Apparatus and method for calibration of patterned wafer scanners

Claim 1

A calibration wafer for use in calibrating patterned wafer scanners which focus onto a wafer, detect defects in the wafer, and step across regions of the wafer, where the scanner is used to detect defects in wafers of semiconductor material during the semiconductor device fabrication process, the calibration wafer comprising: an unpatterned wafer having an interior region and a periphery region onto which has been deposited a layer of material, wherein such material is representative of a material which is deposited on a wafer during a step or steps performed during the fabrication process; a pattern of features formed on the material layer and limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to operate on the calibration wafer and to perform its stepping and focusing operations, and to detect known defects deposited on the calibration wafer with a desired degree of confidence; and a substantially uniform distribution of particles deposited onto the layer of material.

Claim 9

A method for calibrating a patterned wafer scanner which is used to detect defects in wafers of semiconductor material during the semiconductor device fabrication process, the method comprising: (a) preparing a calibration wafer for the purpose of calibrating the scanner, wherein the preparation of the calibration wafer comprises: depositing a layer of material onto an unpatterned wafer having an interior region and a periphery region, wherein such material is representative of a material which is deposited on a wafer during a step or steps performed during the fabrication process; forming a pattern of features on the material layer and limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to perform its stepping and focusing operations, and to detect known defects deposited on the calibration wafer with a desired degree of confidence; and depositing a substantially uniform distribution of particles onto the layer of material; (b) arranging the calibration wafer in the scanner, wherein the scanner has an adjustable sensitivity, and further wherein the sensitivity of the scanner is adjusted to be the maximum scanning sensitivity; (c) scanning the calibration wafer; (d) comparing the results of the scan of the calibration wafer to a prior scan of the calibration wafer, wherein if the results of the scan performed in (c) differ from the prior scan of the calibration wafer, the sensitivity of the scanner is adjusted; and (e) repeating, if necessary, steps (c) and (d) until the results of the latest scan are substantially the same as the prior scan.

Claim 10

A method for calibrating a patterned wafer scanner which is used to detect defects in wafers of semiconductor material during the semiconductor device fabrication process, the method comprising: (a) preparing a calibration wafer for the purpose of calibrating the scanner, wherein the preparation of the calibration wafer comprises: depositing a layer of material onto an unpatterned wafer having an interior region and a periphery region, wherein such material is representative of a material which is deposited on a wafer during a step or steps performed during the fabrication process; forming a pattern of features on the material layer and limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to perform its stepping and focusing operations, and to detect known defects deposited on the calibration wafer with a desired degree of confidence; and depositing a substantially uniform distribution of particles onto the layer of material; (b) arranging the calibration wafer in the scanner, wherein the scanner has an adjustable sensitivity, and further wherein the sensitivity of the scanner is adjusted to be the maximum scanning sensitivity; (c) scanning the calibration wafer; (d) comparing the results of the scan of the calibration wafer to a prior scan of the calibration wafer, wherein if the results of the scan performed in (c) differ from the prior scan of the calibration wafer, the sensitivity of the scanner is adjusted; and (e) repeating, if necessary, steps (c) and (d) until the results of the latest scan are substantially the same as the prior scan.

Claim 12

A method of detecting defects in material layers deposited onto a wafer of semiconductor material using a patterned wafer scanner which focuses onto a wafer, detects defects in the wafer, and steps across regions of the wafer, the method comprising: preparing a test wafer which will be scanned by the scanner to detect defects associated with the deposited material layer and a deposition process used to deposit the material layer, wherein the preparation of the test wafer comprises: depositing a layer of material onto an unpatterned wafer having an interior region and a periphery region, wherein such material is representative of a material which is deposited onto a wafer during a step or steps performed during the fabrication of semiconductor devices; and forming a pattern of features on the material layer and limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to operate on the test wafer and to perform its stepping and focusing operations, and to detect defects in the material layer with a desired degree of confidence; and scanning the test wafer with the patterned wafer scanner so as to detect any defects associated with the deposited material layer and the deposition process.

Claim 13

A method of detecting defects in material layers deposited onto a wafer of semiconductor material using a patterned wafer scanner which focuses onto a wafer, detects defects in the wafer, and steps across regions of the wafer, the method comprising: preparing a test wafer which will be scanned by the scanner to detect defects associated with the deposited material layer and a deposition process used to deposit the material layer, wherein the preparation of the test wafer comprises: depositing a layer of material onto an unpatterned wafer having an interior region and a periphery region, wherein such material is representative of a material which is deposited onto a wafer during a step or steps performed during the fabrication of semiconductor devices; and forming a pattern of features on the material layer and limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to operate on the test wafer and to perform its stepping and focusing operations, and to detect defects in the material layer with a desired degree of confidence; and scanning the test wafer with the patterned wafer scanner so as to detect any defects associated with the deposited material layer and the deposition process.

Claim 15

A method of detecting airborne particles deposited onto a substrate using a patterned wafer scanner which focuses onto a wafer, detects defects in the wafer, and steps across regions of the wafer, the method comprising: preparing a substrate having an interior region and a periphery region which will be used to detect airborne particles which are deposited onto the substrate, wherein the preparation of the substrate comprises; depositing a layer of material onto the substrate, wherein such material is representative of a material which is deposited on an unpatterned wafer during the fabrication of a semiconductor device; and forming a pattern of features on the material layer which is limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to perform its stepping and focusing operations, and to permit the scanner to detect airborne particles deposited on the substrate with a desired degree of confidence; depositing airborne particles onto the substrate; and scanning the substrate with the patterned wafer scanner to detect airborne particles deposited onto the substrate.

Claim 16

A method of detecting airborne particles deposited onto a substrate using a patterned wafer scanner which focuses onto a wafer, detects defects in the wafer, and steps across regions of the wafer, the method comprising: preparing a substrate having an interior region and a periphery region which will be used to detect airborne particles which are deposited onto the substrate, wherein the preparation of the substrate comprises; depositing a layer of material onto the substrate, wherein such material is representative of a material which is deposited on an unpatterned wafer during the fabrication of a semiconductor device; and forming a pattern of features on the material layer which is limited to the periphery region of the wafer, wherein such pattern covers sufficient area to permit the scanner to perform its stepping and focusing operations, and to permit the scanner to detect airborne particles deposited on the substrate with a desired degree of confidence; depositing airborne particles onto the substrate; and scanning the substrate with the patterned wafer scanner to detect airborne particles deposited onto the substrate.