US5440123A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for preparation of transmission electron microscope sample material utilizing sheet mesh
Assignee: Sony Corp
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Filing: 1993-08-27
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Granted: 1995-08-08
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Expires: 2013-08-27
Abstract
Abstract A method for processing sample material for use with transmission electron microscopes utilizes a sheet mesh for supporting the sample material during irradiation processing. The sheet mesh is formed of a metallic sheet material having a single opening provided in a central portion thereof, a circumferential edge portion of the opening is tapered from one side of the sheet mesh through to the other and the ankle of the taper corresponds to the ankle of irradiation. Position determining portions are provided on the sheet mesh to assure reliable positioning of the sample material. Also, the method provides a for preparation of the sample material including a protective layer formed over a membrane layer for allowing adhesion of membrane layers made of materials which would otherwise degrade the adhesion layer during processing.
Inventors
- 👤 Yuji Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:05
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/26; G; G01; G01N; G01N1/00; G01N1/28; G01N1/36; H01J37/02; H01J37/20; H01J2237/00; H01J2237/26
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
224 words
A method for irradiation processing of laminate material used in a semiconductor device, comprising the steps of: providing first and second substrates; applying a material layer to at least one surface of said first substrate and a material layer to at least one surface of said second substrate; applying a protective layer over said material layer on said first substrate and a protective layer over said material layer on said second substrate; joining said material layer on said first substrate and said material layer on said second substrate by joining each protective layer with an adhesion layer, thereby forming a laminate; cutting said laminate to a predetermined dimension such that said material layer on said first substrate, said protective layer on said material layer on said first substrate, said adhesion layer, said protective layer on said material layer on said second substrate, and said material layer on said second substrate together define a line formed substantially through a center of the cut laminate; forming an opening between first and second surfaces of a sheet mesh; tapering edge portions of said opening between said first and second surfaces at a predetermined irradiation angle; mounting said laminate over said opening on said first surface of said sheet mesh; irradiating said laminate via an energy beam at said irradiation angle through said opening in said sheet mesh.
Claim 2
Independent Claim
224 words
A method for irradiation processing of laminate material used in a semiconductor device, comprising the steps of: providing first and second substrates; applying a material layer to at least one surface of said first substrate and a material layer to at least one surface of said second substrate; applying a protective layer over said material layer on said first substrate and a protective layer over said material layer on said second substrate; joining said material layer on said first substrate and said material layer on said second substrate by joining each protective layer with an adhesion layer, thereby forming a laminate; cutting said laminate to a predetermined dimension such that said material layer on said first substrate, said protective layer on said material layer on said first substrate, said adhesion layer, said protective layer on said material layer on said second substrate, and said material layer on said second substrate together define a line formed substantially through a center of the cut laminate; forming an opening between first and second surfaces of a sheet mesh; tapering edge portions of said opening between said first and second surfaces at a predetermined irradiation angle; mounting said laminate over said opening on said first surface of said sheet mesh; irradiating said laminate via an energy beam at said irradiation angle through said opening in said sheet mesh.
Claim 3
Dependent Claim
42 words
A method for irradiation processing as set forth in claim 1, further including a step, after said tapering step, of forming a positioning recess in said first surface of said sheet mesh said mounting step including inserting said laminate in said recess.
Claim 4
Dependent Claim
43 words
A method for irradiation processing as set forth in claim 1, further including a step, after said tapering step, of marking said first surface of said sheet mesh with a positioning indication, said mounting step including aligning said laminate with said positioning indication.
Claim 5
Dependent Claim
17 words
A method for irradiation processing as set forth in claim 1, wherein each material layer comprises Al.
Claim 6
Dependent Claim
17 words
A method for irradiation processing as set forth in claim 1, wherein each protective layer comprises SiN.
Claim 7
Dependent Claim
21 words
A method for irradiation processing as set forth in claim 5, wherein a thickness of each protective layer is 500 nm.
Claim 8
Dependent Claim
20 words
A method for irradiation processing as set forth in claim 1, wherein said energy beam is an argon ion beam.
Claim 9
Dependent Claim
23 words
A method for irradiation processing as set forth in claim 1, wherein a plurality of energy beams are utilized for said irradiating step.
Claim 10
Independent Claim
138 words
A method for processing sample material for use with a transmission electron microscope, comprising the steps of: cutting a portion out of said sample material to be used with said transmission electron microscope; mounting said sample material on a first surface of a sheet mesh; providing an opening in said sheet mesh from said first surface to a second surface opposite said first surface, a gradient of an edge portion of said opening being formed with a predetermined taper from said first surface to said second surface; and irradiating said sample material via an energy beam directed through said opening in said sheet mesh; said method further including a step of providing a recessed portion in said first surface of said sheet mesh, said sheet mesh receiving said sample material in said recessed portion at said mounting step.
Claim 11
Independent Claim
138 words
A method for processing sample material for use with a transmission electron microscope, comprising the steps of: cutting a portion out of said sample material to be used with said transmission electron microscope; mounting said sample material on a first surface of a sheet mesh; providing an opening in said sheet mesh from said first surface to a second surface opposite said first surface, a gradient of an edge portion of said opening being formed with a predetermined taper from said first surface to said second surface; and irradiating said sample material via an energy beam directed through said opening in said sheet mesh; said method further including a step of providing a recessed portion in said first surface of said sheet mesh, said sheet mesh receiving said sample material in said recessed portion at said mounting step.
Claim 12
Dependent Claim
27 words
A method as set forth in claim 9, wherein an axial direction of said energy beam during said irradiation corresponds to an angle of said predetermined taper.
Claim 13
Dependent Claim
21 words
A method as set forth in claim 9, further including a step of rotating said sheet mesh during said irradiating step.
Claim 14
Dependent Claim
17 words
A method as set forth in claim 9, wherein said energy beam is an argon ion beam.
Claim 15
Dependent Claim
21 words
A method as set forth in claim 9, wherein said irradiating step is carried out by a plurality of energy beams.
Claim 16
Dependent Claim
120 words
A sheet mesh for holding a sample material for a transmission electron microscope, comprising: a mesh having a substantially planar upper surface and a lower surface, the sample material being mountable in a position on said upper surface; a recess formed in said upper surface, said recess having a shape conforming to the shape of the sample material whereby said sample material is held on said upper surface; a circular opening formed through a substantially center portion of said recess, said opening extending through said upper surface and said lower surface; wherein said mesh has a thickness which tapers off at an edge portion of said circular opening; and wherein said edge portion is contoured inward towards said lower surface.
Claim 17
Dependent Claim
120 words
A sheet mesh for holding a sample material for a transmission electron microscope, comprising: a mesh having a substantially planar upper surface and a lower surface, the sample material being mountable in a position on said upper surface; a recess formed in said upper surface, said recess having a shape conforming to the shape of the sample material whereby said sample material is held on said upper surface; a circular opening formed through a substantially center portion of said recess, said opening extending through said upper surface and said lower surface; wherein said mesh has a thickness which tapers off at an edge portion of said circular opening; and wherein said edge portion is contoured inward towards said lower surface.
Claim 18
Dependent Claim
120 words
A sheet mesh for holding a sample material for a transmission electron microscope, comprising: a mesh having a substantially planar upper surface and a lower surface, the sample material being mountable in a position on said upper surface; a recess formed in said upper surface, said recess having a shape conforming to the shape of the sample material whereby said sample material is held on said upper surface; a circular opening formed through a substantially center portion of said recess, said opening extending through said upper surface and said lower surface; wherein said mesh has a thickness which tapers off at an edge portion of said circular opening; and wherein said edge portion is contoured outward from said lower surface.
Claim 19
Dependent Claim
120 words
A sheet mesh for holding a sample material for a transmission electron microscope, comprising: a mesh having a substantially planar upper surface and a lower surface, the sample material being mountable in a position on said upper surface; a recess formed in said upper surface, said recess having a shape conforming to the shape of the sample material whereby said sample material is held on said upper surface; a circular opening formed through a substantially center portion of said recess, said opening extending through said upper surface and said lower surface; wherein said mesh has a thickness which tapers off at an edge portion of said circular opening; and wherein said edge portion is contoured outward from said lower surface.
References Cited (Backward Citations)
US4128765A
Cited
US4618767A
Cited
US4860224A
Cited
JPS62274237A
Cited
JPH01219536A
Cited
US5009738A
Cited
JPH0340353A
Cited
US5009743A
Cited
US5150391A
Cited
JPH03263746A
Cited
US5289005A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-07 | 1999-02-06 | 1999-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-07 | 2003-02-06 | 2003-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-07 | 2007-02-06 | 2007-08-08 | $7700.00 | Window Closed / Lapsed |