US5440887A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid vaporizer-feeder
Assignee: Lintec Corp
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Filing: 1993-07-09
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Granted: 1995-08-15
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Expires: 2013-07-09
Abstract
Abstract A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.
Inventors
- 👤 Hiroshi Nishizato
- 👤 Hirofumi Ono
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:04
CPC Classifications
B; B01; B01J; B01J3/00; B01J3/02; B01F; B01F23/00; B01F23/10; B01F23/12; C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; Y; Y10; Y10T; Y10T137/00; Y10T137/6416; Y10T137/6606
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
96 words
A liquid vaporizer-feeder comprising: a control valve for controlling the amount of a liquid passing therethrough; a vaporization valve for causing said liquid, of which the amount has been controlled by said control valve, to be vaporized and transported out by a carrier gas; a passage connecting said control valve with said vaporization valve for allowing said liquid to flow from said control valve therethrough to into said vaporization valve; a temperature-controlled housing structure containing both said control valve and said vaporization valve therein; and temperature-controlling means for maintaining a thermostatic condition inside said housing structure.
Claim 2
Dependent Claim
96 words
A liquid vaporizer-feeder comprising: a control valve for controlling the amount of a liquid passing therethrough; a vaporization valve for causing said liquid, of which the amount has been controlled by said control valve, to be vaporized and transported out by a carrier gas; a passage connecting said control valve with said vaporization valve for allowing said liquid to flow from said control valve therethrough to into said vaporization valve; a temperature-controlled housing structure containing both said control valve and said vaporization valve therein; and temperature-controlling means for maintaining a thermostatic condition inside said housing structure.
Claim 3
Dependent Claim
23 words
The liquid vaporizer-feeder of claim 1 wherein said passage has a narrowed portion where the internal cross-sectional area of said passage is reduced.
Claim 4
Dependent Claim
25 words
The liquid vaporizer-feeder of claim 2 wherein said narrowed portion of said passage is at the downstream end of said passage adjacent said vaporization valve.
Claim 5
Dependent Claim
43 words
The liquid vaporizer-feeder of claim 1 wherein said vaporization valve includes a valve body, a vaporization control chamber into which said throughhole opens, and a driving unit for causing said valve body to move and to thereby selectively open and close said throughhole.
Claim 6
Dependent Claim
71 words
The liquid vaporizer-feeder of claim 1 wherein said temperature controlling means include temperature-detecting means for detecting temperature inside said vaporization valve and outputting temperature signals indicative of said detected temperature, heater means for emitting heat in said vaporization valve, and a heater controller for receiving said temperature signals from said temperature-detecting means and controllingly causing said heater means to emit heat according to said temperature signals received from said temperature-detecting means.
Claim 7
Dependent Claim
30 words
The liquid vaporizer-feeder of claim 1 wherein said control valve and said vaporization valve are unitized inside a housing block and said passage is a throughhole through said housing block.
Claim 8
Dependent Claim
23 words
The liquid vaporizer-feeder of claim 1 further comprising a unitary housing structure which contains both said control valve and said vaporization valve therein.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-14 | 1999-02-13 | 1999-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-14 | 2003-02-13 | 2003-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-14 | 2007-02-13 | 2007-08-15 | $7700.00 | Window Closed / Lapsed |