US5382447A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for fabricating improved multilayer interconnect systems
Assignee: GlobalFoundries Inc
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Filing: 1993-12-02
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Granted: 1995-01-17
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Expires: 2013-12-02
Abstract
Abstract The invention provides a multilayer laminar interconnect package comprising a plurality of conductor circuit layers adhering to and sandwiched between a plurality of dielectric polyimide polymer layers where the conductor circuit layers are a circuit pattern of lines of conductive metal. The conductive metal, e.g. copper, is coated with a capping layer of a metal, e.g. cobalt, which capping layer is further characterized as having a thin layer of the capping metal oxide adhered to the surface thereof. The conductive layer is in contact with an overcoated polyimide dielectric layer such that the surface oxidized capping layer forms an adherent barrier layer at the interface of the polyimide and conductive line layers. The invention also provides a process for producing such interconnect packages.
Inventors
- 👤 Suryanarayana Kaja
- 👤 Eugene J. O'Sullivan
- 👤 Alejandro G. Schrott
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 22:43
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H05; H05K; H05K3/00; H05K3/38; H05K3/382; H05K3/384; H10W70/00; H10W70/01; H10W70/05; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0154; H05K2203/00; H05K2203/03; H05K2203/0315; H05K2203/07; H05K2203/0703; H05K2203/072; H05K3/385; H05K3/46; H05K3/4644
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
136 words
A process for fabricating a multilayer interconnect package comprising conductor circuit layers separated by and adhered to polyimide dielectric layers comprising: a) forming a circuit pattern of conductive metal lines on a substrate; b) electrolessly depositing a capping metal layer on the surface of said pattern of conductive metal lines, said capping metal characterized as being essentially chemically inert when in contact with polyimide precursor; c) subjecting said capping metal layer to oxidative conditions to form a layer of capping metal oxide adhered to the surface of said capping layer; d) forming a uniform coating of polyimide precursor material on a planar surface of said substrate to overcoat said substrate and said circuit pattern, thereby forming a laminar structure; and e) heating said laminar structure to cure said polyimide precursor material, thereby forming a polyimide surface.
Claim 2
Dependent Claim
136 words
A process for fabricating a multilayer interconnect package comprising conductor circuit layers separated by and adhered to polyimide dielectric layers comprising: a) forming a circuit pattern of conductive metal lines on a substrate; b) electrolessly depositing a capping metal layer on the surface of said pattern of conductive metal lines, said capping metal characterized as being essentially chemically inert when in contact with polyimide precursor; c) subjecting said capping metal layer to oxidative conditions to form a layer of capping metal oxide adhered to the surface of said capping layer; d) forming a uniform coating of polyimide precursor material on a planar surface of said substrate to overcoat said substrate and said circuit pattern, thereby forming a laminar structure; and e) heating said laminar structure to cure said polyimide precursor material, thereby forming a polyimide surface.
Claim 3
Dependent Claim
39 words
The process of claim 1 further including the steps of: f) forming a second circuit pattern of conductive metal lines on the polyimide surface of said laminar structure produced in step (e); and g) repeating steps (b) through (e).
Claim 4
Dependent Claim
11 words
The process of claim 2 wherein said conductive metal is copper.
Claim 5
Dependent Claim
22 words
The process of claim 3 wherein said capping metal is selected from the group consisting of cobalt, nickel, palladium and alloys thereof.
Claim 6
Dependent Claim
20 words
The process of claim 4 wherein said capping metal is cobalt or an alloy of cobalt with phosphorus or boron.
Claim 7
Dependent Claim
19 words
The process of claim 5 wherein the oxide formed on the surface of said capping metal comprises tricobalt tetraoxide.
Claim 8
Dependent Claim
55 words
The process of claim 4 wherein said oxidative conditions comprise immersion of the structure produced in step (b) in a buffered aqueous basic solution at a pH of from about 9 to 11 for a period of from about 2 to 25 minutes and at a temperature of from about 50° C. to 75° C.
Claim 9
Dependent Claim
12 words
The process of claim 7 wherein said solution contains a borate buffer.
Claim 10
Dependent Claim
17 words
The process of claim 7 wherein the pH of said solution ranges from about 9.6 to 10.
Claim 11
Dependent Claim
41 words
The process of claim 4 wherein said oxidative conditions comprise heating the structure produced in step (b) in a water saturated atmosphere in the presence of air or oxygen at a temperature of from about 125° C. to about 225° C.
Claim 12
Dependent Claim
13 words
The process of claim 2 wherein said polyimide precursor is a polyamic acid.
Claim 13
Dependent Claim
18 words
The process of claim 11 wherein said substrate in step (a) is a ceramic or polyimide dielectric layer.
Claim 14
Dependent Claim
25 words
The process of claim 2 wherein steps (f) and (g) are repeated at least 1 to about 12 times to form a multilayer interconnect system.
Claim 15
Dependent Claim
137 words
A process for fabricating a multilayer interconnect system comprising conductor circuit layers separated by and adhered to polyimide dielectric film layers comprising: a) forming a circuit pattern of copper metal lines on a polyimide film substrate; b) electrolessly depositing a capping layer of cobalt or cobalt alloy on the surface of said copper metal lines; c) oxidizing said capping layer to form a layer of a cobalt oxide adhering to the surface of said cobalt or cobalt alloy, said capping layer having a thickness of from about 50 to about 150 Angstroms; d) forming a layer of polyamic acid on the surface of said polyimide film substrate to overcoat said substrate and said circuit pattern, thereby forming a laminar structure; and e) heating said laminar structure to cure said polyamic acid, thereby forming a second polyimide surface.
Claim 16
Dependent Claim
137 words
A process for fabricating a multilayer interconnect system comprising conductor circuit layers separated by and adhered to polyimide dielectric film layers comprising: a) forming a circuit pattern of copper metal lines on a polyimide film substrate; b) electrolessly depositing a capping layer of cobalt or cobalt alloy on the surface of said copper metal lines; c) oxidizing said capping layer to form a layer of a cobalt oxide adhering to the surface of said cobalt or cobalt alloy, said capping layer having a thickness of from about 50 to about 150 Angstroms; d) forming a layer of polyamic acid on the surface of said polyimide film substrate to overcoat said substrate and said circuit pattern, thereby forming a laminar structure; and e) heating said laminar structure to cure said polyamic acid, thereby forming a second polyimide surface.
Claim 17
Dependent Claim
32 words
The process of claim 14 including the additional steps of: f) forming a second circuit pattern of copper metal lines on said second polyimide surface; and g) repeating steps (b) through (e).
Claim 18
Dependent Claim
25 words
The process of claim 15 wherein steps (f) and (g) are repeated at least 1 to about 12 times to form a multilayer interconnect system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-01-16 | 1998-07-18 | 1999-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-16 | 2002-07-18 | 2003-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-16 | 2006-07-18 | 2007-01-17 | $7700.00 | Window Closed / Lapsed |