Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids

Claim 2

A process for inhibiting corrosion and/or particulate formation in a reciprocating piston pump adapted for pumping of a liquid into a flash vaporization matrix for controlled delivery of CVD reagents into deposition reactors, said liquid mediating said corrosion and/or particulate formation in the presence of oxygen and/or other atmospheric gases, wherein the reciprocating piston is reciprocatable between a first extended position in a liquid pumping chamber of the pump and a second retracted position exterior of the liquid pumping chamber, so that an active pumping portion of the reciprocating piston sequentially and repetitively contacts liquid in the liquid pumping chamber and then is withdrawn exteriorly of the liquid pumping chamber, said process comprising blanketing the active pumping portion of the reciprocating piston exterior of the liquid pumping chamber with an inert fluid, so that the active pumping portion of the reciprocating piston is prevented from contacting oxygen or other atmospheric gases.

Claim 3

A process as in claim 1, where the inert fluid is selected from argon, nitrogen, helium and hydrogen.

Claim 4

A process for inhibiting corrosion and/or particulate formation in a reciprocating piston pump adapted for pumping of a liquid mediating said corrosion and/or particulate formation in the presence of oxygen and/or other atmospheric gases wherein the reciprocating piston is reciprocatable between a first extended position in a liquid pumping chamber of the pump and a second retracted position exterior of the liquid pumping chamber, so that an active pumping portion of the reciprocating piston sequentially and repetitively contacts liquid in the liquid pumping chamber and then is withdrawn exteriorly of the liquid pumping chamber, and wherein said pump comprises a pump block with an interior pumping cavity; a piston positioned in the pumping cavity for reciprocatable movement therein; a first liquid seal mounted in the pumping cavity and circumscribingly arranged about the piston (i) to effect sealing between the piston and the pumping cavity during reciprocating movement of the piston in the cavity, and (ii) to bound an inner liquid pumping volume of the pumping cavity; a second fluid seal mounted in the pumping cavity and circumscribingly arranged about the piston to effect sealing between the piston and the pumping cavity during reciprocating movement of the piston in the cavity, the second fluid seal being in spaced-apart relationship to the first liquid seal to define an intraseal volume of the pumping cavity therebetween; an inlet liquid passage joined to the inner liquid pumping volume for introduction of feed liquid thereto; an outlet liquid passage joined to the inner liquid pumping volume for discharging of pressurized liquid therefrom; a fluid inlet passage joined to the intraseal volume of the pumping cavity for introduction of purge gas or liquid thereto; and a fluid outlet passage joined to the intraseal volume of the pumping cavity for discharging of purged gas therefrom, whereby a portion of the piston during reciprocating movement thereof is translated between the liquid pumping volume of the pumping cavity and the intraseal volume of the pumping cavity; said process comprising the steps of: reciprocating the piston in the pumping cavity; flowing feed liquid through the inlet liquid passage to the pumping cavity; discharging pressurized liquid from the pumping cavity through the outlet liquid passage; flowing purge fluid through the fluid inlet passage into the intraseal volume of the pumping cavity; and discharging purge fluid from the intraseal volume of the pumping cavity through the fluid outlet passage.

Claim 5

A process for inhibiting corrosion and/or particulate formation in a reciprocating piston pump adapted for pumping of a liquid mediating said corrosion and/or particulate formation in the presence of oxygen and/or other atmospheric gases wherein the reciprocating piston is reciprocatable between a first extended position in a liquid pumping chamber of the pump and a second retracted position exterior of the liquid pumping chamber, so that an active pumping portion of the reciprocating piston sequentially and repetitively contacts liquid in the liquid pumping chamber and then is withdrawn exteriorly of the liquid pumping chamber, and wherein said pump comprises a pump block with an interior pumping cavity; a piston positioned in the pumping cavity for reciprocatable movement therein; a first liquid seal mounted in the pumping cavity and circumscribingly arranged about the piston (i) to effect sealing between the piston and the pumping cavity during reciprocating movement of the piston in the cavity, and (ii) to bound an inner liquid pumping volume of the pumping cavity; a second fluid seal mounted in the pumping cavity and circumscribingly arranged about the piston to effect sealing between the piston and the pumping cavity during reciprocating movement of the piston in the cavity, the second fluid seal being in spaced-apart relationship to the first liquid seal to define an intraseal volume of the pumping cavity therebetween; an inlet liquid passage joined to the inner liquid pumping volume for introduction of feed liquid thereto; an outlet liquid passage joined to the inner liquid pumping volume for discharging of pressurized liquid therefrom; a fluid inlet passage joined to the intraseal volume of the pumping cavity for introduction of purge gas or liquid thereto; and a fluid outlet passage joined to the intraseal volume of the pumping cavity for discharging of purged gas therefrom, whereby a portion of the piston during reciprocating movement thereof is translated between the liquid pumping volume of the pumping cavity and the intraseal volume of the pumping cavity; said process comprising the steps of: reciprocating the piston in the pumping cavity; flowing feed liquid through the inlet liquid passage to the pumping cavity; discharging pressurized liquid from the pumping cavity through the outlet liquid passage; flowing purge fluid through the fluid inlet passage into the intraseal volume of the pumping cavity; and discharging purge fluid from the intraseal volume of the pumping cavity through the fluid outlet passage.

Claim 6

A process for inhibiting corrosion and/or particulate formation in a reciprocating piston pump adapted for pumping of a liquid into a flash vaporization matrix for controlled delivery of CVD reagents into deposition reactors, said liquid mediating said corrosion and/or particulate formation in the presence of oxygen and/or other atmospheric gases, wherein the reciprocating piston is reciprocatable between a first extended position in a liquid pumping chamber of the pump and a second retracted position exterior of the liquid pumping chamber, so that an active pumping portion of the reciprocating piston sequentially and repetitively contacts liquid in the liquid pumping chamber and then is withdrawn exteriorly of the liquid pumping chamber, said process comprising admixing the process liquid with a low vapor pressure liquid component which is solvatingly effective for inhibiting corrosion or particulate formation in an amount effective for said inhibition; and blanketing the active pumping portion of the reciprocating piston exterior of the liquid pumping chamber with an inert fluid, so that the active pumping portion of the reciprocating piston is prevented from contacting oxygen or other atmospheric gases.

Claim 7

A process for inhibiting corrosion and/or particulate formation in a reciprocating piston pump adapted for pumping of a liquid into a flash vaporization matrix for controlled delivery of CVD reagents into deposition reactors, said liquid mediating said corrosion and/or particulate formation in the presence of oxygen and/or other atmospheric gases, wherein the reciprocating piston is reciprocatable between a first extended position in a liquid pumping chamber of the pump and a second retracted position exterior of the liquid pumping chamber, so that an active pumping portion of the reciprocating piston sequentially and repetitively contacts liquid in the liquid pumping chamber and then is withdrawn exteriorly of the liquid pumping chamber, said process comprising admixing the process liquid with a low vapor pressure liquid component which is solvatingly effective for inhibiting corrosion or particulate formation in an amount effective for said inhibition; and blanketing the active pumping portion of the reciprocating piston exterior of the liquid pumping chamber with an inert fluid, so that the active pumping portion of the reciprocating piston is prevented from contacting oxygen or other atmospheric gases.

Claim 8

A process according to claim 4, wherein the low vapor pressure liquid is selected from the group consisting of polyethers, polyamines, and aromatic amines.

Claim 9

A process according to claim 4, wherein the low vapor pressure liquid is selected from the group consisting of tetraglyme, triglyme, diglyme, tetraethylenepentamine, and triethylenetetramine.

Claim 10

A process according to claim 4, wherein the process liquid is a solution of a metal beta-diketonate complex in a low-boiling solvent, and the low vapor pressure liquid is selected from the group consisting of tetraglyme, triglyme, or diglyme.