Liquid jet recording head fabrication method

Claim 1

A method for fabricating a liquid jet recording head having a base containing heat acting portions, liquid channels aligned over said heat acting portions and communicating to orifices for liquid discharge and a top plate covering said liquid channels, said method comprising the steps of (a) forming said base containing heat acting portions by a method comprising the steps of: (i) forming a heat generating resistive layer over a substrate: (ii) forming an electrode layer over said heat generating resistive layer; (iii) wet etching said electrode layer to form pairs of electrodes, wherein a wet etching rate is higher on an upper portion of said electrode layer in a direction of a film thickness of said electrode layer than on a lower portion of said electrode layer; and (iv) covering said pairs of electrodes with at least one protective covering layer; (b) forming said liquid channels communicating to said orifices for liquid discharge over said heat acting portions on said base; and (c) covering said liquid channels with a top plate.

Claim 2

A method for fabricating a liquid jet recording head having a base containing heat acting portions, liquid channels aligned over said heat acting portions and communicating to orifices for liquid discharge and a top plate covering said liquid channels, said method comprising the steps of (a) forming said base containing heat acting portions by a method comprising the steps of: (i) forming a heat generating resistive layer over a substrate: (ii) forming an electrode layer over said heat generating resistive layer; (iii) wet etching said electrode layer to form pairs of electrodes, wherein a wet etching rate is higher on an upper portion of said electrode layer in a direction of a film thickness of said electrode layer than on a lower portion of said electrode layer; and (iv) covering said pairs of electrodes with at least one protective covering layer; (b) forming said liquid channels communicating to said orifices for liquid discharge over said heat acting portions on said base; and (c) covering said liquid channels with a top plate.

Claim 6

A method for fabricating a base containing heat acting portions for a liquid jet recording head, said method comprising the steps of: (i) forming a heat generating resistive layer over a substrate; (ii) forming an electrode layer over said heat generating resistive layer; (iii) wet etching said electrode layer to form pairs of electrodes, wherein a wet etching rate is higher on an upper portion of said electrode layer in a direction of a film thickness of said electrode layer than on a lower portion of said electrode layer; and (iv) covering said pairs of electrodes with at least one protective layer.

Claim 7

A method for fabricating a base containing heat acting portions for a liquid jet recording head, said method comprising the steps of: (i) forming a heat generating resistive layer over a substrate; (ii) forming an electrode layer over said heat generating resistive layer; (iii) wet etching said electrode layer to form pairs of electrodes, wherein a wet etching rate is higher on an upper portion of said electrode layer in a direction of a film thickness of said electrode layer than on a lower portion of said electrode layer; and (iv) covering said pairs of electrodes with at least one protective layer.