US5415727A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Internally cooled large aperture microlens array with monolithically integrated microscanner
Assignee: Lockheed Martin Corp
•
Filing: 1994-01-13
•
Granted: 1995-05-16
•
Expires: 2014-01-13
Abstract
Abstract A large aperture microlens array assembly has at least two arrays of microlenses with individual unit cell trains optically interconnecting individual microlenses in one array with related individual microlenses in another array. In each unit cell train the light entering an entrance pupil of a microlens in one array is transmitted through the exit surface of a related microlens of the other array to provide a collimated output through the exit. One array may be moved with respect to the other array for scanning a field of regard.
Inventors
- 👤 George Gal
- 👤 Howard E. Morrow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0005; G02; G02B; G02B27/00; G02B27/10; G02B27/1073; G02B27/1086; G02B27/12; G02B27/123; G02B3/00; G02B3/0006; G02B3/0037; G02B3/0056; G02B3/0062; G02B3/0068; G02B3/02; G02B3/08; G02B5/00; G02B5/18; G02B5/1876; G02B6/00; G02B6/10; G02B6/12; G02B6/12002; G02B6/122; G02B6/124; G02B6/1245; G02B6/13; G02B6/136; C; C10; C10M; C10M2201/00; C10M2201/06; C10M2201/065; C10M2201/066; C10M2207/00; C10M2207/10; C10M2207/12; C10M2207/125; C10M2207/129; C10M2211/00; C10M2211/06; C10M2213/00; C10M2213/02; C10M2213/04; C10M2213/06; C10M2213/062; C10N; C10N2040/00; C10N2040/02; G02B2006/12083; G02B2006/12102; G02B2006/12104; G02B2006/12133; G02B2006/12147; G02B2006/12154; G02B2006/12166; G02B2006/12173; G02B2006/12176; G02B2006/12195; G02B3/0012; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49826
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
104 words
A method for fabricating cooling channels within matched arrays of microlenses, said method comprising, etching the cooling channels into an upper surface of a first block of silicon crystal, while leaving portions of the upper surface unetched, fusion bonding a second block of silicon crystal to the unetched portions of the upper surface of the first block of silicon crystal to form a fused together block having a top surface and a bottom surface, trimming and polishing the top and bottom surfaces of the fused-together block of silicon crystal, and then fabricating the matched arrays of microlenses on the said top and bottom surfaces.
Claim 2
Independent Claim
104 words
A method for fabricating cooling channels within matched arrays of microlenses, said method comprising, etching the cooling channels into an upper surface of a first block of silicon crystal, while leaving portions of the upper surface unetched, fusion bonding a second block of silicon crystal to the unetched portions of the upper surface of the first block of silicon crystal to form a fused together block having a top surface and a bottom surface, trimming and polishing the top and bottom surfaces of the fused-together block of silicon crystal, and then fabricating the matched arrays of microlenses on the said top and bottom surfaces.
Claim 3
Dependent Claim
19 words
The method defined in claim 1 wherein the arrays of microlenses are fabricated by a gray scale fabrication process.
References Cited (Backward Citations)
US5298366A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-15 | 1998-11-14 | 1999-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-15 | 2002-11-14 | 2003-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-15 | 2006-11-14 | 2007-05-16 | $7700.00 | Window Closed / Lapsed |