US5384285A
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Process for fabricating a silicide layer in a semiconductor device
Assignee: NXP USA Inc
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Filing: 1993-07-26
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Granted: 1995-01-24
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Expires: 2013-07-26
Abstract
Abstract A transition-metal silicide process includes the formation of a boron nitride capping layer overlying a transition-metal layer. In one embodiment, a transition-metal layer (30) is deposited onto a silicon surface (22), and onto a polysilicon gate electrode (12). A capping layer (32), which can be either boron nitride or boron oxynitride is deposited onto the transition-metal layer (30), and an annealing process is carried out to form a transition-metal/silicon alloy layer (34, 36, 38) at the silicon surface (22), and on the gate electrode (12). The capping layer (32) overlies the transition-metal layer (30) during the annealing process and prevents the formation of an oxide layer at the silicon surfaces (22, 12). After the annealing process is complete, the capping layer (13) is removed by a selective wet etch process, and a second annealing step is carried out to form a transition-metal silicide layer (40, 42, 44).
Inventors
- 👤 Arkalgud Sitaram
- 👤 Papu D. Maniar
- 👤 Jeffrey T. Wetzel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:57
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0212; Y; Y10; Y10S; Y10S148/00; Y10S148/113; Y10S148/145
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
86 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; providing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; and reacting components of the transition-metal layer with the silicon surface in an inert gas ambient to form a transition-metal silicide layer, wherein the capping layer is exposed to the ambient during formation of the silicide layer.
Claim 2
Dependent Claim
86 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; providing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; and reacting components of the transition-metal layer with the silicon surface in an inert gas ambient to form a transition-metal silicide layer, wherein the capping layer is exposed to the ambient during formation of the silicide layer.
Claim 3
Dependent Claim
83 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; providing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; subjecting the substrate to a first thermal annealing cycle to form a transition-metal/silicon alloy; removing the boron nitride layer; and subjecting the substrate to a second thermal annealing cycle to form the transition-metal silicide.
Claim 4
Dependent Claim
83 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; providing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; subjecting the substrate to a first thermal annealing cycle to form a transition-metal/silicon alloy; removing the boron nitride layer; and subjecting the substrate to a second thermal annealing cycle to form the transition-metal silicide.
Claim 5
Dependent Claim
64 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; depositing boron oxynitride by plasma enhanced chemical vapor deposition at a temperature of 200° to 500° C.; and reacting components of the transition-metal layer with the silicon surface to form a transition-metal silicide layer.
Claim 6
Dependent Claim
64 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; depositing boron oxynitride by plasma enhanced chemical vapor deposition at a temperature of 200° to 500° C.; and reacting components of the transition-metal layer with the silicon surface to form a transition-metal silicide layer.
Claim 7
Dependent Claim
32 words
The process of claim 1, wherein the step of providing a capping layer comprises depositing boron nitride by a process selected from the group consisting of chemical vapor deposition and sputter deposition.
Claim 8
Dependent Claim
25 words
The process of claim 1, wherein the step of providing a transition-metal comprises depositing a transition-metal selected from the group consisting of titanium and cobalt.
Claim 9
Dependent Claim
96 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; providing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; reacting components of the transition-metal layer with the silicon surface to form a transition-metal silicide layer; and removing the capping layer in a wet etch solution, the solution having components selected from the group consisting of sulfuric acid and hydrogen peroxide, or ammonium hydroxide and hydrogen peroxide.
Claim 10
Dependent Claim
96 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface; providing a transition-metal layer to overlie the silicon surface; providing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; reacting components of the transition-metal layer with the silicon surface to form a transition-metal silicide layer; and removing the capping layer in a wet etch solution, the solution having components selected from the group consisting of sulfuric acid and hydrogen peroxide, or ammonium hydroxide and hydrogen peroxide.
Claim 11
Dependent Claim
109 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface, a transition-metal layer overlying the silicon surface, and a capping layer selected from the group consisting of boron nitride and boron oxynitride overlying the transition-metal, wherein an interface resides between the transition-metal and the silicon surface; subjecting the substrate to a thermal process in a gas ambient, wherein a finite amount of oxygen is present; and forming a transition-metal silicide at the interface, wherein diffusion of oxygen to the interface is prevented, and wherein the capping layer is exposed to the ambient during formation of the silicide layer.
Claim 12
Dependent Claim
109 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface, a transition-metal layer overlying the silicon surface, and a capping layer selected from the group consisting of boron nitride and boron oxynitride overlying the transition-metal, wherein an interface resides between the transition-metal and the silicon surface; subjecting the substrate to a thermal process in a gas ambient, wherein a finite amount of oxygen is present; and forming a transition-metal silicide at the interface, wherein diffusion of oxygen to the interface is prevented, and wherein the capping layer is exposed to the ambient during formation of the silicide layer.
Claim 13
Dependent Claim
29 words
The process of claim 7, wherein the step of subjecting the substrate to a thermal process comprises thermal annealing in a nitrogen ambient at about 600° to 700° C.
Claim 14
Dependent Claim
25 words
The process of claim 7, wherein providing a transition-metal comprises chemical vapor deposition of a transition-metal selected from the group consisting of titanium and cobalt.
Claim 15
Dependent Claim
102 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface, a transition-metal layer overlying the silicon surface, and a capping layer selected from the group consisting of boron nitride and boron oxynitride overlying the transition-metal, wherein an interface resides between the transition-metal and the silicon surface; subjecting the substrate to a thermal process, wherein the thermal process comprises rapid thermal annealing in an inert ambient, and wherein a finite amount of oxygen is present; and forming a transition-metal silicide at the interface, wherein diffusion of oxygen to the interface is prevented.
Claim 16
Dependent Claim
102 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing substrate having a silicon surface, a transition-metal layer overlying the silicon surface, and a capping layer selected from the group consisting of boron nitride and boron oxynitride overlying the transition-metal, wherein an interface resides between the transition-metal and the silicon surface; subjecting the substrate to a thermal process, wherein the thermal process comprises rapid thermal annealing in an inert ambient, and wherein a finite amount of oxygen is present; and forming a transition-metal silicide at the interface, wherein diffusion of oxygen to the interface is prevented.
Claim 17
Dependent Claim
83 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing a substrate having a silicon surface; depositing a transition-metal layer to overlie the silicon surface; depositing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; annealing the substrate in an inert gas ambient to substantially convert the transition-metal to a transition-metal/silicon alloy; etching away the capping layer; and annealing the transition-metal/silicon alloy to form a transition-metal silicide layer.
Claim 18
Dependent Claim
83 words
A process for fabricating a silicide layer in a semiconductor device comprising the steps of: providing a substrate having a silicon surface; depositing a transition-metal layer to overlie the silicon surface; depositing a capping layer selected from the group consisting of boron nitride and boron oxynitride to overlie the transition-metal; annealing the substrate in an inert gas ambient to substantially convert the transition-metal to a transition-metal/silicon alloy; etching away the capping layer; and annealing the transition-metal/silicon alloy to form a transition-metal silicide layer.
Claim 19
Dependent Claim
27 words
The process of claim 11, wherein the step of etching away the capping layer comprises subjecting the substrate to a solution of sulfuric acid and hydrogen peroxide.
Claim 20
Dependent Claim
18 words
The process of claim 12, wherein the solution is maintained at a temperature of 85° to 110° C.
Claim 21
Dependent Claim
24 words
The process of claim 11, wherein the step of annealing to form a transition-metal silicide comprises rapid thermal annealing in an inert gas ambient.
References Cited (Backward Citations)
US4960732A
Cited
US4923822A
Cited
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