Patent US2783087A successfully refreshed from Google Patents.
US5408322A
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Self aligning in-situ ellipsometer and method of using for process monitoring
Assignee: Tokyo Electron Ltd
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Filing: 1993-04-26
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Granted: 1995-04-18
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Expires: 2013-04-26
Abstract
Abstract An ellipsometric measuring system is set-up in association with a vacuum chamber on a production line for thin film samples. The ellipsometer has a scanner for directing the incident light beam to different locations on a thin film sample, and the ellipsometer also has an aperture for limiting the reflected light beam received by the photodetector. The scanner implements a method of aligning the incident beam to a selected surface of the sample. The scanner and the aperture are used to provide a finer adjustment of the incident beam with respect to the selected surface. The ellipsometric measuring system further uses test thin film samples with known film thicknesses and index or refractions to calculate a value for the angle of incidence of the incident light beam.
Inventors
- 👤 Jon S. Hsu
- 👤 Bhola N. De
- 👤 Rodney L. Robison
- 👤 Tugrul Yasar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:20
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211; G01B11/0616; G01B11/0641; G01B11/065
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
245 words
A measuring station for use in a production line to measure a thin film characteristic of a thin film sample, the measuring station comprising: a vacuum chamber having first and second windows; a movable pallet for supporting the thin film sample and movable to a position in the vacuum chamber; an ellipsometer having a source of collimated light and a polarizer for producing a polarized light beam, and a photodetector for producing an output signal in response to receiving a reflected light beam; a scanner located with respect to said polarizer and said first window for receiving said polarized light beam and aiming an incident light beam through said first window and onto the thin film sample, said scanner moving said incident light beam to different locations on a surface of said thin film sample to direct the reflected light beam from the sample through said second window and onto said photodetector; and control means responsive to the output signal and connected to said scanner and said ellipsometer for providing control signals to cause said scanner to move the incident light beam to a location on a selected surface of the thin film sample producing a maximum intensity of the reflected light beam, operating said ellipsometer to determine ellipsometric parameters of the thin film sample, and determining the thin film characteristics of the thin film sample in response to the ellipsometric parameters and a stored angle of incidence determined with a different thin film sample.
Claim 2
Dependent Claim
245 words
A measuring station for use in a production line to measure a thin film characteristic of a thin film sample, the measuring station comprising: a vacuum chamber having first and second windows; a movable pallet for supporting the thin film sample and movable to a position in the vacuum chamber; an ellipsometer having a source of collimated light and a polarizer for producing a polarized light beam, and a photodetector for producing an output signal in response to receiving a reflected light beam; a scanner located with respect to said polarizer and said first window for receiving said polarized light beam and aiming an incident light beam through said first window and onto the thin film sample, said scanner moving said incident light beam to different locations on a surface of said thin film sample to direct the reflected light beam from the sample through said second window and onto said photodetector; and control means responsive to the output signal and connected to said scanner and said ellipsometer for providing control signals to cause said scanner to move the incident light beam to a location on a selected surface of the thin film sample producing a maximum intensity of the reflected light beam, operating said ellipsometer to determine ellipsometric parameters of the thin film sample, and determining the thin film characteristics of the thin film sample in response to the ellipsometric parameters and a stored angle of incidence determined with a different thin film sample.
Claim 3
Dependent Claim
36 words
The measuring station of claim 1 further comprising an aperture located relative to the photodetector and the selected surface of the thin film sample for limiting a quantity of the reflected light beam striking the photodetector.
Claim 4
Independent Claim
147 words
A method for aligning an ellipsometer with a predetermined surface of a thin film sample, the ellipsometer having a source of collimated light and a photodetector, the photodetector producing an output signal as a function of an intensity of a reflected light beam from the thin film sample, the method comprising: operating a scanner receiving the source of collimated light to direct an incident light beam to a set position relative to the predetermined surface of the thin film sample; operating the scanner to move the incident light beam in a predetermined scanning pattern; detecting a presence of the reflected light beam to locate the predetermined surface; and operating the scanner to move the incident light beam to a location on the predetermined surface of the thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the thin film sample.
Claim 5
Independent Claim
147 words
A method for aligning an ellipsometer with a predetermined surface of a thin film sample, the ellipsometer having a source of collimated light and a photodetector, the photodetector producing an output signal as a function of an intensity of a reflected light beam from the thin film sample, the method comprising: operating a scanner receiving the source of collimated light to direct an incident light beam to a set position relative to the predetermined surface of the thin film sample; operating the scanner to move the incident light beam in a predetermined scanning pattern; detecting a presence of the reflected light beam to locate the predetermined surface; and operating the scanner to move the incident light beam to a location on the predetermined surface of the thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the thin film sample.
Claim 6
Dependent Claim
48 words
The method of claim 3 wherein the method further comprises the step of passing the reflected light beam through an aperture located between the thin film sample and the photodetector prior to the step of detecting the presence of the reflected light beam to locate the predetermined surface.
Claim 7
Dependent Claim
53 words
The method of claim 3 wherein the set position being chosen such that moving the incident light beam in the predetermined pattern will result in the reflected light beam from the predetermined surface being detected by the photodetector prior to a second reflected light beam from another surface of the thin film sample.
Claim 8
Dependent Claim
198 words
The method of claim 3 wherein the step of operating the scanner to move the incident light beam to a location on the predetermined surface of the thin film sample further comprises the steps of: operating the scanner to move the incident light beam to different locations in a first direction; sampling the output signal to measure the intensity of the reflected light beam with the photodetector at each of said different locations in said first direction; stopping the operation of the scanner in response to the incident light beam being at a location in the first direction producing a maximum intensity of the reflected light beam from the predetermined surface of the thin film sample; operating the scanner to move the incident light beam to different locations in a second direction; sampling the output signal to measure the intensity of the reflected light beam with the photodetector at each of said different locations in said second direction; and stopping the operation of the scanner in response to the incident light beam being at a location in the second direction producing a maximum intensity of the reflected light beam from the predetermined surface of the thin film sample.
Claim 9
Independent Claim
352 words
A method for aligning an ellipsometer with a selected surface of a thin film sample, the ellipsometer directing an incident light beam toward the thin film sample, and the ellipsometer including a photodetector producing an output signal as a function of an intensity of a reflected light beam from the thin film sample striking the photodetector, the method comprising the steps of: a) moving the incident light beam with a scanner to a set position relative to the thin film sample as a function of the selected surface; b) moving the incident light beam with the scanner a step in a first direction; c) monitoring the photodetector to detect a presence of the output signal; d) iterating steps and c)in response to not detecting the presence of the output signal; e) moving the incident light beam with the scanner a step in a second direction substantially perpendicular to the first direction in response to moving the incident light beam a predetermined number of steps in the first direction without detecting the presence of the output signal; f) moving the incident light beam with the scanner a step in a direction opposite the first direction; g) monitoring the photodetector to detect the presence of the output signal; h) iterating steps f) and g) in response to not detecting the presence of the output signal; i) moving the incident light beam with the scanner a step in the second direction substantially perpendicular to the first direction in response to moving the incident light beam a predetermined number of steps in the direction opposite the first direction without detecting the presence of the output signal; j) iterating steps b) through i) in response to not detecting the presence of the output signal; k) stopping motion of the incident light beam with the scanner in response to detecting the presence of the output signal in steps c) and g); and l) stopping motion of the incident light beam with the scanner in response to moving the incident light beam a predetermined number of steps in the second direction without detecting the presence of the output signal.
Claim 10
Independent Claim
352 words
A method for aligning an ellipsometer with a selected surface of a thin film sample, the ellipsometer directing an incident light beam toward the thin film sample, and the ellipsometer including a photodetector producing an output signal as a function of an intensity of a reflected light beam from the thin film sample striking the photodetector, the method comprising the steps of: a) moving the incident light beam with a scanner to a set position relative to the thin film sample as a function of the selected surface; b) moving the incident light beam with the scanner a step in a first direction; c) monitoring the photodetector to detect a presence of the output signal; d) iterating steps and c)in response to not detecting the presence of the output signal; e) moving the incident light beam with the scanner a step in a second direction substantially perpendicular to the first direction in response to moving the incident light beam a predetermined number of steps in the first direction without detecting the presence of the output signal; f) moving the incident light beam with the scanner a step in a direction opposite the first direction; g) monitoring the photodetector to detect the presence of the output signal; h) iterating steps f) and g) in response to not detecting the presence of the output signal; i) moving the incident light beam with the scanner a step in the second direction substantially perpendicular to the first direction in response to moving the incident light beam a predetermined number of steps in the direction opposite the first direction without detecting the presence of the output signal; j) iterating steps b) through i) in response to not detecting the presence of the output signal; k) stopping motion of the incident light beam with the scanner in response to detecting the presence of the output signal in steps c) and g); and l) stopping motion of the incident light beam with the scanner in response to moving the incident light beam a predetermined number of steps in the second direction without detecting the presence of the output signal.
Claim 11
Dependent Claim
173 words
The method of claim 7 wherein the method further comprises the steps of: a) moving the incident light beam with the scanner a predetermined distance in a direction opposite the first direction; b) moving the incident light beam a step in the first direction; c) detecting a current magnitude of the output signal from the photodetector in response to moving the incident light beam the step in the first direction; d) stopping motion of the incident light beam in the first direction in response to detecting a maximum magnitude of the output signal; e) moving the incident light beam with the scanner a predetermined distance in a direction opposite the second direction; f) moving the incident light beam a step in the second direction; g) detecting a current magnitude of the output signal from the photodetector in response to moving the incident light beam the step in the second direction; h) stopping motion of the incident light beam in the second direction in response to detecting a maximum magnitude of the output signal.
Claim 12
Dependent Claim
83 words
The method of claim 8 wherein the steps of stopping motion of the incident light in response to detecting a maximum intensity of the reflected light beam further comprise the steps of: a) detecting whether the current magnitude is greater than or equal to a prior magnitude of the output signal; b) stopping motion of the incident light beam in response to the detected current magnitude not being greater than or equal to the prior magnitude of the output signal from the photodetector.
Claim 13
Dependent Claim
66 words
The method of claim 9 wherein the step of stopping motion of the incident light beam in response to detecting a maximum intensity of the reflected light beam further comprises the step of moving the incident light a predetermined increment in an opposite direction from a direction being moved when the current magnitude is detected not to be greater than or equal to the prior magnitude.
Claim 14
Dependent Claim
30 words
The method of claim 7 wherein the method further comprises the step of passing the reflected light beam through an aperture located between the thin film sample and the photodetector.
Claim 15
Independent Claim
258 words
A method for determining an angle of incidence of an incident light beam from an ellipsometer by analyzing a reflected light beam produced by a reflection of the incident light beam from surface of a thin film sample onto a photodetector, the method comprising the steps of: positioning a first test thin film sample having a known film thickness and a known index of refraction with respect to the ellipsometer so that the incident light beam is directed on the test thin film sample; operating the ellipsometer to determine experimental values of ellipsometric parameters based on reflected light from the first test thin film sample; storing the experimental values of the ellipsometric parameters; and determining a first angle of incidence of the incident light beam on the first test thin film sample by a) selecting an assumed angle of incidence, b) determining calculated values of the ellipsometric parameters in response to the assumed angle of incidence, the known thin film thickness and the known index of refraction of the first test thin film sample, c) comparing the calculated values of the ellipsometric parameters for the assumed angle of incidence to the experimental values of the ellipsometric parameters to produce a difference value, d) iterating steps a), b) and c) for different values of the assumed angle of incidence to produce a plurality of difference values, e) detecting a minimum difference value, f) selecting an assumed angle of incidence associated with the minimum difference value as the first angle of incidence, and g) storing the first angle of incidence.
Claim 16
Independent Claim
258 words
A method for determining an angle of incidence of an incident light beam from an ellipsometer by analyzing a reflected light beam produced by a reflection of the incident light beam from surface of a thin film sample onto a photodetector, the method comprising the steps of: positioning a first test thin film sample having a known film thickness and a known index of refraction with respect to the ellipsometer so that the incident light beam is directed on the test thin film sample; operating the ellipsometer to determine experimental values of ellipsometric parameters based on reflected light from the first test thin film sample; storing the experimental values of the ellipsometric parameters; and determining a first angle of incidence of the incident light beam on the first test thin film sample by a) selecting an assumed angle of incidence, b) determining calculated values of the ellipsometric parameters in response to the assumed angle of incidence, the known thin film thickness and the known index of refraction of the first test thin film sample, c) comparing the calculated values of the ellipsometric parameters for the assumed angle of incidence to the experimental values of the ellipsometric parameters to produce a difference value, d) iterating steps a), b) and c) for different values of the assumed angle of incidence to produce a plurality of difference values, e) detecting a minimum difference value, f) selecting an assumed angle of incidence associated with the minimum difference value as the first angle of incidence, and g) storing the first angle of incidence.
Claim 17
Dependent Claim
142 words
The method of claim 12 wherein the method further comprises the steps of: a) positioning a second test thin film sample having a second known film thickness and a second known index of refraction with respect to the ellipsometer so that the incident light beam is directed on the second test thin film sample; b) operating the ellipsometer to determine second experimental values of the ellipsometric parameters based on reflected light from the second test thin film sample; c) storing the second experimental values of the ellipsometric parameters d) determining a second angle of incidence of the incident light beam on the second test thin film sample in response to the second experimental values of the ellipsometric parameters; and e) producing a final angle of incidence by taking an average of the first angle of incidence and the second angle of incidence.
Claim 18
Dependent Claim
24 words
The method of claim 13 wherein the method further comprises the step of iterating steps a) through d) for other test thin film samples.
Claim 19
Independent Claim
271 words
A method for determining an angle of incidence of an incident light beam from an ellipsometer by analyzing a reflected light beam produced by a reflection of the incident light beam from a surface of a thin film sample onto a photodetector, the method comprising the steps of: positioning a first test thin film sample having a known film thickness and a known index of refraction with respect to the ellipsometer so that the incident light beam is directed on the first test thin film sample; operating the ellipsometer to determine experimental values of ellipsometric parameters based on reflected light from the first test thin film sample; storing the experimental values of the ellipsometric parameters; and determining a first angle of incidence of the incident light beam on the first test thin film sample by a) selecting an assumed angle of incidence, b) determining calculated values of the ellipsometric parameters in response to the assumed angle of incidence, the known thin film thickness and the known index of refraction of the first test thin film sample, c) producing a difference value in accordance with the following ##EQU2## where Ψ exp and Δ exp are the experimental values of the ellipsometric parameters, and Ψ calc and Δ calc are the calculated values of the ellipsometric parameters, d) iterating steps a), b) and c) for different values of the assumed angle of incidence to produce a plurality of difference values, e) detecting a minimum difference value, f) selecting an assumed angle of incidence associated with the minimum difference value as the first angle of incidence, and g) storing the first angle of incidence.
Claim 20
Independent Claim
271 words
A method for determining an angle of incidence of an incident light beam from an ellipsometer by analyzing a reflected light beam produced by a reflection of the incident light beam from a surface of a thin film sample onto a photodetector, the method comprising the steps of: positioning a first test thin film sample having a known film thickness and a known index of refraction with respect to the ellipsometer so that the incident light beam is directed on the first test thin film sample; operating the ellipsometer to determine experimental values of ellipsometric parameters based on reflected light from the first test thin film sample; storing the experimental values of the ellipsometric parameters; and determining a first angle of incidence of the incident light beam on the first test thin film sample by a) selecting an assumed angle of incidence, b) determining calculated values of the ellipsometric parameters in response to the assumed angle of incidence, the known thin film thickness and the known index of refraction of the first test thin film sample, c) producing a difference value in accordance with the following ##EQU2## where Ψ exp and Δ exp are the experimental values of the ellipsometric parameters, and Ψ calc and Δ calc are the calculated values of the ellipsometric parameters, d) iterating steps a), b) and c) for different values of the assumed angle of incidence to produce a plurality of difference values, e) detecting a minimum difference value, f) selecting an assumed angle of incidence associated with the minimum difference value as the first angle of incidence, and g) storing the first angle of incidence.
Claim 21
Independent Claim
285 words
A method of determining an angle of incidence of an incident light beam from an ellipsometer by analyzing a reflected light beam produced by a reflection of the incident light beam from a surface of a thin film sample onto a photodetector, the thin film sample being located on a pallet being moved from station to station on a production line, the method comprising the steps of: moving a first test thin film sample to a predetermined location in a vacuum chamber, the first test thin film sample having first known thin film characteristics; operating a scanner receiving polarized light from the ellipsometer to aim the incident light beam through a window in the vacuum chamber onto a predetermined surface of the first test thin film sample and to move the incident light beam in a predetermined pattern to different locations on the predetermined surface of the first test thin film sample; measuring the intensity of a reflected light beam at the different locations on the predetermined surface of the first test thin film sample; stopping the operation of the scanner in response to moving the incident light beam to a location on the predetermined surface of the first test thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the first test thin film sample; operating the ellipsometer to determine ellipsometric parameters for the first test thin film sample; and determining a first angle of incidence of the incident light beam on the predetermined surface of the first test thin film sample using the ellipsometric parameters for the first test thin film sample and the first known thin film characteristics of the first test thin film sample.
Claim 22
Independent Claim
285 words
A method of determining an angle of incidence of an incident light beam from an ellipsometer by analyzing a reflected light beam produced by a reflection of the incident light beam from a surface of a thin film sample onto a photodetector, the thin film sample being located on a pallet being moved from station to station on a production line, the method comprising the steps of: moving a first test thin film sample to a predetermined location in a vacuum chamber, the first test thin film sample having first known thin film characteristics; operating a scanner receiving polarized light from the ellipsometer to aim the incident light beam through a window in the vacuum chamber onto a predetermined surface of the first test thin film sample and to move the incident light beam in a predetermined pattern to different locations on the predetermined surface of the first test thin film sample; measuring the intensity of a reflected light beam at the different locations on the predetermined surface of the first test thin film sample; stopping the operation of the scanner in response to moving the incident light beam to a location on the predetermined surface of the first test thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the first test thin film sample; operating the ellipsometer to determine ellipsometric parameters for the first test thin film sample; and determining a first angle of incidence of the incident light beam on the predetermined surface of the first test thin film sample using the ellipsometric parameters for the first test thin film sample and the first known thin film characteristics of the first test thin film sample.
Claim 23
Dependent Claim
242 words
The method of claim 16 wherein the method further comprises the steps of: moving a second test thin film sample to the predetermined location in the vacuum chamber, the second test thin film sample having second known thin film characteristics; operating the scanner to aim the incident light beam through the window in the vacuum chamber onto a predetermined surface of the second test thin film sample and to move the incident light beam in the predetermined pattern to different locations on the predetermined surface of the second test thin film sample; measuring the intensity of the reflected light beam at the different locations on the predetermined surface of the second test thin film sample; stopping the operation of the scanner in response to moving the incident light beam to a location on the predetermined surface of the second test thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the second test thin film sample; operating the ellipsometer to determine ellipsometric parameters for the second test thin film sample; determining a second angle of incidence of the incident light beam on the predetermined surface of the second test thin film sample using the ellipsometric parameters for the second test thin film sample and the second known thin film characteristics of the second test thin film sample; and determining a final angle of incidence in response to the first and the second angles of incidence.
Claim 24
Dependent Claim
23 words
The method of claim 17 wherein the final angle of incidence is determined by averaging the first and the second angles of incidence.
Claim 25
Dependent Claim
58 words
The method of claim 18 wherein the method of determining an angle of incidence further comprises iterating the steps of claim 20 a predetermined number of times for a predetermined number of further test thin film samples and determining a final angle of incidence by averaging angles of incidence determined for each of the test thin film samples.
Claim 26
Dependent Claim
24 words
The method of claim 19 wherein the known thin film characteristics are index of refraction and film thickness of the test thin film samples.
Claim 27
Independent Claim
257 words
A method Of measuring thin film characteristics of a thin film sample located on a pallet being moved from station to station on a production line comprising the steps of: moving a test thin film sample having known thin film characteristics to a predetermined location in a vacuum chamber; determining an angle of incidence of an incident light beam from an ellipsometer on a predetermined surface of the test thin film sample as a function of the known thin film characteristics of the test thin film sample; storing the angle of incidence of the incident light beam on the predetermined surface of the test thin film sample; moving a production thin film sample to the predetermined location in the vacuum chamber; operating a scanner to move the incident light beam in a predetermined pattern to different locations on a predetermined surface of the first production thin film sample; measuring the intensity of a reflected light beam at the different locations on the predetermined surface of the production thin film sample; stopping the operation of the scanner in response to moving the incident light beam to a location on the predetermined surface of the production thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the production thin film sample; operating the ellipsometer to determine ellipsometric parameters for the production thin film sample; and determining the thin film characteristics of the production thin film sample using the ellipsometric parameters for the production thin film sample and the stored angle of incidence.
Claim 28
Independent Claim
257 words
A method Of measuring thin film characteristics of a thin film sample located on a pallet being moved from station to station on a production line comprising the steps of: moving a test thin film sample having known thin film characteristics to a predetermined location in a vacuum chamber; determining an angle of incidence of an incident light beam from an ellipsometer on a predetermined surface of the test thin film sample as a function of the known thin film characteristics of the test thin film sample; storing the angle of incidence of the incident light beam on the predetermined surface of the test thin film sample; moving a production thin film sample to the predetermined location in the vacuum chamber; operating a scanner to move the incident light beam in a predetermined pattern to different locations on a predetermined surface of the first production thin film sample; measuring the intensity of a reflected light beam at the different locations on the predetermined surface of the production thin film sample; stopping the operation of the scanner in response to moving the incident light beam to a location on the predetermined surface of the production thin film sample producing a maximum intensity of the reflected light beam from the predetermined surface of the production thin film sample; operating the ellipsometer to determine ellipsometric parameters for the production thin film sample; and determining the thin film characteristics of the production thin film sample using the ellipsometric parameters for the production thin film sample and the stored angle of incidence.
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