US5396797A
Expired / Lapsed
US
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Triaxial angular rate and acceleration sensor
Assignee: Honeywell International Inc
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Filing: 1992-12-08
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Granted: 1995-03-14
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Expires: 2012-12-08
Abstract
Abstract A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes. Similarly, the sensing axes of the accelerometers of the second substrate are canted at an angle with respect to the plane of the second substrate away from the central portion thereof so that they lie along same three but oppositely directed axes. The sensing axes of the first and second substrates are aligned to prevent angular acceleration sensitivity.
Inventors
- 👤 II Rand H. Hulsing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:53
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/18; F; F02; F02G; F02G1/00; F02G1/04; F02G1/043; F02G1/044; F02G1/0445; F16; F16L; F16L37/00; F16L37/24; G01C; G01C19/00; G01C19/56; G01C19/5719; G01P15/02; G01P15/08; G01P15/0802; G01P15/097; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
310 words
A sensor structure adapted for use in a triaxial angular rate and acceleration sensor comprising: a first sensor stack including a first generally planar substrate, a first mass plate disposed over a first surface of said first substrate, a first damping plate disposed over a second surface of said first substrate, said second surface being opposite and generally parallel to said first surface, a second damping plate disposed over said mass plate, said first substrate having a first set of coplanar accelerometers formed therein, each accelerometer of said first set of accelerometers having a sensing axis canted at an angle with respect to the plane of said first substrate, said first set of accelerometers being arranged in the plane of said first substrate to place said sensing axes of said first set of accelerometers skewed to one another; a second sensor stack including a second generally planar substrate, a second mass plate disposed over a first surface of said second substrate, a third damping plate disposed over a second surface of said second substrate, said second surface being generally parallel to said first surface, a fourth damping plate disposed over said mass plate, said second substrate including a second set of coplanar accelerometers formed therein, each of said second set of accelerometers having a sensing axis canted at an angle with respect to the plane of said second substrate, said second set of accelerometers being arranged in the plane of said second substrate to place said sensing axes of said second set of accelerometers skewed to one another, each of said second set of accelerometers being paired with a corresponding accelerometer of said first set of accelerometers, corresponding accelerometer pairs having sensing axes that are parallel or anti-parallel; means for linking said first and second stacks so that said first and second sets of accelerometers dither at the same frequency.
Claim 2
Dependent Claim
310 words
A sensor structure adapted for use in a triaxial angular rate and acceleration sensor comprising: a first sensor stack including a first generally planar substrate, a first mass plate disposed over a first surface of said first substrate, a first damping plate disposed over a second surface of said first substrate, said second surface being opposite and generally parallel to said first surface, a second damping plate disposed over said mass plate, said first substrate having a first set of coplanar accelerometers formed therein, each accelerometer of said first set of accelerometers having a sensing axis canted at an angle with respect to the plane of said first substrate, said first set of accelerometers being arranged in the plane of said first substrate to place said sensing axes of said first set of accelerometers skewed to one another; a second sensor stack including a second generally planar substrate, a second mass plate disposed over a first surface of said second substrate, a third damping plate disposed over a second surface of said second substrate, said second surface being generally parallel to said first surface, a fourth damping plate disposed over said mass plate, said second substrate including a second set of coplanar accelerometers formed therein, each of said second set of accelerometers having a sensing axis canted at an angle with respect to the plane of said second substrate, said second set of accelerometers being arranged in the plane of said second substrate to place said sensing axes of said second set of accelerometers skewed to one another, each of said second set of accelerometers being paired with a corresponding accelerometer of said first set of accelerometers, corresponding accelerometer pairs having sensing axes that are parallel or anti-parallel; means for linking said first and second stacks so that said first and second sets of accelerometers dither at the same frequency.
Claim 3
Dependent Claim
20 words
A sensor structure as claimed in claim 1 wherein the sensing axes of said corresponding pairs of accelerometers are aligned.
Claim 4
Dependent Claim
48 words
A sensor structure as claimed in claim 1 wherein said first sensor stack comprises: a hub portion; a main frame portion; a plurality of flexures connecting said hub portion to said main frame portion to allow said main frame portion to dither with respect to said hub portion.
Claim 5
Dependent Claim
68 words
A sensor structure as claimed in claim 3 wherein said second sensor stack comprises: a further hub portion connected in fixed alignment with said hub portion of said first sensor stack; a further main frame portion; a further plurality of flexures connecting said further hub portion to said further main frame portion to allow said further main frame portion to dither with respect to said further hub portion.
Claim 6
Dependent Claim
24 words
A sensor structure as claimed in claim 4 wherein said means for linking comprises a stack link interconnecting said first and second sensor stacks.
Claim 7
Dependent Claim
55 words
A sensor structure as claimed in claim 5 wherein said stack link provides means for translating dither motion imposed on said main frame portion of said first sensor stack in a first direction into a dither motion on said main frame portion of said second sensor stack in a second direction opposite said first direction.
Claim 8
Dependent Claim
543 words
A sensor structure adapted for use in a triaxial angular rate and acceleration sensor comprising: a first sensor stack including a first generally planar substrate, a first mass plate disposed over a first surface of said first substrate, a first damping plate disposed over a second surface of said first substrate, said second surface being opposite and generally parallel to said first surface, a second damping plate disposed over said mass plate, a hub portion, a main frame portion, a plurality of flexures connecting said hub portion to said main frame portion to allow said main frame portion to dither with respect to said hub portion, said first substrate having a first set of coplanar accelerometers formed therein, each accelerometer of said first set of accelerometers having a sensing axis canted at an angle with respect to the plane of said first substrate, said first set of accelerometers being arranged in the plane of said first substrate to place said sensing axes of said first set of accelerometers skewed to one another; a second sensor stack including a second generally planar substrate, a second mass plate disposed over a first surface of said second substrate, a third damping plate disposed over a second surface of said second substrate, said second surface being generally parallel to said first surface, a fourth damping plate disposed over said mass plate, a further hub portion connected in fixed alignment with said hub portion of said first sensor stack, a further main frame portion, a further plurality of flexures connecting said further hub portion to said further main frame portion to allow said further main frame portion to dither with respect to said further hub portion, said second substrate including a second set of coplanar accelerometers formed therein, each of said second set of accelerometers having a sensing axis canted at an angle with respect to the plane of said second substrate, said second set of accelerometers being arranged in the plane of said second substrate to place said sensing axes of said second set of accelerometers skewed to one another, each of said second set of accelerometers being paired with a corresponding accelerometer of said first set of accelerometers, corresponding accelerometer pairs having sensing axes that are parallel or anti-parallel; means for linking said first and second stacks so that said first and second sets of accelerometers dither at the same frequency, said means for linking including a stack link interconnecting said first and second sensor stacks, said stack link provides means for translating dither motion imposed on said main frame portion of said first sensor stack in a first direction into a dither motion on said main frame portion of said second sensor stack in a second direction opposite said first direction; said stack link including a first stepped member, a second stepped member directed opposite said first stepped member, a back to back, S-bending flexure unit connecting said first and second stepped members, first means for connecting said first stepped member to said main frame portion of said first sensor stack, second means for connecting said second stepped member to said further main frame portion of said second sensor stack, third means for connecting said first and second stepped members to said further hub portion.
Claim 9
Dependent Claim
543 words
A sensor structure adapted for use in a triaxial angular rate and acceleration sensor comprising: a first sensor stack including a first generally planar substrate, a first mass plate disposed over a first surface of said first substrate, a first damping plate disposed over a second surface of said first substrate, said second surface being opposite and generally parallel to said first surface, a second damping plate disposed over said mass plate, a hub portion, a main frame portion, a plurality of flexures connecting said hub portion to said main frame portion to allow said main frame portion to dither with respect to said hub portion, said first substrate having a first set of coplanar accelerometers formed therein, each accelerometer of said first set of accelerometers having a sensing axis canted at an angle with respect to the plane of said first substrate, said first set of accelerometers being arranged in the plane of said first substrate to place said sensing axes of said first set of accelerometers skewed to one another; a second sensor stack including a second generally planar substrate, a second mass plate disposed over a first surface of said second substrate, a third damping plate disposed over a second surface of said second substrate, said second surface being generally parallel to said first surface, a fourth damping plate disposed over said mass plate, a further hub portion connected in fixed alignment with said hub portion of said first sensor stack, a further main frame portion, a further plurality of flexures connecting said further hub portion to said further main frame portion to allow said further main frame portion to dither with respect to said further hub portion, said second substrate including a second set of coplanar accelerometers formed therein, each of said second set of accelerometers having a sensing axis canted at an angle with respect to the plane of said second substrate, said second set of accelerometers being arranged in the plane of said second substrate to place said sensing axes of said second set of accelerometers skewed to one another, each of said second set of accelerometers being paired with a corresponding accelerometer of said first set of accelerometers, corresponding accelerometer pairs having sensing axes that are parallel or anti-parallel; means for linking said first and second stacks so that said first and second sets of accelerometers dither at the same frequency, said means for linking including a stack link interconnecting said first and second sensor stacks, said stack link provides means for translating dither motion imposed on said main frame portion of said first sensor stack in a first direction into a dither motion on said main frame portion of said second sensor stack in a second direction opposite said first direction; said stack link including a first stepped member, a second stepped member directed opposite said first stepped member, a back to back, S-bending flexure unit connecting said first and second stepped members, first means for connecting said first stepped member to said main frame portion of said first sensor stack, second means for connecting said second stepped member to said further main frame portion of said second sensor stack, third means for connecting said first and second stepped members to said further hub portion.
Claim 10
Dependent Claim
20 words
A sensor structure as claimed in claim 7 wherein the sensing axes of said corresponding pairs of accelerometers are aligned.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-13 | 1998-09-12 | 1999-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-13 | 2002-09-12 | 2003-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-13 | 2006-09-12 | 2007-03-14 | $7700.00 | Window Closed / Lapsed |