

Claim 8

Device of claim 6 wherein said conductive bumps are shaped to taper from a larger cross-section to a smaller cross-section in a direction away from said fanout conductors.

Claim 9

Device of claim 6 wherein said compliant material is polyimide.

Claim 10

Device of claim 8 wherein said fanout substrate has a metallic reference plane between said silicon substrate and said layer of compliant material, said metallic reference plane to provide controlled impedance of said fanout conductors and to reduce crosstalk between said fanout conductors.

Claim 11

Device of claim 9 further comprising a layer of anistoropically conducting material interposed between said conductive bumps and said bonding pads to improve electrical contact.

Claim 12

Device of claim 1 wherein said fanout substrate comprises: a silicon substrate; a layer of transparent compliant material formed on said silicon substrate with said contact pads, said conductive bumps and said fanout conductors formed thereon; a backside etched cavity formed in said silicon substrate and exposing said transparent compliant material.

Claim 13

Device of claim 10 wherein said means for aligning said conductive bumps with said bonding pads comprises: means for laterally and angularly positioning said die chuck relative to said substrate chuck to bring said conductive bumps into alignment with said bonding pads while observing said conductive bumps and said bonding pads through said transparent compliant material.

Claim 14

Device of claim 12 wherein said means for laterally and angularly positioning comprises: a lower frame having an opening for receiving said die chuck, said substrate chuck being laterally fixed with respect to said lower frame; adjustment means for laterally and angularly moving said die chuck within said lower frame.

Claim 15

Device of claim 13 wherein said adjustment means is a plurality of threaded means extending through said lower frame and abutting said die chuck, said plurality of threaded means movable within said frame.

Claim 16

Device of claim 14 wherein said means for bringing said conductive bumps and said bonding pads into contact comprises means for applying a distributed force to said exposed transparent material.

Claim 17

Device of claim 15 wherein said conductive bumps are shaped, with said shaped conductive bumps and said complaint material improving said electrical connections between said conductive bumps and said bonding pads by permitting sufficient plastic deformation to compensate for a lack of planarity in said bonding pads and in said bumps.

Claim 18

Device for use in testing bare die, said device for making temporary electrical connections between bonding pads on said bare die and external test connectors, comprising: a silicon substrate having a polymer layer formed thereon with contact pads, conductive bumps and fanout conductors formed on said polymer layer, with said fanout conductors interconnecting said contact pads and said conductive bumps; a backside etched cavity in said silicon substrate exposing said polymer layer, with said conductive bumps visible through said polymer layer; a substrate chuck for holding said fanout substrate; a lower frame, said lower frame holding said substrate chuck in a fixed lateral position spaced from said lower frame; a die chuck for receiving said bare die, said die chuck having an opening permitting passage of said external connectors for making connection to said contact pads; said lower frame having an opening for receiving said die chuck and an adjustment means for laterally and angularly moving said die chuck with respect to said substrate chuck to achieve alignment of said conductive bumps with said bonding pads; and means for applying a uniform distributed force to said exposed polymer layer to move said conductive bumps into contact with said bonding pads.

Claim 19

Device for use in testing bare die, said device for making temporary electrical connections between bonding pads on said bare die and external test connectors, comprising: a silicon substrate having a polymer layer formed thereon with contact pads, conductive bumps and fanout conductors formed on said polymer layer, with said fanout conductors interconnecting said contact pads and said conductive bumps; a backside etched cavity in said silicon substrate exposing said polymer layer, with said conductive bumps visible through said polymer layer; a substrate chuck for holding said fanout substrate; a lower frame, said lower frame holding said substrate chuck in a fixed lateral position spaced from said lower frame; a die chuck for receiving said bare die, said die chuck having an opening permitting passage of said external connectors for making connection to said contact pads; said lower frame having an opening for receiving said die chuck and an adjustment means for laterally and angularly moving said die chuck with respect to said substrate chuck to achieve alignment of said conductive bumps with said bonding pads; and means for applying a uniform distributed force to said exposed polymer layer to move said conductive bumps into contact with said bonding pads.

Claim 20

Device of claim 17 wherein said conductive bumps are shaped, with said shaped conductive bumps and said polymer layer improving said electrical connections between said conductive bumps and said bonding pads by permitting sufficient plastic deformation to compensate for a lack of planarity in said bonding pads and in said bumps.

Claim 21

Device of claim 18 wherein said conductive bumps are shaped to taper from a larger cross-section to a smaller cross-section in a direction away from said fanout conductor.

Claim 22

Device of claim 18 wherein said fanout substrate has a metallic reference plane between said silicon substrate and said layer of compliant material, said metallic reference plane to provide controlled impedance of said fanout conductors and to reduce crosstalk between said fanout conductors.

Claim 23

Device of claim 20 further comprising a layer of anistoropically conducting material interposed between said conductive bumps and said bonding pads to improve electrical contact.