US5434644A
Expired / Lapsed
US
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Filter device
Assignee: Tokyo Electron Ltd
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Filing: 1994-05-18
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Granted: 1995-07-18
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Expires: 2014-05-18
Abstract
Abstract A filter device for a resist-treatment system, comprising a frame having an aperture through which the outside air is introduced into the resist-treatment system, a fan unit for sucking the outside air into the aperture, and a filter element supported by means of the frame so as to be situated at least on one side the fan unit, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
Inventors
- 👤 Junichi Kitano
- 👤 Misako Saitou
- 👤 Yuji Kakazu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:58
CPC Classifications
B; B01; B01D; B01D53/00; B01D53/34; B01D53/38; B01D53/42; G; G03; G03F; G03F7/00; G03F7/26
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
76 words
A filter device for a resist-treatment system, comprising: a frame having an aperture through which the outside air is introduced into the resist-treatment system; sucking means for sucking the outside air into the aperture; and a filter element supported by means of the frame so as to be situated at least on one side the sucking means, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
Claim 2
Dependent Claim
76 words
A filter device for a resist-treatment system, comprising: a frame having an aperture through which the outside air is introduced into the resist-treatment system; sucking means for sucking the outside air into the aperture; and a filter element supported by means of the frame so as to be situated at least on one side the sucking means, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
Claim 3
Dependent Claim
50 words
A filter device according to claim 1, wherein said filter element is formed by dipping the porous body in an acid solution, splashing some of the acid solution out of pores in the porous body by means of a centrifugal separator, and then pressing the resulting structure into a plate.
Claim 4
Dependent Claim
16 words
A filter device according to claim 1, wherein said porous body is formed of activated charcoal.
Claim 5
Dependent Claim
16 words
A filter device according to claim 1, wherein said porous body is formed of carbon fibers.
Claim 6
Dependent Claim
15 words
A filter device according to claim 1, wherein said porous body is formed of zeolite.
Claim 7
Dependent Claim
17 words
A filter device according to claim 1, wherein said porous body is formed of ion exchange fibers.
Claim 8
Dependent Claim
16 words
A filter device according to claim 1, wherein said porous body is formed of olefin fibers.
Claim 9
Dependent Claim
14 words
A filter device according to claim 1, wherein said acid component is phosphoric acid.
Claim 10
Dependent Claim
14 words
A filter device according to claim 1, wherein said acid component is sulfonic acid.
Claim 11
Dependent Claim
23 words
A filter device according to claim 6, wherein a sulfonic group is chemically bonded to a base polymer of the ion exchange fibers.
Claim 12
Dependent Claim
22 words
A filter device according to claim 7, wherein a sulfonic group is chemically bonded to a base polymer of the olefin fibers.
Claim 13
Dependent Claim
19 words
A filter device according to claim 1, wherein said filter element is a porous sheet having a honeycomb structure.
Claim 14
Dependent Claim
19 words
A filter device according to claim 1, wherein said filter element is a porous sheet having a pleated structure.
Claim 15
Dependent Claim
25 words
A filter device according to claim 13, wherein said filter element includes a pleated porous sheet having a slit on the air outlet side thereof.
Claim 16
Dependent Claim
46 words
A filter device according to claim 1, wherein first and second filter elements are arranged on the suction and delivery sides, respectively, of the sucking means, the first filter element including the porous body containing the acid component capable of adsorbing the alkali component by reaction.
Claim 17
Dependent Claim
29 words
A filter device according to claim 15, further comprising means for measuring and detecting the content of an alkali component in a gas passed through the first filter element.
Claim 18
Dependent Claim
29 words
A filter device according to claim 16, further comprising alarm means for giving an alarm when a threshold value is exceeded by the detected content of the alkali component.
Claim 19
Dependent Claim
16 words
A filter device according to claim 15, wherein said first filter element has a two-stage structure.
Claim 20
Dependent Claim
112 words
A resist-treatment system having a filter means for removing impurities from the outside air, comprising: resist coating means for applying a resist to a substrate; baking means for baking the applied resist; developing means for developing the applied resist; and said filter means including a frame having an aperture through which the outside air is introduced into the resist-treatment system, sucking means for sucking the outside air into the aperture, and a filter element supported by means of the frame so as to be situated at least on one side the sucking means, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
Claim 21
Dependent Claim
112 words
A resist-treatment system having a filter means for removing impurities from the outside air, comprising: resist coating means for applying a resist to a substrate; baking means for baking the applied resist; developing means for developing the applied resist; and said filter means including a frame having an aperture through which the outside air is introduced into the resist-treatment system, sucking means for sucking the outside air into the aperture, and a filter element supported by means of the frame so as to be situated at least on one side the sucking means, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.
Claim 22
Dependent Claim
19 words
A resist-treatment system according to claim 19, further comprising exposure means for exposing the resist applied to the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-17 | 1999-01-16 | 1999-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-17 | 2003-01-16 | 2003-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-17 | 2007-01-16 | 2007-07-18 | $7700.00 | Window Closed / Lapsed |