US5452383A
Expired / Lapsed
US
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Optical switch and method for producing the optical switch
Assignee: Mitsubishi Electric Corp
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Filing: 1994-01-28
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Granted: 1995-09-19
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Expires: 2014-01-28
Abstract
Abstract An optical switch includes a semiconductor substrate having a surface, a ridge waveguide disposed on the surface of the semiconductor substrate and including an optical waveguide layer having an MQW structure, first and second cladding layers sandwiching the optical waveguide layer, and a switch disposed in a part of the ridge waveguide. A part of the MQW optical waveguide layer included in the switch is thicker than the other part of the optical waveguide layer, whereby the energy band gap of the optical waveguide layer of the switch is smaller than the energy band gap of the other part of the optical waveguide layer and larger than the energy of the signal light. Therefore, the absorption loss of the signal light traveling through the optical waveguide layer is reduced. Furthermore, since the variation in the refractive index of the switch when current is applied to the switch is increased, the ON/OFF ratio of the switch is increased.
Inventors
- 👤 Tohru Takiguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:32
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/50; B; B82; B82Y; B82Y20/00; G; G02; G02F; G02F1/00; G02F1/29; G02F1/31; G02F1/313; G02F1/3137; G02F1/3138; G02F1/01; G02F1/015; G02F1/017; G02F1/01708; H01S5/02; H01S5/026; H01S5/20; H01S5/22; H01S5/227; H01S5/2272; H01S5/30; H01S5/34; H01S5/343; H01S5/34306; H01S5/3434
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
143 words
An optical switch comprising: a semiconductor substrate having a surface; a ridge waveguide disposed on the surface of said semiconductor substrate and comprising at least an optical waveguide layer and first and second cladding layers sandwiching said optical waveguide layer, said optical waveguide layer having a multiquantum well structure; and a switch disposed in part of said ridge waveguide and having a refractive index reduced by current injection, thereby interrupting signal light having an energy and traveling in said ridge waveguide, wherein a first part of said optical waveguide layer included in said switch is thicker and has a smaller energy band gap than a second part of said optical waveguide layer not included in said switch, the energy band gap of said first part of said optical waveguide layer included in said switch being larger than the energy of the signal light.
Claim 2
Dependent Claim
143 words
An optical switch comprising: a semiconductor substrate having a surface; a ridge waveguide disposed on the surface of said semiconductor substrate and comprising at least an optical waveguide layer and first and second cladding layers sandwiching said optical waveguide layer, said optical waveguide layer having a multiquantum well structure; and a switch disposed in part of said ridge waveguide and having a refractive index reduced by current injection, thereby interrupting signal light having an energy and traveling in said ridge waveguide, wherein a first part of said optical waveguide layer included in said switch is thicker and has a smaller energy band gap than a second part of said optical waveguide layer not included in said switch, the energy band gap of said first part of said optical waveguide layer included in said switch being larger than the energy of the signal light.
Claim 3
Dependent Claim
44 words
The optical switch of claim 1 wherein said optical waveguide layer having a multiquantum well structure comprises alternating well layers of one of InGaAs and InGaAsP and barrier layers of one of InP and InGaAsP and said first and second cladding layers are InP.
Claim 4
Dependent Claim
243 words
An optical switch comprising: a semiconductor substrate having a surface; a ridge waveguide disposed on the surface of said semiconductor substrate and comprising at least an optical waveguide layer and first and second cladding layers sandwiching said optical waveguide layer, said optical waveguide layer having a multiquantum well structure; a switch disposed in part of said ridge waveguide and having a refractive index reduced by current injection, thereby interrupting signal light having an energy and traveling in said ridge waveguide, wherein a first part of said optical waveguide layer included in said switch is thicker and has a smaller energy band gap than a second part of said optical waveguide layer not included in said switch, the energy band gap of said first part of said optical waveguide layer included in said switch being larger than the energy of the signal light; and an optical amplifier for amplifying the signal light by current injection, said optical amplifier being disposed in a part of said ridge waveguide, wherein a third part of said optical waveguide layer included in said optical amplifier is thicker than said first part of said optical waveguide layer included in said switch and the energy band gap of said third part of said optical waveguide layer included in said optical amplifier is smaller than the energy band gap of said first part of said optical waveguide layer included in said switch and smaller than the energy of the signal light.
Claim 5
Dependent Claim
243 words
An optical switch comprising: a semiconductor substrate having a surface; a ridge waveguide disposed on the surface of said semiconductor substrate and comprising at least an optical waveguide layer and first and second cladding layers sandwiching said optical waveguide layer, said optical waveguide layer having a multiquantum well structure; a switch disposed in part of said ridge waveguide and having a refractive index reduced by current injection, thereby interrupting signal light having an energy and traveling in said ridge waveguide, wherein a first part of said optical waveguide layer included in said switch is thicker and has a smaller energy band gap than a second part of said optical waveguide layer not included in said switch, the energy band gap of said first part of said optical waveguide layer included in said switch being larger than the energy of the signal light; and an optical amplifier for amplifying the signal light by current injection, said optical amplifier being disposed in a part of said ridge waveguide, wherein a third part of said optical waveguide layer included in said optical amplifier is thicker than said first part of said optical waveguide layer included in said switch and the energy band gap of said third part of said optical waveguide layer included in said optical amplifier is smaller than the energy band gap of said first part of said optical waveguide layer included in said switch and smaller than the energy of the signal light.
Claim 6
Dependent Claim
44 words
The optical switch of claim 3 wherein said optical waveguide layer having a multiquantum well structure comprises alternating well layers of one of InGaAs and InGaAsP and barrier layers of one of InP and InGaAsP and said first and second cladding layers are InP.
Claim 7
Dependent Claim
173 words
An optical switch comprising: a semiconductor substrate having a surface; a ridge waveguide disposed on the surface of said semiconductor substrate and comprising at least an optical waveguide layer and first and second cladding layers sandwiching said optical waveguide layer, said optical waveguide layer having a multiquantum well structure; a switch disposed in part of said ridge waveguide and having a refractive index reduced by current injection, thereby interrupting signal light having an energy and traveling in said ridge waveguide; and a light absorption part for absorbing part of the signal light passing through said switch upon application of a voltage, said light absorption part being disposed in said ridge waveguide in the vicinity of said switch, wherein parts of said optical waveguide layer included in said switch and in said light absorption part are thicker than other parts of said optical waveguide layer and have an energy band gap smaller than the energy band gap of other parts of said optical waveguide layer and larger than the energy of the signal light.
Claim 8
Dependent Claim
173 words
An optical switch comprising: a semiconductor substrate having a surface; a ridge waveguide disposed on the surface of said semiconductor substrate and comprising at least an optical waveguide layer and first and second cladding layers sandwiching said optical waveguide layer, said optical waveguide layer having a multiquantum well structure; a switch disposed in part of said ridge waveguide and having a refractive index reduced by current injection, thereby interrupting signal light having an energy and traveling in said ridge waveguide; and a light absorption part for absorbing part of the signal light passing through said switch upon application of a voltage, said light absorption part being disposed in said ridge waveguide in the vicinity of said switch, wherein parts of said optical waveguide layer included in said switch and in said light absorption part are thicker than other parts of said optical waveguide layer and have an energy band gap smaller than the energy band gap of other parts of said optical waveguide layer and larger than the energy of the signal light.
Claim 9
Dependent Claim
39 words
The optical switch of claim 5 wherein said optical waveguide layer having a multiquantum well structure comprises alternating InGaAsP well layers and barrier layers of one of InP and InGaAsP and said first and second cladding layers are InP.
Claim 10
Independent Claim
199 words
A method for producing an optical switch including a waveguide through which signal light travels and a switch for interrupting passage of the signal light disposed in a part of said waveguide, said method comprising: forming spaced apart insulating films on a front surface of a semiconductor substrate so that a region where a switch is to be formed is sandwiched by said insulating films; growing a first cladding layer on said semiconductor substrate; growing an optical waveguide layer having a multiquantum well structure on said first cladding layer so that a part of said optical waveguide layer grown on said region where said switch is to be formed is thicker than said optical waveguide layer grown elsewhere, has a smaller energy band gap than said optical waveguide layer grown elsewhere, and has an energy band gap larger than the energy of the signal light; growing a second cladding layer on said optical waveguide layer; patterning said first cladding layer, said optical waveguide layer, and said second cladding layer to form a ridge waveguide structure; and forming electrodes on a rear surface of said semiconductor substrate and on a part of said ridge waveguide structure to complete said switch.
Claim 11
Independent Claim
199 words
A method for producing an optical switch including a waveguide through which signal light travels and a switch for interrupting passage of the signal light disposed in a part of said waveguide, said method comprising: forming spaced apart insulating films on a front surface of a semiconductor substrate so that a region where a switch is to be formed is sandwiched by said insulating films; growing a first cladding layer on said semiconductor substrate; growing an optical waveguide layer having a multiquantum well structure on said first cladding layer so that a part of said optical waveguide layer grown on said region where said switch is to be formed is thicker than said optical waveguide layer grown elsewhere, has a smaller energy band gap than said optical waveguide layer grown elsewhere, and has an energy band gap larger than the energy of the signal light; growing a second cladding layer on said optical waveguide layer; patterning said first cladding layer, said optical waveguide layer, and said second cladding layer to form a ridge waveguide structure; and forming electrodes on a rear surface of said semiconductor substrate and on a part of said ridge waveguide structure to complete said switch.
Claim 12
Independent Claim
336 words
A method for producing an optical switch including a waveguide through which signal light travels, a switch for interrupting passage of the signal light disposed in a part of said waveguide, and an optical amplifier for amplifying the signal light disposed in a part of said waveguide, said method comprising: forming first insulating films on a front surface of a semiconductor substrate with a first space so that a region where a switch is to be formed is sandwiched by said first insulating films, and forming second insulating films on the surface of said semiconductor substrate with a second space narrower than the first space so that a region where said optical amplifier is to be formed is sandwiched by said second insulating films; growing a first cladding layer on the surface of said semiconductor substrate; growing an optical waveguide layer having a multiquantum well structure on said first cladding layer so that a part of said optical waveguide layer grown on said region where said switch is to be formed is thicker, has a smaller energy band gap than other parts of said optical waveguide layer, and has an energy band gap larger than the energy of the signal light and a part of said optical waveguide layer grown on said region where said optical amplifier is to be formed is thicker than said optical waveguide layer grown on said region where said switch is to be formed, has an energy band gap smaller than the part of said optical waveguide layer grown on said region where said switch is to be formed, and has an energy band gap smaller than the energy of the signal light; growing a second cladding layer on said optical waveguide layer; patterning said first cladding layer, said optical waveguide layer, and said second cladding layer to form a ridge waveguide structure; and forming electrodes on a rear surface of said semiconductor substrate and on a part of said ridge waveguide structure to complete said switch and said optical amplifier.
Claim 13
Independent Claim
336 words
A method for producing an optical switch including a waveguide through which signal light travels, a switch for interrupting passage of the signal light disposed in a part of said waveguide, and an optical amplifier for amplifying the signal light disposed in a part of said waveguide, said method comprising: forming first insulating films on a front surface of a semiconductor substrate with a first space so that a region where a switch is to be formed is sandwiched by said first insulating films, and forming second insulating films on the surface of said semiconductor substrate with a second space narrower than the first space so that a region where said optical amplifier is to be formed is sandwiched by said second insulating films; growing a first cladding layer on the surface of said semiconductor substrate; growing an optical waveguide layer having a multiquantum well structure on said first cladding layer so that a part of said optical waveguide layer grown on said region where said switch is to be formed is thicker, has a smaller energy band gap than other parts of said optical waveguide layer, and has an energy band gap larger than the energy of the signal light and a part of said optical waveguide layer grown on said region where said optical amplifier is to be formed is thicker than said optical waveguide layer grown on said region where said switch is to be formed, has an energy band gap smaller than the part of said optical waveguide layer grown on said region where said switch is to be formed, and has an energy band gap smaller than the energy of the signal light; growing a second cladding layer on said optical waveguide layer; patterning said first cladding layer, said optical waveguide layer, and said second cladding layer to form a ridge waveguide structure; and forming electrodes on a rear surface of said semiconductor substrate and on a part of said ridge waveguide structure to complete said switch and said optical amplifier.
Claim 14
Independent Claim
249 words
A method for producing an optical switch including a waveguide through which signal light travels, a switch for interrupting passage of the signal light disposed in a part of said waveguide, and a light absorption part for absorbing the signal light disposed in a part of said waveguide in the vicinity of said switch, said method comprising: forming spaced apart insulating films on a front surface of a semiconductor substrate so that a region where a switch is to be formed and a region where said light absorption part is to be formed are respectively sandwiched by said insulating films; growing a first cladding layer on the surface of said semiconductor substrate; growing an optical waveguide layer having a multiquantum well structure on said first cladding layer so that the parts of said optical waveguide layer grown on said regions where said switch and said light absorption part are to be formed are thicker than other parts of said optical waveguide layer and have energy band gaps smaller than the energy band gaps of other parts of said optical waveguide layer and larger than the energy of the signal light; growing a second cladding layer on said optical waveguide layer; patterning said first cladding layer, said optical waveguide layer, and said second cladding layer to form a ridge waveguide structure; and forming electrodes on a rear surface of said semiconductor substrate and on a part of said ridge waveguide structure to complete said switch and said light absorption layer.
Claim 15
Independent Claim
249 words
A method for producing an optical switch including a waveguide through which signal light travels, a switch for interrupting passage of the signal light disposed in a part of said waveguide, and a light absorption part for absorbing the signal light disposed in a part of said waveguide in the vicinity of said switch, said method comprising: forming spaced apart insulating films on a front surface of a semiconductor substrate so that a region where a switch is to be formed and a region where said light absorption part is to be formed are respectively sandwiched by said insulating films; growing a first cladding layer on the surface of said semiconductor substrate; growing an optical waveguide layer having a multiquantum well structure on said first cladding layer so that the parts of said optical waveguide layer grown on said regions where said switch and said light absorption part are to be formed are thicker than other parts of said optical waveguide layer and have energy band gaps smaller than the energy band gaps of other parts of said optical waveguide layer and larger than the energy of the signal light; growing a second cladding layer on said optical waveguide layer; patterning said first cladding layer, said optical waveguide layer, and said second cladding layer to form a ridge waveguide structure; and forming electrodes on a rear surface of said semiconductor substrate and on a part of said ridge waveguide structure to complete said switch and said light absorption layer.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-09-18 | 1999-03-20 | 1999-09-19 | $2000.00 | Window Closed / Lapsed |
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