Abstract A method for forming an interconnect film (of aluminum or aluminum alloy) by high-temperature sputtering such that the resulting film has a flat surface. The flat surface is desirable for the multilayer interconnect structure, relieves the resist film from halation at the time of exposure, and makes the interconnect immune to electromigration. The interconnect for semiconductor devices is fabricated from an underlying film, with crystals therein orienting in the direction perpendicular to the substrate surface, and an interconnect film formed on the underlying film, with crystals therein orienting in alignment with the orientation of crystals in the underlying film and in the direction perpendicular to the substrate surface. The underlying film may be a titanium film with its (002), (001), or (011) ) crystal plane orienting in the direction perpendicular to the substrate surface. The interconnect film may be an aluminum film or aluminum alloy film with its (111) crystal plane orienting in alignment with the orientation of crystals in the titanium film and in the direction perpendicular to the substrate surface.
A method for fabricating an aluminum interconnect which comprises forming a film of aluminum alloy by high-temperature sputtering on titanium oxynitride as barrier metal in such a manner that the (111) crystal plane of aluminum is oriented under the influence of the orientation of the (111) crystal plane of the barrier metal.
Claim 2
Independent Claim
52 words
A method for fabricating an aluminum interconnect which comprises forming a film of aluminum alloy by high-temperature sputtering on titanium oxynitride as barrier metal in such a manner that the (111) crystal plane of aluminum is oriented under the influence of the orientation of the (111) crystal plane of the barrier metal.
Claim 3
Dependent Claim
37 words
A method for fabricating an aluminum interconnect as defined in claim 1, wherein the orientation of the (111) crystal plane of titanium oxynitride in the barrier metal is accomplished by subjecting the barrier metal to furnace annealing.
Claim 4
Dependent Claim
36 words
A method for fabricating an aluminum interconnect as defined in claim 1, wherein the orientation of the (111) crystal plane of titanium oxynitride in the barrier metal is accomplished by subjecting the barrier metal to RTA.
Claim 5
Dependent Claim
25 words
A method for fabricating an aluminum interconnect as defined in claim 1, wherein the barrier metal and aluminum interconnect are formed continuously in a vacuum.