US5402367A
Expired / Lapsed
US
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Apparatus and method for model based process control
Assignee: Texas Instruments Inc
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Filing: 1993-07-19
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Granted: 1995-03-28
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Expires: 2013-07-19
Abstract
Abstract The present invention configures a control strategy and a process model to calculate a setting of a machine. The present invention adjusts the process model in accordance with an analysis of the setting to control the machine.
Inventors
- 👤 Michael F. Sullivan
- 👤 Judith S. Hirsch
- 👤 Stephanie W. Butler
- 👤 Nicholas J. Tovell
- 👤 Jerry A. Stefani
- 👤 Purnendu K. Mozumder
- 👤 Ulrich H. Wild
- 👤 Chun-Jen J. Wang
- 👤 Robert A. Hartzell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/70516; G03F7/70525; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/4093; G05B19/40937; G05B19/418; G05B19/4188; G05B19/41885; G05B2219/00; G05B2219/30; G05B2219/50; G05B2219/50123; G05B2219/50129; Y; Y02; Y02P; Y02P90/00; Y02P90/02
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
96 words
An apparatus for controlling a factory, comprising: circuitry for configuring a plurality of process models; circuitry for configuring a plurality control strategies; circuitry for selecting a process model from said process models and for selecting a control strategy from said control strategies; circuitry for calculating settings for a machine from said selected process model and said selected control strategy; circuitry for performing a process in accordance with said settings; circuitry for analyzing said process to determine if said process is within predetermined limits; and circuitry for tuning said process selected model in accordance with said analysis.
Claim 2
Independent Claim
96 words
An apparatus for controlling a factory, comprising: circuitry for configuring a plurality of process models; circuitry for configuring a plurality control strategies; circuitry for selecting a process model from said process models and for selecting a control strategy from said control strategies; circuitry for calculating settings for a machine from said selected process model and said selected control strategy; circuitry for performing a process in accordance with said settings; circuitry for analyzing said process to determine if said process is within predetermined limits; and circuitry for tuning said process selected model in accordance with said analysis.
Claim 3
Dependent Claim
26 words
An apparatus for controlling a factory as in claim 1, wherein said circuitry for configuring said control strategies include circuitry for configuring measurements from said machine.
Claim 4
Dependent Claim
33 words
An apparatus for controlling a factory as in claim 1, wherein said circuitry for configuring said control strategies includes circuitry for configuring strategy outputs to define how to apply measurements to said process.
Claim 5
Dependent Claim
29 words
An apparatus for controlling a factory as in claim 1, wherein said circuitry for configuring said process models further comprises circuitry for defining a combination of predictions or observations.
Claim 6
Dependent Claim
31 words
An apparatus for controlling a factory as in claim 1, wherein said circuitry for configuring said process models further comprises circuitry for configuring a model tuner to tune said process model.
Claim 7
Dependent Claim
31 words
An apparatus for controlling a factory as in claim 1, wherein said circuit for configuring said process models further comprises circuitry for configuring an optimization strategy to solve said process model.
Claim 8
Dependent Claim
22 words
An apparatus for controlling a factory as in claim 2, wherein said circuit for configuring measurements comprises circuitry to obtain said measurements.
Claim 9
Dependent Claim
25 words
An apparatus for controlling a factory as in claim 3, wherein said circuitry for configuring strategy comprises circuitry for applying said measurements to said process.
Claim 10
Dependent Claim
31 words
An apparatus for controlling a factory as in claim 5, wherein said circuit for configuring a model tuner comprises circuitry for tuning said process model in accordance with said model tuner.
Claim 11
Independent Claim
89 words
A method for controlling a factory comprising the steps of: configuring a plurality of process models; configuring a plurality of control strategies; selecting a process model from said process models and selecting a control strategy from said control strategies; calculating settings for a machine from said selected process model and said selected control strategy; performing a process in accordance with the said settings; analyzing said process to determine if said process is within predetermined limits; and tuning said selected process model in accordance with result of said analyzing steps.
Claim 12
Independent Claim
89 words
A method for controlling a factory comprising the steps of: configuring a plurality of process models; configuring a plurality of control strategies; selecting a process model from said process models and selecting a control strategy from said control strategies; calculating settings for a machine from said selected process model and said selected control strategy; performing a process in accordance with the said settings; analyzing said process to determine if said process is within predetermined limits; and tuning said selected process model in accordance with result of said analyzing steps.
Claim 13
Dependent Claim
28 words
An apparatus for controlling a factory as in claim 10, wherein the step of configuring the control strategies further includes the step of configuring measurements from the machine.
Claim 14
Dependent Claim
34 words
The method for controlling a factory as in claim 10, wherein the step of configuring the control strategies includes the step of configuring strategy outputs to define how to apply measurements to said process.
Claim 15
Dependent Claim
30 words
A method for controlling a factory as in claim 10, wherein the step of configuring the control strategies includes the method step of defining a combination of predictions or observations.
Claim 16
Dependent Claim
31 words
A method for controlling a factory as in claim 10, wherein the step of configuring the control strategies includes the method step of configuring a model tuner to tune said process.
Claim 17
Dependent Claim
31 words
A method for controlling a factory as in claim 10, wherein the step of configuring the control strategies includes the step of configuring an optimization strategy to solve said process model.
Claim 18
Dependent Claim
25 words
A method for controlling a factory as in claim 11, wherein the step of configuring measurements includes the step of obtaining said measurements from machine.
Claim 19
Dependent Claim
28 words
A method for controlling a factory as in claim 12, wherein the step of configuring the strategy outputs includes the step of applying said measurements to said process.
Claim 20
Dependent Claim
32 words
A method for controlling a factory as in claim 14, wherein the step of configuring the model tuner includes the step of tuning the process model in accordance with said model tuner.
Claim 21
Independent Claim
116 words
An apparatus for controlling a factory, comprising: circuitry for configuring a plurality of process models for different machines; circuitry for configuring a plurality of different control strategies for different machines; circuitry for selecting a process model for one machine of said different machines from said process models and for selecting a particular control strategy for said one machine from said control strategies; circuitry for calculating settings for said one machine from the said process model and said control strategy; circuitry for performing a process in accordance with said settings; circuitry for analyzing said process to determine if said process is within said predetermined limits; and circuitry for tuning said process model in accordance with said analysis.
Claim 22
Independent Claim
116 words
An apparatus for controlling a factory, comprising: circuitry for configuring a plurality of process models for different machines; circuitry for configuring a plurality of different control strategies for different machines; circuitry for selecting a process model for one machine of said different machines from said process models and for selecting a particular control strategy for said one machine from said control strategies; circuitry for calculating settings for said one machine from the said process model and said control strategy; circuitry for performing a process in accordance with said settings; circuitry for analyzing said process to determine if said process is within said predetermined limits; and circuitry for tuning said process model in accordance with said analysis.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-03-27 | 1998-09-26 | 1999-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-27 | 2002-09-26 | 2003-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-27 | 2006-09-26 | 2007-03-28 | $7700.00 | Window Closed / Lapsed |