US5399448A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reflection mask for X ray
Assignee: Nikon Corp
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Filing: 1992-09-30
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Granted: 1995-03-21
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Expires: 2012-09-30
Abstract
Abstract In reflection mask for X ray having a predetermined pattern formed by reflecting portions comprising multilayer film and a non-reflecting portion, the reflecting portions are designed for generating a phase difference between reflected lights from opposite sides of the non-reflecting portion.
Inventors
- 👤 Hiroshi Nagata
- 👤 Katsuhiko Murakami
- 👤 Hiroshi Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:52
CPC Classifications
B; B82; B82Y; B82Y10/00; G; G03; G03F; G03F1/00; G03F1/22; G03F1/24; B82Y40/00
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
98 words
A reflection mask for X-ray, comprising: a substrate; an X-ray reflective multilayer film laminate disposed on said substrate and forming reflection portions of a predetermined pattern of reflection and non-reflection portions; an X-ray non-reflective film formed on said laminate in accordance with said predetermined pattern so as to form said non-reflection portions; and phase shifting means provided at one of two neighboring reflection portions at opposite sides of a non-reflection portion for generating a predetermined phase difference between reflected X-ray illumination from said one reflection portion and reflected X-ray illumination from the other of said two reflection portions.
Claim 2
Dependent Claim
98 words
A reflection mask for X-ray, comprising: a substrate; an X-ray reflective multilayer film laminate disposed on said substrate and forming reflection portions of a predetermined pattern of reflection and non-reflection portions; an X-ray non-reflective film formed on said laminate in accordance with said predetermined pattern so as to form said non-reflection portions; and phase shifting means provided at one of two neighboring reflection portions at opposite sides of a non-reflection portion for generating a predetermined phase difference between reflected X-ray illumination from said one reflection portion and reflected X-ray illumination from the other of said two reflection portions.
Claim 3
Dependent Claim
35 words
A reflection mask for X-ray according to claim 1, wherein said phase shifting means provides a height difference between said one reflection portion and said other reflection portion relative to a surface of said substrate.
Claim 4
Dependent Claim
30 words
A reflection mask for X-ray according to claim 2, wherein the relation h=λ/4 is satisfied, where h is said height difference and λ is the wavelength of the X-ray illumination.
Claim 5
Dependent Claim
40 words
A reflection mask for X-ray according to claim 2, wherein the relation h=λ/(4 cosα) is satisfied, where h is said height difference, λ is the wavelength of the X-ray illumination, and α is the incident angle of the X-ray illumination.
Claim 6
Dependent Claim
30 words
A reflection mask for X-ray according to claim 2, wherein the relation h=λ/8 is satisfied, where h is said height difference and λ is the wavelength of the X-ray illumination.
Claim 7
Dependent Claim
29 words
A reflection mask for X-ray according to claim 2, wherein said laminate has the same number of layers at said one reflection portion as at said other reflection portion.
Claim 8
Dependent Claim
37 words
A reflection mask for X-ray according to claim 1, wherein said phase shifting means is provided by a difference of film thickness of said laminate at said one reflection portion as compared with said other reflection portion.
Claim 9
Dependent Claim
58 words
A reflection mask for X-ray according to claim 7, wherein successive layers of said laminate are made of different materials, and the relation D1=d/2 is satisfied, where D1 and d are, respectively, said difference of film thickness and the thickness of a set of successive layers of number equal to the number of layer materials of said laminate.
Claim 10
Dependent Claim
27 words
A reflection mask for X-ray according to claim 1, wherein said phase shifting means comprises a transformed outermost layer of said laminate at said one reflection portion.
Claim 11
Dependent Claim
70 words
A reflection mask for X-ray according to claim 9, wherein successive layers of said laminate are made of different materials, and the thickness of said transformed layer provides a thickness difference d/2 of said laminate at said one reflection portion as compared with said other reflection portion, where d is the thickness of a set of successive layers of number equal to the number of layer materials of said laminate.
Claim 12
Dependent Claim
20 words
A reflection mask for X-ray according to claim 1, wherein said laminate comprises alternately laminated layers of molybdenum and silicon.
Claim 13
Dependent Claim
20 words
A reflection mask for X-ray according to claim 1, wherein said laminate comprises alternately laminated layers of tungsten and carbon.
Claim 14
Dependent Claim
25 words
A reflection mask for X-ray according to claim 1, wherein said multilayer film laminate reflects X-rays having wavelengths in about the range of 2-100 nm.
Claim 15
Dependent Claim
103 words
A reflection mask for X-ray, comprising: an X-ray non-reflective substrate forming non-reflection portions of a predetermined pattern of reflection portions and non-reflection portions; an X-ray reflective multilayer film laminate which is formed on said substrate in accordance with said predetermined pattern so as to form said reflection portions; and phase shifting means providing a height difference, relative to a surface of said substrate, between two reflection portions at opposite sides of a non-reflection portion for generating a predetermined phase difference between reflected X-ray illumination from one of said two reflection portions and reflected X-ray illumination from the other of said two reflection portions.
Claim 16
Dependent Claim
103 words
A reflection mask for X-ray, comprising: an X-ray non-reflective substrate forming non-reflection portions of a predetermined pattern of reflection portions and non-reflection portions; an X-ray reflective multilayer film laminate which is formed on said substrate in accordance with said predetermined pattern so as to form said reflection portions; and phase shifting means providing a height difference, relative to a surface of said substrate, between two reflection portions at opposite sides of a non-reflection portion for generating a predetermined phase difference between reflected X-ray illumination from one of said two reflection portions and reflected X-ray illumination from the other of said two reflection portions.
Claim 17
Dependent Claim
20 words
A reflection mask for X-ray according to claim 14, wherein said laminate comprises alternately laminated layers of molybdenum and silicon.
Claim 18
Dependent Claim
20 words
A reflection mask for X-ray according to claim 14, wherein said laminate comprises alternately laminated layers of tungsten and carbon.
Claim 19
Dependent Claim
30 words
A reflection mask for X-ray according to claim 15, wherein the relation h=λ/4 is satisfied, where h is said height difference and λ is the wavelength of the X-ray illumination.
Claim 20
Dependent Claim
40 words
A reflection mask for X-ray according to claim 15, wherein the relation h=λ/(4 cosα) is satisfied, where h is said height difference, λ is the wavelength of the X-ray illumination, and α is the incident angle of the X-ray illumination.
Claim 21
Dependent Claim
30 words
A reflection mask for X-ray according to claim 15, wherein the relation h=λ/8 is satisfied, where h is said height difference and λ is the wavelength of the X-ray illumination.
Claim 22
Dependent Claim
25 words
A reflection mask for X-ray according to claim 14, wherein said multilayer film laminate reflects X-rays having wavelengths in about the range of 2-100 nm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-20 | 1998-09-19 | 1999-03-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-20 | 2002-09-19 | 2003-03-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-20 | 2006-09-19 | 2007-03-21 | $7700.00 | Window Closed / Lapsed |