US5416859A
Expired / Lapsed
US
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Broadband, low drive voltage, electrooptic, intergrated optical modulator
Assignee: United States Department of the Navy
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Filing: 1993-04-14
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Granted: 1995-05-16
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Expires: 2013-04-14
Abstract
Abstract A broadband, electrooptic modulator is disclosed which, in a first embodiment, comprises: a substrate having substrate modes, having electrooptic effects, and having a first optical waveguide adapted to receive and transmit light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on the substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on the buffer layer for receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in the optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz. The substrate has a sufficiently small thickness so that coupling between the coplanar mode of the coplanar waveguide electrode structure and any one of the substrate modes of the substrate substantially does not occur over a desired frequency bandwidth of operation, and the coplanar waveguide electrode structure has a sufficiently large thickness so that the second phase velocity of the electrical signal is substantially equal to the first phase velocity. In a second embodiment of the invention an intensity modulator is produced by adding a second optical waveguide which, in combination with the first optical waveguide, forms an interferometer.
Inventors
- 👤 William R. Burns
- 👤 Catherine H. Bulmer
- 👤 Ganesh K. Gopalakrishnan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; G03F7/16; G03F7/168
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
196 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having at least one optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode, said coplanar waveguide electrode structure being disposed on said buffer layer and receiving an electrical signal propagating in the first direction with a second phase velocity to modulate the light in said at least one optical waveguide as a function of the amplitude and frequency of the electrical signal; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz, and said coplanar waveguide electrode structure having a sufficiently large thickness so that said first and second phase velocities are substantially equal over the desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 2
Dependent Claim
196 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having at least one optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode, said coplanar waveguide electrode structure being disposed on said buffer layer and receiving an electrical signal propagating in the first direction with a second phase velocity to modulate the light in said at least one optical waveguide as a function of the amplitude and frequency of the electrical signal; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz, and said coplanar waveguide electrode structure having a sufficiently large thickness so that said first and second phase velocities are substantially equal over the desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 3
Dependent Claim
179 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects, and having an optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in said optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 4
Dependent Claim
179 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects, and having an optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in said optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 5
Dependent Claim
35 words
The modulator of claim 2 wherein: said substrate has a thickness of less than about 0.25 mm; and said coplanar waveguide electrode structure has a thickness of between about 12 μm and about 20 μm.
Claim 6
Dependent Claim
19 words
The modulator of claim 2 wherein: said coplanar waveguide electrode structure comprises a center electrode and two grounded electrodes.
Claim 7
Dependent Claim
17 words
The modulator of claim 4 wherein: each of said center and grounded electrodes is comprised of gold.
Claim 8
Dependent Claim
15 words
The modulator of claim 4 wherein: said optical waveguide is disposed underneath said center electrode.
Claim 9
Dependent Claim
29 words
The modulator of claim 6 wherein: said optical waveguide has a first width and said center electrode has a second width which is substantially equal to said first width.
Claim 10
Dependent Claim
13 words
The modulator of claim 2 wherein: said substrate is comprised of lithium niobate.
Claim 11
Dependent Claim
14 words
The modulator of claim 2 wherein: said buffer layer is comprised of silicon dioxide.
Claim 12
Dependent Claim
207 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects, and having an optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in said optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanor waveguide electrode structure comprising a center electrode and two grounded electrodes, said optical waveguide being disposed between said center electrode and one of said grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 13
Dependent Claim
207 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects, and having an optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in said optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanor waveguide electrode structure comprising a center electrode and two grounded electrodes, said optical waveguide being disposed between said center electrode and one of said grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 14
Dependent Claim
207 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects, and having an optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity, said substrate being comprised of lithium niobate; a buffer layer disposed on said substrate, said buffer layer being comprised of silicon dioxide; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in said optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide electrode structure comprising a center electrode and two grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 15
Dependent Claim
207 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects, and having an optical waveguide receiving and transmitting light therethrough in a first direction and with a first phase velocity, said substrate being comprised of lithium niobate; a buffer layer disposed on said substrate, said buffer layer being comprised of silicon dioxide; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to phase modulate the light in said optical waveguide at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide electrode structure comprising a center electrode and two grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 16
Dependent Claim
15 words
The modulator of claim 11 wherein: said optical waveguide is disposed underneath said center electrode.
Claim 17
Dependent Claim
29 words
The modulator of claim 12 wherein: said optical waveguide has a first width and said center electrode has a second width which is substantially equal to said first width.
Claim 18
Dependent Claim
21 words
The modulator of claim 11 wherein: said optical waveguide is disposed between said center electrode and one of said grounded electrodes.
Claim 19
Dependent Claim
181 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 20
Dependent Claim
181 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 21
Dependent Claim
35 words
The modulator of claim 15 wherein: said substrate has a thickness of less than about 0.25 mm; and said coplanar waveguide electrode structure has a thickness of between about 12 μm and about 20 μm.
Claim 22
Dependent Claim
19 words
The modulator of claim 15 wherein: said coplanar waveguide electrode structure comprises a center electrode and two grounded electrodes.
Claim 23
Dependent Claim
17 words
The modulator of claim 17 wherein: each of said center and grounded electrodes is comprised of gold.
Claim 24
Dependent Claim
13 words
The modulator of claim 15 wherein: said substrate is comprised of lithium niobate.
Claim 25
Dependent Claim
14 words
The modulator of claim 15 wherein: said buffer layer is comprised of silicon dioxide.
Claim 26
Dependent Claim
231 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide electrode structure comprising a center electrode and two grounded electrodes, said first optical waveguide being disposed between said center electrode and a first one of said grounded electrodes, and said second optical waveguide being disposed between said center electrode and a second one of said grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 27
Dependent Claim
231 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide electrode structure comprising a center electrode and two grounded electrodes, said first optical waveguide being disposed between said center electrode and a first one of said grounded electrodes, and said second optical waveguide being disposed between said center electrode and a second one of said grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 28
Dependent Claim
215 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide comprising a center electrode and two grounded electrodes, said first optical waveguide being disposed underneath said center electrode and said second optical waveguide being disposed underneath one of said grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 29
Dependent Claim
215 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity; a buffer layer disposed on said substrate; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide comprising a center electrode and two grounded electrodes, said first optical waveguide being disposed underneath said center electrode and said second optical waveguide being disposed underneath one of said grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 30
Dependent Claim
63 words
The modulator of claim 22 wherein: said first optical waveguide has a first width; said center electrode has a second width which is substantially equal to said first width; said second optical waveguide has a third width which is substantially equal to said first width; and said one of said grounded electrodes has a fourth width which is greater than said third width.
Claim 31
Dependent Claim
209 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity, said substrate being comprised of lithium niobate; a buffer layer disposed on said substrate, said buffer layer being comprised of silicon dioxide; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide electrode structure comprising a center electrode and two grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 32
Dependent Claim
209 words
A broadband, low drive voltage, electrooptic modulator comprising: a substrate having substrate modes, having electrooptic effects and having first and second optical waveguides receiving and transmitting light therethrough in a first direction and with a first phase velocity, said substrate being comprised of lithium niobate; a buffer layer disposed on said substrate, said buffer layer being comprised of silicon dioxide; and a coplanar waveguide electrode structure having a coplanar mode and being disposed on said buffer layer and receiving an electrical signal propagating therethrough in the first direction with a second phase velocity to intensity modulate the light in said optical waveguides at a frequency in the range from 0 Hz up to substantially 40 GHz, said coplanar waveguide electrode structure having a sufficiently large thickness so that said second phase velocity of said electrical signal is substantially equal to said first phase velocity, said coplanar waveguide electrode structure comprising a center electrode and two grounded electrodes; said substrate having a sufficiently small thickness so that coupling between the coplanar mode of said coplanar waveguide electrode structure and any one of the substrate modes of said substrate substantially does not occur over a desired frequency bandwidth of operation within the range from 0 Hz up to substantially 40 GHz.
Claim 33
Dependent Claim
29 words
The modulator of claim 24 wherein: said first optical waveguide is disposed underneath said center electrode; and said second optical waveguide is disposed underneath one of said grounded electrodes.
Claim 34
Dependent Claim
63 words
The modulator of claim 25 wherein: said first optical waveguide has a first width; said center electrode has a second width which is substantially equal to said first width; said second optical waveguide has a third width which is substantially equal to said first width; and said one of said grounded electrodes has a fourth width which is greater than said third width.
Claim 35
Dependent Claim
43 words
The modulator of claim 24 wherein: said first optical waveguide is disposed between said center electrode and a first one of said grounded electrodes; and said second optical waveguide is disposed between said center electrode and a second one of said grounded electrodes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-05-15 | 1998-11-14 | 1999-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-15 | 2002-11-14 | 2003-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-15 | 2006-11-14 | 2007-05-16 | $7700.00 | Window Closed / Lapsed |