US5445973A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing solar cells
Assignee: Institutet fur Mikroelectronik IM
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Filing: 1992-04-22
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Granted: 1995-08-29
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Expires: 2012-04-22
Abstract
Abstract A method for manufacturing solar cells, more specifically thin-film solar cells, particularly thin-film solar cells on which CuInSe 2 is deposited. A substrate is provided on which a multi-layer structure is formed by depositing thereon a layer defined by a compound including several basic substances, such as copper-indium-diselenide (CuInSe 2 ), or a closely-related compound where copper (Cu) and indium (In) can be replaced totally or partially with Silver (Ag) and gallium (Ga), respectively, and where selenium (Se) can be replaced totally or partially with sulphur (S) and tellurium (Te), and where the concentration of the basic substances in the layer varies. The substrate is placed on the inside of a rotatable, tubular carrier device, after which the substrate is heated, and substance sources are provided for depositing the basic substances on the substrate. One or more of the basic substances is deposited on the substrate by passing respective basic substance sources axially into the tubular carrier device while simultaneously rotating the tubular carrier device.
Inventors
- 👤 Jonas Hedstrom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 18:08
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/16; H10F10/167; H10F77/00; H10F77/10; H10F77/12; H10F77/126; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/541; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
234 words
A method for manufacturing thin film solar cells including a substrate plate on which a multi-layer film of several substances is deposited by vacuum deposition, said method comprising: a. providing a generally tubular, rotatable substrate carrier having a longitudinal axis and an inner peripheral surface for supporting substrate materials to be substantially uniformly coated with a thin film of the several substances; b. positioning a plural of plates formed from the substrate material on the inner peripheral surface of the tubular substrate carrier; c. providing a plurality of substance sources containing substances to be deposited on the substrate plates, wherein the substance sources are spaced from each other along a line that extends in the direction of the substrate carrier longitudinal axis, to provide a desired composition gradient of the respective substances in the film thickness direction, the composition gradient being substantially uniform over the coated surface of the substrate; d. heating the substrate materials and the substance sources; e. moving the tubular substrate carrier and the substance sources relative to each other in a single movement in a single, axial direction during a deposition operation to being the substance sources within the inner peripheral surface of the tubular substrate carrier; and f. rotating the tubular substrate carrier and the substance sources relative to each other to deposit substance source material on an inwardly facing surface of the substrate in a substantially uniform layer.
Claim 2
Independent Claim
234 words
A method for manufacturing thin film solar cells including a substrate plate on which a multi-layer film of several substances is deposited by vacuum deposition, said method comprising: a. providing a generally tubular, rotatable substrate carrier having a longitudinal axis and an inner peripheral surface for supporting substrate materials to be substantially uniformly coated with a thin film of the several substances; b. positioning a plural of plates formed from the substrate material on the inner peripheral surface of the tubular substrate carrier; c. providing a plurality of substance sources containing substances to be deposited on the substrate plates, wherein the substance sources are spaced from each other along a line that extends in the direction of the substrate carrier longitudinal axis, to provide a desired composition gradient of the respective substances in the film thickness direction, the composition gradient being substantially uniform over the coated surface of the substrate; d. heating the substrate materials and the substance sources; e. moving the tubular substrate carrier and the substance sources relative to each other in a single movement in a single, axial direction during a deposition operation to being the substance sources within the inner peripheral surface of the tubular substrate carrier; and f. rotating the tubular substrate carrier and the substance sources relative to each other to deposit substance source material on an inwardly facing surface of the substrate in a substantially uniform layer.
Claim 3
Dependent Claim
75 words
A method according to claim 1, wherein the substance source include a copper source, an indium source, and a selenium source, and wherein a layer of copper-indium-diselenide (CuInSe2) is deposited on the substrate, and in which the concentration of copper and of indium in said layer are different in a layer thickness direction including the step of depositing the CuInSe2-layer by passing the copper source and the indium source axially through the tubular substrate carrier.
Claim 4
Dependent Claim
24 words
A method according to claim 2, wherein the copper source is introduced into the tubular substrate carrier first and then the indium source thereafter.
Claim 5
Dependent Claim
29 words
A method according to claim 1, wherein substantially the entire inner peripheral surface of the tubular substrate carrier is covered with substrate material to form a polygon in cross-section.
Claim 6
Dependent Claim
29 words
A method according to claim 2, wherein the copper source and the indium source are moved linearly relative to the tubular substrate carrier only once and in one direction.
Claim 7
Dependent Claim
21 words
A method according to claim 1, wherein the tubular substrate carrier is rotated at a speed greater than about 1 r.p.m.
Claim 8
Dependent Claim
52 words
A method according to claim 1, wherein the tubular substrate carrier has an axial length corresponding to a length of a solar cell panel, and a diameter such that a plurality of solar cell panels form a polygon when the carrier is viewed in cross-section, the polygon having at least six sides.
Claim 9
Dependent Claim
32 words
A method according to claim 7, wherein the distance between the copper source and the indium source is from about 10% to about 25% of the radius of the tubular substrate carrier.
Claim 10
Dependent Claim
37 words
A method according to claim 1 wherein the relative rotation of the tubular substrate carrier relative to the substrate sources and the relative linear movement between the tubular substrate carrier and the substance sources are performed simultaneously.
References Cited (Backward Citations)
US1551850A
Cited
US2729190A
Cited
US2885997A
Cited
US4121537A
Cited
WO1982000245A1
Cited
US4335266A
Cited
US4392931A
Cited
US4508748A
Cited
US4583488A
Cited
WO1989000123A1
Cited
US4904362A
Cited
US4851095A
Cited
US5154810A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-28 | 1999-02-27 | 1999-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-28 | 2003-02-27 | 2003-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-28 | 2007-02-27 | 2007-08-29 | $7700.00 | Window Closed / Lapsed |