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US5420472A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and apparatus for thermal coefficient of expansion matched substrate attachment

Assignee: CTS Corp
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Filing: 1994-01-18
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Granted: 1995-05-30
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Expires: 2014-01-18
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Abstract

Abstract A radio frequency apparatus desirably includes at least one microelectronic device comprising a substrate including the at least one microelectronic device and a package base for mounting the microelectronic device. The package base includes external interconnections coupled to internal interconnections and an adhesive affixing the substrate to the package base. The adhesive is disposed along a first axis of the substrate. The internal interconnections are coupled to the microelectronic device. A lid is sealed to the package base. The lid seals the microelectronic device.

Inventors

  • 👤 Frederick Y. Cho
  • 👤 David Penunuri

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 04:32
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/05; H03H9/058; H03H9/0585; H03H9/02535; H03H9/02543; H03H9/02551; H03H9/02559; H03H9/10; H03H9/1064; H03H9/1071

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 128 words
An apparatus comprising: a substrate having anisotropic thermal expansion coefficients and a preferred axis, said substrate comprising a microelectronic device; a package base having an isotropic thermal expansion coefficient and a preferred direction, said package base for mounting said microelectronic device with said preferred axis substantially aligned to said preferred direction, said package base including external interconnections coupled to internal interconnections; and an adhesive for affixing said substrate to said package base, said adhesive disposed substantially only along a narrow line parallel to a first axis of said substrate, said first axis disposed at an angle Φ with respect to said preferred axis, wherein said first axis is chosen to provide an expansion coefficient of said substrate therealong providing a best match to said isotropic thermal expansion coefficient.
Claim 2
Independent Claim 128 words
An apparatus comprising: a substrate having anisotropic thermal expansion coefficients and a preferred axis, said substrate comprising a microelectronic device; a package base having an isotropic thermal expansion coefficient and a preferred direction, said package base for mounting said microelectronic device with said preferred axis substantially aligned to said preferred direction, said package base including external interconnections coupled to internal interconnections; and an adhesive for affixing said substrate to said package base, said adhesive disposed substantially only along a narrow line parallel to a first axis of said substrate, said first axis disposed at an angle Φ with respect to said preferred axis, wherein said first axis is chosen to provide an expansion coefficient of said substrate therealong providing a best match to said isotropic thermal expansion coefficient.
Claim 3
Dependent Claim 19 words
An apparatus as claimed in claim 1, further including a lid sealed to said package base by a seal.
Claim 4
Dependent Claim 104 words
An apparatus as claimed in claim 1, wherein: said substrate comprises one hundred and twelve degree rotated lithium tantalate and said preferred axis corresponds to a Y axis of said lithium tantalate; said package base comprises strontium calcium titanate ceramic material chosen to have a thermal expansion coefficient in a range of nine to thirteen parts per million per degree Celsius; and said first axis coincides with a line making said angle Φ in a range from about ninety five degrees to about one hundred and twenty degrees or about one hundred and seventy degrees to about two hundred degrees with said Y axis.
Claim 5
Dependent Claim 25 words
An apparatus as claimed in claim 1, wherein said adhesive comprises a member of a group consisting of polyetheretherketone, polysulfone, polyethersulfone, polyetherimide, polybutlyeneterepthalate and polycarbonate.
Claim 6
Dependent Claim 12 words
An apparatus as claimed in claim 1, wherein said substrate comprises quartz.
Claim 7
Dependent Claim 13 words
An apparatus as claimed in claim 1, wherein said substrate comprises lithium niobate.
Claim 8
Independent Claim 141 words
An apparatus comprising: a substrate having anisotropic thermal expansion coefficients, said substrate comprising a microelectronic device having a preferred axis; a package base having an isotropic thermal expansion coefficient and a preferred direction, said package base for mounting said microelectronic device with said preferred axis substantially aligned to said preferred direction, said package base including external interconnects on coupled to internal interconnections; an adhesive for affixing said substrate to said package base, said adhesive disposed substantially only along a narrow line along a first axis of said substrate, said first axis disposed at an angle Φ with respect to said preferred axis wherein an expansion coefficient of said substrate corresponding to said first axis provides a best match to said isotropic thermal expansion coefficient of said package base; a seal; and a lid sealed to said package base by said seal.
Claim 9
Independent Claim 141 words
An apparatus comprising: a substrate having anisotropic thermal expansion coefficients, said substrate comprising a microelectronic device having a preferred axis; a package base having an isotropic thermal expansion coefficient and a preferred direction, said package base for mounting said microelectronic device with said preferred axis substantially aligned to said preferred direction, said package base including external interconnects on coupled to internal interconnections; an adhesive for affixing said substrate to said package base, said adhesive disposed substantially only along a narrow line along a first axis of said substrate, said first axis disposed at an angle Φ with respect to said preferred axis wherein an expansion coefficient of said substrate corresponding to said first axis provides a best match to said isotropic thermal expansion coefficient of said package base; a seal; and a lid sealed to said package base by said seal.
Claim 10
Dependent Claim 17 words
An apparatus as claimed in claim 7, wherein said microelectronic device includes a surface acoustic wave device.
Claim 11
Dependent Claim 25 words
An apparatus as claimed in claim 7, wherein said substrate includes a member of a group consisting of silicon dioxide, lithium niobate and lithium tantalate.
Claim 12
Dependent Claim 47 words
An apparatus as claimed in claim 7, wherein said adhesive includes adhesive disposed as a series of dots arranged in a narrow line along said first axis, said substrate having a substantially similar thermal coefficient of expansion along said first axis as said isotropic thermal expansion coefficient.
Claim 13
Dependent Claim 43 words
An apparatus as claimed in claim 7, wherein said adhesive comprises a single narrow line of adhesive material disposed along said first axis, said substrate having a substantially similar thermal coefficient of expansion along said first axis as said isotropic thermal expansion coefficient.
Claim 14
Dependent Claim 56 words
An apparatus as claimed in claim 7, wherein: said package base comprises alumina-bearing ceramic; said substrate includes ST-cut quartz and said preferred axis corresponds to an X axis of said ST-cut quartz; and said first axis of said substrate coincides with a line making said angle Φ of four to twelve degrees with said X axis.
Claim 15
Dependent Claim 79 words
An apparatus as claimed in claim 7, wherein: said package base comprises strontium calcium titanate ceramic having a thermal expansion coefficient in a range of nine to thirteen parts per million per degree Celsius; said substrate includes Y-cut, Z-propagating lithium niobate and said preferred axis corresponds to a Z axis of said lithium niobate; and said first axis of said substrate coincides with a line making said angle Φ of thirty five to eighty degrees with said Z axis.
Claim 16
Dependent Claim 78 words
An apparatus as claimed in claim 7, wherein: said package base comprises polyimide/quartz material chosen to have a thermal expansion coefficient in a range of eight to eleven parts per million per degree Celsius; said substrate includes thirty-six degree rotated lithium tantalate and said preferred axis corresponds to an X axis of said lithium tantalate; and said first axis of said substrate coincides with a line making said angle Φ of about ninety degrees with said X axis.
Claim 17
Dependent Claim 166 words
A radio frequency apparatus including at least one microelectronic device comprising: a substrate having anisotropic thermal expansion coefficients and a preferred axis, said substrate including said at least one microelectronic device; a package base having an isotropic thermal expansion coefficient and a preferred direction, said package base for mounting said microelectronic device with said preferred axis substantially aligned to said preferred direction, said package base including external interconnections coupled to internal interconnections, said internal interconnections coupled to said microelectronic device; an adhesive for affixing said substrate to said package base, said adhesive disposed substantially along a narrow line parallel to a first axis of said substrate, said first axis disposed at an angle Φ with respect to said preferred axis, wherein said first axis is chosen to provide a best match of an expansion coefficient corresponding to said first axis to said isotropic thermal expansion coefficient; and a lid hermetically sealed to said package base, said lid and said package base hermetically enclosing said microelectronic device.
Claim 18
Dependent Claim 166 words
A radio frequency apparatus including at least one microelectronic device comprising: a substrate having anisotropic thermal expansion coefficients and a preferred axis, said substrate including said at least one microelectronic device; a package base having an isotropic thermal expansion coefficient and a preferred direction, said package base for mounting said microelectronic device with said preferred axis substantially aligned to said preferred direction, said package base including external interconnections coupled to internal interconnections, said internal interconnections coupled to said microelectronic device; an adhesive for affixing said substrate to said package base, said adhesive disposed substantially along a narrow line parallel to a first axis of said substrate, said first axis disposed at an angle Φ with respect to said preferred axis, wherein said first axis is chosen to provide a best match of an expansion coefficient corresponding to said first axis to said isotropic thermal expansion coefficient; and a lid hermetically sealed to said package base, said lid and said package base hermetically enclosing said microelectronic device.
Claim 19
Dependent Claim 19 words
A radio frequency apparatus as claimed in claim 15, wherein said microelectronic device comprises a surface acoustic wave device.
Claim 20
Dependent Claim 46 words
A radio frequency apparatus as claimed in claim 15, wherein said adhesive further comprises a single thin, narrow line of adhesive material disposed along said first axis, said substrate having a substantially similar coefficient of expansion along said first axis as said isotropic thermal expansion coefficient.
Claim 21
Dependent Claim 50 words
A radio frequency apparatus as claimed in claim 15, wherein: said adhesive includes adhesive disposed as a series of dots arranged in a narrow line along said first axis; and said substrate has a substantially similar thermal coefficient of expansion along said first axis as said isotropic thermal expansion coefficient.
Claim 22
Dependent Claim 113 words
A radio frequency apparatus as claimed in claim 15, wherein: said substrate comprises one hundred and twelve degree rotated lithium tantalate and said preferred axis corresponds to a Y axis of said lithium tantalate; said package base comprises strontium calcium titanate ceramic material chosen to have a thermal expansion coefficient in a range of nine to thirteen parts per million per degree Celsius; and said first axis of said substrate coincides with a line making said angle Φ in a range from about ninety five degrees to about one hundred and twenty degrees or about one hundred and seventy degrees to about two hundred degrees with said Y axis of said lithium tantalate.
Claim 23
Dependent Claim 27 words
A radio frequency apparatus as claimed in claim 15, wherein said substrate comprises a member of a group consisting of lithium niobate, lithium tantalate and silicon dioxide.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-05-29 1998-11-28 1999-05-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-05-29 2002-11-28 2003-05-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-05-29 2006-11-28 2007-05-30 $7700.00 Window Closed / Lapsed

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