Method for fabricating capacitor of semiconductor memory device

Claim 1

A method for fabricating a capacitor of a semiconductor memory device, comprising the steps of: preparing a semiconductor substrate formed with a transistor having an impurity diffusion region; sequentially forming a planarized insulating oxide film, a barrier layer, and a first electrode layer over the semiconductor substrate; etching respective portions of the first electrode layer, the barrier layer and the insulating oxide film in a continued manner in accordance with an etch process using a contact hole mask, thereby forming a first contact hole; forming electrode material spacers respectively on side walls of the first contact hole such that the insulating oxide film is partially exposed through a region defined by the electrode material spacers; forming a second contact hole for exposing the impurity diffusion region in accordance with a selective etch process using the first electrode layer and the electrode material spacers as an etch barrier; forming a second electrode layer over the entire exposed surface of the resulting structure obtained after the formation of the second contact hole such that the second electrode layer is in electrical contact with the impurity diffusion region; selectively removing an upper portion of the second electrode layer disposed around a region where the first contact hole is defined, thereby forming a second-electrode layer pattern; forming oxide film spacers respectively on side walls of the second-electrode layer pattern; etching the second-electrode layer pattern, the second electrode layer and the first electrode layer under a condition that the oxide film spacers are used as an etch barrier until an upper surface of the barrier layer is exposed, thereby forming a first-electrode layer pattern and outer and inner electrode material walls disposed on the first-electrode layer pattern; removing the oxide film spacers, thereby exposing upper surfaces of the outer and inner electrode material walls; and sequentially forming a dielectric film and a plate electrode over exposed surfaces of the outer and inner electrode material walls, the first-electrode layer pattern and the second-electrode layer.

Claim 2

A method for fabricating a capacitor of a semiconductor memory device, comprising the steps of: preparing a semiconductor substrate formed with a transistor having an impurity diffusion region; sequentially forming a planarized insulating oxide film, a barrier layer, and a first electrode layer over the semiconductor substrate; etching respective portions of the first electrode layer, the barrier layer and the insulating oxide film in a continued manner in accordance with an etch process using a contact hole mask, thereby forming a first contact hole; forming electrode material spacers respectively on side walls of the first contact hole such that the insulating oxide film is partially exposed through a region defined by the electrode material spacers; forming a second contact hole for exposing the impurity diffusion region in accordance with a selective etch process using the first electrode layer and the electrode material spacers as an etch barrier; forming a second electrode layer over the entire exposed surface of the resulting structure obtained after the formation of the second contact hole such that the second electrode layer is in electrical contact with the impurity diffusion region; selectively removing an upper portion of the second electrode layer disposed around a region where the first contact hole is defined, thereby forming a second-electrode layer pattern; forming oxide film spacers respectively on side walls of the second-electrode layer pattern; etching the second-electrode layer pattern, the second electrode layer and the first electrode layer under a condition that the oxide film spacers are used as an etch barrier until an upper surface of the barrier layer is exposed, thereby forming a first-electrode layer pattern and outer and inner electrode material walls disposed on the first-electrode layer pattern; removing the oxide film spacers, thereby exposing upper surfaces of the outer and inner electrode material walls; and sequentially forming a dielectric film and a plate electrode over exposed surfaces of the outer and inner electrode material walls, the first-electrode layer pattern and the second-electrode layer.

Claim 5

A method for fabricating a capacitor of a semiconductor memory device, comprising the steps of: preparing a semiconductor substrate formed with a transistor having an impurity diffusion region; sequentially forming a planarized insulating oxide film and a first electrode layer over the semiconductor substrate; etching respective portions of the first electrode layer and the insulating oxide film in a continued manner in accordance with an etch process using a contact hole mask, thereby forming a first contact hole; forming electrode material spacers respectively on side walls of the first contact hole such that the insulating oxide film is partially exposed through a region defined by the electrode material spacers; forming a second contact hole for exposing the impurity diffusion region in accordance with a selective etch process using the first electrode layer and the electrode material spacers as an etch barrier; forming a second electrode layer over the entire exposed surface of the resulting structure obtained after the formation of the second contact hole such that the second electrode layer is in electrical contact with the impurity diffusion region; selectively removing an upper portion of the second electrode layer disposed around a region where the first contact hole is defined, thereby forming a second-electrode layer pattern; forming oxide film spacers respectively on side walls of the second-electrode layer pattern; etching the second-electrode layer pattern, the second electrode layer and the first electrode layer under a condition that the oxide film spacers are used as an etch barrier until an upper surface of the barrier layer is exposed, thereby forming a first-electrode layer pattern and outer and inner electrode material walls disposed on the first-electrode layer pattern; removing the oxide film spacers by use of a wet etch process, thereby exposing upper surfaces of the outer and inner electrode material walls; and sequentially forming a dielectric film and a plate electrode over exposed surfaces of the outer and inner electrode material walls, the first-electrode layer pattern and the second-electrode layer.

Claim 6

A method for fabricating a capacitor of a semiconductor memory device, comprising the steps of: preparing a semiconductor substrate formed with a transistor having an impurity diffusion region; sequentially forming a planarized insulating oxide film and a first electrode layer over the semiconductor substrate; etching respective portions of the first electrode layer and the insulating oxide film in a continued manner in accordance with an etch process using a contact hole mask, thereby forming a first contact hole; forming electrode material spacers respectively on side walls of the first contact hole such that the insulating oxide film is partially exposed through a region defined by the electrode material spacers; forming a second contact hole for exposing the impurity diffusion region in accordance with a selective etch process using the first electrode layer and the electrode material spacers as an etch barrier; forming a second electrode layer over the entire exposed surface of the resulting structure obtained after the formation of the second contact hole such that the second electrode layer is in electrical contact with the impurity diffusion region; selectively removing an upper portion of the second electrode layer disposed around a region where the first contact hole is defined, thereby forming a second-electrode layer pattern; forming oxide film spacers respectively on side walls of the second-electrode layer pattern; etching the second-electrode layer pattern, the second electrode layer and the first electrode layer under a condition that the oxide film spacers are used as an etch barrier until an upper surface of the barrier layer is exposed, thereby forming a first-electrode layer pattern and outer and inner electrode material walls disposed on the first-electrode layer pattern; removing the oxide film spacers by use of a wet etch process, thereby exposing upper surfaces of the outer and inner electrode material walls; and sequentially forming a dielectric film and a plate electrode over exposed surfaces of the outer and inner electrode material walls, the first-electrode layer pattern and the second-electrode layer.