US5384872A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical device and a method of manufacture thereof
Assignee: ZF International UK Ltd
•
Filing: 1993-01-27
•
Granted: 1995-01-24
•
Expires: 2013-01-27
Abstract
Abstract A block of monocrystalline silicon oriented so as to have a body surface aligned in a {110} crystallographic plane is selectively etched so as to define a groove for receiving an optical waveguide and a reflecting surface facing the groove. The groove is aligned with a <110> crystallographic axis. The reflecting surface is in a {100} crystallographic plane. Thus, the groove is parallel to the body surface and the reflecting surface is at 45° to the body surface.
Inventors
- 👤 Alan J. Jacobs-Cook
- 👤 Peter E. M. Frere
- 👤 Mark E. C. Bowen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 14:38
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G01; G01D; G01D5/00; G01D5/26; G01D5/268; G01L; G01L1/00; G01L1/18; G01L1/183; G01L1/186; G01L9/00; G01L9/0001; G01L9/0008; G01L9/0019; G01L9/002; G02B6/4202; G02B6/4203; G02B6/36; G02B6/3628; G02B6/3648; G02B6/3652; G02B6/3684; G02B6/3692
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
71 words
An optical device, comprising a body of monocrystalline silicon having a body surface aligned in a {110} crystallographic plane, groove surfaces defining a groove formed in said body surface for containing an optical waveguide, said groove having an end portion having a longitudinal axis substantially along a <110>crystallographic axis, and an optical reflector facing said end portion of said groove and having an optically reflective surface in a {100} crystallographic plane.
Claim 2
Dependent Claim
71 words
An optical device, comprising a body of monocrystalline silicon having a body surface aligned in a {110} crystallographic plane, groove surfaces defining a groove formed in said body surface for containing an optical waveguide, said groove having an end portion having a longitudinal axis substantially along a <110>crystallographic axis, and an optical reflector facing said end portion of said groove and having an optically reflective surface in a {100} crystallographic plane.
Claim 3
Dependent Claim
21 words
A device as claimed in claim 1, in which a portion of said groove has groove surfaces in {111} crystallographic planes.
Claim 4
Dependent Claim
19 words
A device as claimed in claim 1, in which a portion of said groove has a substantially rectangular cross-section.
Claim 5
Dependent Claim
27 words
A device as claimed in claim 1, in which said body defines and has formed therein a well having a side defined by said optically reflective surface.
Claim 6
Dependent Claim
21 words
A device as claimed in claim 1, further comprising a resonant bridge formed in said body adjacent said optically reflective surface.
Claim 7
Dependent Claim
46 words
A device as claimed in claim 2 in which an optical fibre is bonded into said groove and said body defines and has formed therein a well having a side defined by said optically reflective surface, said well being substantially evacuated and sealed by a cover.
Claim 8
Dependent Claim
21 words
A device as claimed in claim 6, further comprising a resonant bridge formed in said body adjacent said optically reflective surface.
Claim 9
Dependent Claim
19 words
A device as claimed in claim 1, further comprising an optical waveguide embedded with a portion of said groove.
Claim 10
Dependent Claim
50 words
A device as claimed in claim 5, further comprising an optical waveguide embedded within a portion of said groove, and in which said body defines and has formed therein a well having a side defined by said optically reflective surface, said well being substantially evacuated and sealed by a cover.
Claim 11
Independent Claim
77 words
A method of making an optical device, comprising: etching a body of monocrystalline silicon having a body surface aligned in a {110} crystallographic plane to form an optical reflector by revealing an optically reflective surface in a {100} crystallographic plane; and forming a groove in said body surface for containing an optical waveguide, said groove having an end portion having a longitudinal axis substantially aligned with a <110> crystallographic axis, said optical reflector facing said end portion.
Claim 12
Independent Claim
77 words
A method of making an optical device, comprising: etching a body of monocrystalline silicon having a body surface aligned in a {110} crystallographic plane to form an optical reflector by revealing an optically reflective surface in a {100} crystallographic plane; and forming a groove in said body surface for containing an optical waveguide, said groove having an end portion having a longitudinal axis substantially aligned with a <110> crystallographic axis, said optical reflector facing said end portion.
Claim 13
Dependent Claim
35 words
A method as claimed in claim 10, in which said optically reflective surface is formed by masking selected areas of said body surface with an etch resistant mask and anisotropically etching unmasked body surface areas.
Claim 14
Dependent Claim
46 words
A method as claimed in claim 10, in which at least a portion of said groove is formed by masking selected areas of said body surface with an etch resistant mask and anisotropically etching unmasked body surface areas to reveal groove surfaces in {111} crystallographic planes.
Claim 15
Dependent Claim
21 words
A method as claimed in claim 10, in which at least a portion of said groove is formed by plasma etching.
Claim 16
Dependent Claim
40 words
A method as claimed in claim 10, comprising doping a portion of said body surface with a dopant so as to provide a surface portion which is resistant to etching in order to provide a structure integral with said body.
Claim 17
Dependent Claim
13 words
A method as claimed in claim 14, in which said dopant is boron.
Claim 18
Dependent Claim
26 words
A method as claimed in claim 10, further comprising etching said body to form a well with one side being defined by said optically reflective surface.
References Cited (Backward Citations)
US4130343A
Cited
US4210923A
Cited
US4294510A
Cited
US4541159A
Cited
US4937808A
Cited
US4948219A
Cited
US4810557A
Cited
US5087124A
Cited
US5243673A
Cited
US5071213A
Cited
US5121457A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-23 | 1998-07-25 | 1999-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-23 | 2002-07-25 | 2003-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-23 | 2006-07-25 | 2007-01-24 | $7700.00 | Window Closed / Lapsed |