Photoelectric position indicator with a light-directing phase grating

Claim 2

In a photoelectric position indicator comprising a scale phase grating having transverse grooves and lands, at least one scanning phase grating, having transverse grooves and lands extending parallel to those of said scale phase grating, at least one light source, a collimator, and a plurality of photodetectors, wherein said at least one scanning phase grating, said at least one light source, said collimator and said photodetectors are included in a scanning unit mounted to be movable relative to said scale phase grating along the latter in a measuring direction, and said at least one light source is energizable to emit light through said collimator onto said phase gratings, said phase gratings are adapted to diffract said light from said collimator along said measuring direction, whereby interference patterns having groups having predetermined orders of diffraction are generated by the light which has thus been diffracted several times during a movement of said scanning unit along said measuring direction, wherein each of said photodetectors is arranged to receive one of said groups having a predetermined order of diffraction, and said photodetectors are operable to generate phase-displaced periodical actual-value signals in dependence on the orders of diffraction of said groups, the improvement residing in that said scanning unit comprises light-directing optical means arranged to receive light from said light source to fan said light transverse to the measuring direction so as to form component light beams, said light-directing optical means comprising a phase grating having lands and grooves which are substantially at right angles to those of said scale phase grating, said photodetectors comprise sets of photodetectors, and the photodetectors of each of said sets are arranged to receive said groups having respective predetermined orders of diffraction of said interference patterns generated by one of said component beams.

Claim 3

The improvement set forth in claim 1, wherein said phase grating of said light-directing means has a land width to groove width ratio of 1:1, and said grooves of said phase grating of said light-directing means predominantly diffracts light in directions of diffraction of the +1st and -1st orders.

Claim 4

The improvement set forth in claim 1, wherein said phase grating of said light-directing optical means has a principal plane and is mounted to be adjustable by a rotation about an axis which is normal to said principal plane.

Claim 5

The improvement set forth in claim 1, wherein said at least one scanning phase grating comprises a phase grating which is combined with said phase grating of said light-directing optical means to form a crossed grating.

Claim 6

The improvement set forth in claim 4, wherein said crossed grating comprises two sets of lands and grooves crossing each other at an angle which differs from 90°.

Claim 7

The improvement set forth in claim 5, wherein said sets of lands and grooves cross each other at an angle of 45°.

Claim 8

In a photoelectric position indicator comprising a scale phase grating having transverse grooves and lands, at least one scanning phase grating, having transverse grooves and lands extending parallel to those of said scale phase grating, at least one light source, a collimator, and a plurality of photodetectors, wherein said at least one scanning phase grating, said at least one light source, said collimator and said photodetectors are included in a scanning unit mounted to be movable relative to said scale phase grating along the latter in a measuring direction, and said at least one light source is energizable to emit light through said collimator onto said phase gratings, said phase gratings are adapted to diffract said light from said collimator along said measuring direction, whereby interference patterns having groups having predetermined orders of diffraction are generated by the light which has thus been diffracted several times during a movement of said scanning unit along said measuring direction, wherein each of said photodetectors is arranged to receive one of said groups having a predetermined order of diffraction, and said photodetectors are operable to generate phase-displaced periodical actual-value signals in dependence on the orders of diffraction of said groups, the improvement residing in that said scanning unit comprises light-directing optical means arranged to receive light from said light source to fan said light transverse to the measuring direction so as to form component light beams, said light-directing optical means being arranged to form said component light beams so that they diverge along said scale phase grating only to such a small extent that said component beams are incident on said phase scale grating on substantially overlapping areas, said photodetectors comprise sets of photodetectors, and the photodetectors of each of said sets are arranged to receive said groups having respective predetermined orders of diffraction of said interference patterns generated by one of said component beams.

Claim 9

In a photoelectric position indicator comprising a scale phase grating having transverse grooves and lands, at least one scanning phase grating, having transverse grooves and lands extending parallel to those of said scale phase grating, at least one light source, a collimator, and a plurality of photodetectors, wherein said at least one scanning phase grating, said at least one light source, said collimator and said photodetectors are included in a scanning unit mounted to be movable relative to said scale phase grating along the latter in a measuring direction, and said at least one light source is energizable to emit light through said collimator onto said phase gratings, said phase gratings are adapted to diffract said light from said collimator along said measuring direction, whereby interference patterns having groups having predetermined orders of diffraction are generated by the light which has thus been diffracted several times during a movement of said scanning unit along said measuring direction, wherein each of said photodetectors is arranged to receive one of said groups having a predetermined order of diffraction, and said photodetectors are operable to generate phase-displaced periodical actual-value signals in dependence on the orders of diffraction of said groups, the improvement residing in that said scanning unit comprises light-directing optical means arranged to receive light from said light source to fan said light transverse to the measuring direction so as to form component light beams, said light-directing optical means being arranged to form said component light beams so that they diverge along said scale phase grating only to such a small extent that said component beams are incident on said phase scale grating on substantially overlapping areas, said photodetectors comprise sets of photodetectors, and the photodetectors of each of said sets are arranged to receive said groups having respective predetermined orders of diffraction of said interference patterns generated by one of said component beams.