US5440238A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface property detection apparatus and method
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1992-09-21
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Granted: 1995-08-08
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Expires: 2012-09-21
Abstract
Abstract Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor.
Inventors
- 👤 Jon S. Martens
- 👤 David S. Ginley
- 👤 Vincent M. Hietala
- 👤 Neil R. Sorensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 08:30
CPC Classifications
G; G01; G01R; G01R27/00; G01R27/02; G01R27/04; G01R27/06; Y; Y10; Y10T; Y10T117/00; Y10T117/10; Y10T117/1004
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
84 words
A method for detecting corrosion on the surface of a remote conductive sample, the method comprising the steps of: forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 10 9 to 10 12 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the corrosion as a function of the change in complex permittivity,
Claim 2
Independent Claim
84 words
A method for detecting corrosion on the surface of a remote conductive sample, the method comprising the steps of: forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 10 9 to 10 12 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the corrosion as a function of the change in complex permittivity,
Claim 3
Independent Claim
88 words
A method for detecting thin film growth on the surface of a remote conductive sample, the method comprising the steps of: forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 10 9 to 10 12 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the thin film growth as a function of the changes in complex permittivity.
Claim 4
Independent Claim
88 words
A method for detecting thin film growth on the surface of a remote conductive sample, the method comprising the steps of: forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 10 9 to 10 12 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the thin film growth as a function of the changes in complex permittivity.
Claim 5
Independent Claim
86 words
A method for detecting etching behavior on the surface of a remote conductive sample, the method comprising the steps of: forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 10 9 to 10 12 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the etching behavior as a function of the changes in complex permittivity.
Claim 6
Independent Claim
86 words
A method for detecting etching behavior on the surface of a remote conductive sample, the method comprising the steps of: forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 10 9 to 10 12 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the etching behavior as a function of the changes in complex permittivity.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-07 | 1999-02-06 | 1999-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-07 | 2003-02-06 | 2003-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-07 | 2007-02-06 | 2007-08-08 | $7700.00 | Window Closed / Lapsed |