US5432379A
Expired / Lapsed
US
⏱️ 0.0 years remaining
MIM-type electric device production thereof, and electronic apparatus employing the device
Assignee: Canon Inc
•
Filing: 1994-09-14
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Granted: 1995-07-11
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Expires: 2014-09-14
Abstract
Abstract An MIM type electric element has an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor. The lower electrode contains a noble metal crystal having a facet of a plate-shaped crystal formed on a substrate. The facet has a plane given by the crystal face (111) and contains a region having a plane orientation variance angle of not more than 1° by X-ray diffraction.
Inventors
- 👤 Ken Eguchi
- 👤 Haruki Kawada
- 👤 Tsutomu Ikeda
- 👤 Kiyoshi Takimoto
- 👤 Toshihiko Takeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 17:59
CPC Classifications
C; C30; C30B; C30B7/00; B; B82; B82Y; B82Y10/00; C30B29/00; C30B29/02; H; H10; H10N; H10N70/00; H10N70/011; H10N70/021; H10N70/20; H10N70/801; H10N70/821; H10N70/826; H10N70/841; H10N70/881; H01; H01J; H01J2201/00; H01J2201/30; H01J2201/312; H01J2201/3125
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
75 words
An MIN type electric device having an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor, the lower electrode containing a noble metal crystal in the shape of a plate formed on a substrate, and having a surface constituted of a crystal face (111) of the noble metal crystal, said crystal face (111) exhibiting a variance angle of not more than 1° by X-ray diffraction.
Claim 2
Dependent Claim
75 words
An MIN type electric device having an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor, the lower electrode containing a noble metal crystal in the shape of a plate formed on a substrate, and having a surface constituted of a crystal face (111) of the noble metal crystal, said crystal face (111) exhibiting a variance angle of not more than 1° by X-ray diffraction.
Claim 3
Dependent Claim
16 words
An MIM type electric device according to claim 1, wherein the noble metal crystal is monocrystalline.
Claim 4
Dependent Claim
16 words
An MIM type electric device according to claim 1, wherein the noble metal crystal is polycrystalline.
Claim 5
Dependent Claim
34 words
An MIM type electric device according to claim 1, wherein the crystal face (111) has a surface roughness as height difference of not more than 1 nm in a region of 1 μm square.
Claim 6
Dependent Claim
23 words
An MIM type electric device according to claim 1, wherein the barrier layer is an organic thin film having a periodical layer structure.
Claim 7
Dependent Claim
26 words
An MIM type electric device according to claim 1, wherein the barrier layer is an organic thin film composed of a monomolecular or monomolecular built-up film.
Claim 8
Dependent Claim
32 words
An MIM type electric device according to claim 1, wherein a second insulating layer is provided between the barrier layer and the upper electrode to form a hollow in the upper electrode.
Claim 9
Dependent Claim
15 words
An MIM type electric device according to claim 1, wherein the noble metal is gold.
Claim 10
Dependent Claim
40 words
An information-transferring apparatus, comprising a circuit having a MIM type electric device of any one of claims 1 to 8 and a photoconductive device connected in series to the electric device, and a means for applying voltage to the circuit.
Claim 11
Dependent Claim
69 words
An information-transferring apparatus, comprising a circuit formed from diode devices connected in series in the same rectification direction, a MIM type electric device of any one of claims 1 to 8 connected to a connection point of the diode elements, a photoconductive device placed at one end of the circuit, and a resistor at the other end of the circuit; and a means for applying voltage to the circuit.
Claim 12
Dependent Claim
127 words
An image-displaying apparatus, comprising a plurality of MIM type electric devices having a portion to emit an electron beam, modulation electrodes opposing thereto, and an image-forming member; the MIM type electric devices having an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor, the lower electrode containing a noble metal crystal in the shape of a plate formed on a substrate, and having a surface constituted of a crystal face (111) of the noble metal crystal, said crystal face (111) exhibiting a variance angle of not more than 1° by X-ray diffraction; the modulation electrodes modulating electron beams emitted from the electric devices; and the image-forming member forming an image by projection of the modulated electron beams.
Claim 13
Dependent Claim
127 words
An image-displaying apparatus, comprising a plurality of MIM type electric devices having a portion to emit an electron beam, modulation electrodes opposing thereto, and an image-forming member; the MIM type electric devices having an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor, the lower electrode containing a noble metal crystal in the shape of a plate formed on a substrate, and having a surface constituted of a crystal face (111) of the noble metal crystal, said crystal face (111) exhibiting a variance angle of not more than 1° by X-ray diffraction; the modulation electrodes modulating electron beams emitted from the electric devices; and the image-forming member forming an image by projection of the modulated electron beams.
Claim 14
Dependent Claim
114 words
An image-drawing apparatus, comprising an MIM type electric device having a portion to emit an electron beam, a means for focusing the electron beam emitted from-the electric device to a desired position, and a means for deflecting the electron beam; the MIM type electric device having an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor, the lower electrode containing a noble metal crystal in the shape of a plate formed on a substrate, and having a surface constituted of a crystal face, of the noble metal (111), said crystal face (111) exhibiting a variance angle of not more than 1° by X-ray diffraction.
Claim 15
Dependent Claim
114 words
An image-drawing apparatus, comprising an MIM type electric device having a portion to emit an electron beam, a means for focusing the electron beam emitted from-the electric device to a desired position, and a means for deflecting the electron beam; the MIM type electric device having an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor, the lower electrode containing a noble metal crystal in the shape of a plate formed on a substrate, and having a surface constituted of a crystal face, of the noble metal (111), said crystal face (111) exhibiting a variance angle of not more than 1° by X-ray diffraction.
Claim 16
Dependent Claim
14 words
An image-displaying apparatus according to claim 11, wherein the noble metal crystal is monocrystalline.
Claim 17
Dependent Claim
14 words
An image-displaying apparatus according to claim 11, wherein the noble metal crystal is polycrystalline.
Claim 18
Dependent Claim
32 words
An image-displaying apparatus according to claim 11, wherein the crystal face (111) has a surface roughness as height difference of not more than 1 nm in a region of 1 μm square.
Claim 19
Dependent Claim
21 words
An image-displaying apparatus according to claim 11, wherein the barrier layer is an organic thin film having a periodical layer structure.
Claim 20
Dependent Claim
24 words
An image-displaying apparatus according to claim 11, wherein the barrier layer is an organic thin film composed of a monomolecular or monomolecular built-up film.
Claim 21
Dependent Claim
30 words
An image-displaying apparatus according to claim 11, wherein a second insulating layer is provided between the barrier layer and the upper electrode to form a hollow in the upper electrode.
Claim 22
Dependent Claim
13 words
An image-displaying apparatus according to claim 11, wherein the noble metal is gold.
Claim 23
Dependent Claim
14 words
An image-drawing apparatus according to claim 12, wherein the nobel metal crystal is monocrystalline.
Claim 24
Dependent Claim
14 words
An image-drawing apparatus according to claim 12, wherein the noble metal crystal is polycrystalline.
Claim 25
Dependent Claim
32 words
An image-drawing apparatus according to claim 12, wherein the crystal face (111) has a surface roughness as height difference of not more than 1 nm is a region of 1 μm square.
Claim 26
Dependent Claim
21 words
An image-drawing apparatus according to claim 12, wherein the barrier layer is an organic thin film having a periodical layer structure.
Claim 27
Dependent Claim
24 words
An image-drawing apparatus according to claim 12, wherein the barrier layer is an organic thin film composed of a monomolecular or monomolecular built-up film.
Claim 28
Dependent Claim
29 words
An image-drawing according to claim 12 wherein a second insulating layer is provided between the barrier layer and the upper electrode to form a hollow in the upper electrode.
Claim 29
Dependent Claim
13 words
An image-drawing apparatus according to claim 12, wherein the nobel metal is gold.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-10 | 1999-01-09 | 1999-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-10 | 2003-01-09 | 2003-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-10 | 2007-01-09 | 2007-07-11 | $7700.00 | Window Closed / Lapsed |