US5448408A
Expired / Lapsed
US
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Projection lens system
Assignee: Nikon Corp
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Filing: 1993-11-08
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Granted: 1995-09-05
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Expires: 2013-11-08
Abstract
Abstract This invention relates to a projection lens system used for transferring circuit or other patterns from masks, etc. on which the circuit patterns are drawn onto semiconductor wafers by projection photolithography, and provides a projection lens system which makes high resolving power of the order of a few micrometers and wide exposure coverages compatible with each other. This projection lens system includes at least two sets of lens groups, each built up of lenses having concave surfaces located opposite to each other, and includes at least one lens surface of positive refractive power between said two sets of lens groups, said two sets of lens groups all satisfying the following conditions: 1/L<|φ.sub.1 <20/L (1) 1/L<|φ.sub.2 <20/L (2) wherein φ 1 and φ 2 stand for the respective negative refractive powers of said oppositely located concave surfaces, and L is the distance between object and image.
Inventors
- 👤 Takayoshi Togino
- 👤 Yoshiko Tezuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G02; G02B; G02B13/00; G02B13/24; G02B9/00; G02B9/64
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
80 words
A projection lens system comprising: first and second lens groups, each of said first and second lens groups including lens components having concave surfaces located opposite to each other; at least one lens component having a surface with a positive refractive power disposed between said first and second lens groups; and a third lens group disposed on an object side of said first and second lens groups and having at least two lens components each with a positive refractive power.
Claim 2
Dependent Claim
80 words
A projection lens system comprising: first and second lens groups, each of said first and second lens groups including lens components having concave surfaces located opposite to each other; at least one lens component having a surface with a positive refractive power disposed between said first and second lens groups; and a third lens group disposed on an object side of said first and second lens groups and having at least two lens components each with a positive refractive power.
Claim 3
Dependent Claim
69 words
A projection lens system as claimed in claim 1, wherein a distance between an object and an image has a specific value, and said first and second lens groups satisfy the following conditions (1) and (2) 1/L<|φ.sub.1 |<20/L (1) 1/L<|φ.sub.2 |<20/L (2) where φ 1 and φ 2 represent respective negative refractive powers of said facing concave surfaces, and L is said distance between said object and said image.
Claim 4
Dependent Claim
56 words
A projection lens system as claimed in claim 2, wherein a lens component having a concave surface on an image side is disposed on said image side of said first and second lens groups, said concave surface satisfying the following condition (5): 1/L<|φ.sub.3 |<20/L (5) where φ 3 is a refractive power of said concave surface.
Claim 5
Dependent Claim
38 words
A projection lens system as claimed in claim 3, further comprising a sixth lens group including at least one lens component having a negative refractive power disposed on said object side of said first and second lens groups.
Claim 6
Dependent Claim
30 words
A projection lens system as claimed in claim 4, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 7
Dependent Claim
20 words
A projection lens system as claimed in claim 5, wherein all lens elements are formed of a same vitreous material.
Claim 8
Dependent Claim
20 words
A projection lens system as claimed in claim 4, wherein all lens elements are formed of a same vitreous material.
Claim 9
Dependent Claim
30 words
A projection lens system as claimed in claim 3, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 10
Dependent Claim
20 words
A projection lens system as claimed in claim 8, wherein all lens elements are formed of a same vitreous material.
Claim 11
Dependent Claim
20 words
A projection lens system as claimed in claim 3, wherein all lens elements are formed of a same vitreous material.
Claim 12
Dependent Claim
38 words
A projection lens system as claimed in claim 2, further comprising a sixth lens group including at least one lens component having a negative refractive power disposed on said object side of said first and second lens groups.
Claim 13
Dependent Claim
30 words
A projection lens system as claimed in claim 11, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 14
Dependent Claim
20 words
A projection lens system as claimed in claim 12, wherein all lens elements are formed of a same vitreous material.
Claim 15
Dependent Claim
20 words
A projection lens system as claimed in claim 11, wherein all lens elements are formed of a same vitreous material.
Claim 16
Dependent Claim
30 words
A projection lens system as claimed in claim 2, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 17
Dependent Claim
20 words
A projection lens system as claimed in claim 15, wherein all lens elements are formed of a same vitreous material.
Claim 18
Dependent Claim
20 words
A projection lens system as claimed in claim 2, wherein all lens elements are formed of a same vitreous material.
Claim 19
Dependent Claim
63 words
A projection lens system as claimed in claim 2, further comprising: a fourth lens group having a positive refractive power and including at least two lens components having a positive refractive power disposed between said first and second lens groups; said fourth lens group satisfying the following condition (3): f<L/4 (3) where f is a composite focal length of said fourth lens group.
Claim 20
Dependent Claim
20 words
A projection lens system as claimed in claim 18, wherein all lens elements are formed of a same vitreous material.
Claim 21
Dependent Claim
38 words
A projection lens system as claimed in claim 18, further comprising a fifth lens group including at least four lens components having a positive refractive power disposed on an image side of said first and second lens units.
Claim 22
Dependent Claim
38 words
A projection lens system as claimed in claim 20, further comprising a sixth lens group including at least one lens component having a negative refractive power disposed on said object side of said first and second lens groups.
Claim 23
Dependent Claim
30 words
A projection lens system as claimed in claim 21, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 24
Dependent Claim
20 words
A projection lens system as claimed in claim 22, wherein all lens elements are formed of a same vitreous material.
Claim 25
Dependent Claim
20 words
A projection lens system as claimed in claim 21, wherein all lens elements are formed of a same vitreous material.
Claim 26
Dependent Claim
30 words
A projection lens system as claimed in claim 20, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 27
Dependent Claim
20 words
A projection lens system as claimed in claim 25, wherein all lens elements are formed of a same vitreous material.
Claim 28
Dependent Claim
20 words
A projection lens system as claimed in claim 20, wherein all lens elements are formed of a same vitreous material.
Claim 29
Dependent Claim
57 words
A projection lens system as claimed in claim 20, wherein a lens component having a concave surface on an image side is disposed on said image side of said first and second lens groups, and said concave surface satisfies the following condition (4): 1/L<|φ.sub.3 |<20/L (4) where φ 3 is a refractive power of said concave surface.
Claim 30
Dependent Claim
38 words
A projection lens system as claimed in claim 28, wherein a sixth lens group including at least one lens component having a negative refractive power is disposed on said object side of said first and second lens groups.
Claim 31
Dependent Claim
20 words
A projection lens system as claimed in claim 29, wherein all lens elements are formed of a same vitreous material.
Claim 32
Dependent Claim
30 words
A projection lens system as claimed in claim 29, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 33
Dependent Claim
20 words
A projection lens system as claimed in claim 31, wherein all lens elements are formed of a same vitreous material.
Claim 34
Dependent Claim
20 words
A projection lens system as claimed in claim 28, wherein all lens elements are formed of a same vitreous material.
Claim 35
Dependent Claim
30 words
A projection lens system as claimed in claim 28, further comprising a seventh lens group, said seventh lens group including lens components having concave surfaces located opposite to each other.
Claim 36
Dependent Claim
20 words
A projection lens system as claimed in claim 34, wherein all lens elements are formed of a same vitreous material.
Claim 37
Dependent Claim
59 words
A projection lens system comprising: first and second lens groups, each of said first and second lens groups including lens components having concave surfaces located opposite to each other; and a third lens group disposed on an object side of said first and second lens groups and having at least two lens components each with a positive refractive power.
Claim 38
Dependent Claim
59 words
A projection lens system comprising: first and second lens groups, each of said first and second lens groups including lens components having concave surfaces located opposite to each other; and a third lens group disposed on an object side of said first and second lens groups and having at least two lens components each with a positive refractive power.
References Cited (Backward Citations)
JPS60195509A
Cited
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