US5381808A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cleaning treatment apparatus
Assignee: Tokyo Electron Ltd
•
Filing: 1993-03-10
•
Granted: 1995-01-17
•
Expires: 2013-03-10
Abstract
Abstract The present invention relates to a cleaning treatment apparatus wherein two neighboring treatment chambers are allowed to communicate through a communicating opening provided in a lower portion of a separating wall that separates the two treatment chambers, and a movable treatment tank containing a treatment liquid is arranged in a movable manner within the two treatment chambers. The liquid contained in the movable treatment tank and the separating wall are in contact and the two treatment chambers are covered. This configuration ensures that the atmospheres in the two treatment chambers are mutually isolated so that the movable treatment tank can be used in both treatment chambers, the overall apparatus can be made more compact, and also the amount of treatment liquid used can be reduced. In addition, there is no need for a wafer conveyor means, so throughput can also be improved.
Inventors
- 👤 Yuji Kamikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:13
CPC Classifications
H; H10; H10P; H10P52/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; B; B08; B08B; B08B3/00; B08B3/04; B08B3/06; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
186 words
A cleaning treatment apparatus having a plurality of treatment chambers and a plurality of treatment tanks containing a treatment liquid, wherein an object to be treated undergoes cleaning treatment by being immersed into treatment liquids in said treatment tanks, said apparatus comprising: a separating wall provided between two neighboring treatment chambers so as to mutually separate said two treatment chambers, a communicating opening being provided at a lower edge of said separating wall in such a manner that said two treatment chambers communicate with one another therethrough; and a movable treatment tank provided to move through said communicating opening between said two treatment chambers for housing an object to be treated, said movable treatment tank having an opening at a top portion thereof; said movable treatment tank and said separating wall being formed such that, when said movable treatment tank is filled with a treatment liquid and moved through said communicating opening, a lower edge of said separating wall contacts said treatment liquid contained in said movable treatment tank over an entire width of said opening, so that atmospheres in said treatment chambers are mutually isolated.
Claim 2
Dependent Claim
186 words
A cleaning treatment apparatus having a plurality of treatment chambers and a plurality of treatment tanks containing a treatment liquid, wherein an object to be treated undergoes cleaning treatment by being immersed into treatment liquids in said treatment tanks, said apparatus comprising: a separating wall provided between two neighboring treatment chambers so as to mutually separate said two treatment chambers, a communicating opening being provided at a lower edge of said separating wall in such a manner that said two treatment chambers communicate with one another therethrough; and a movable treatment tank provided to move through said communicating opening between said two treatment chambers for housing an object to be treated, said movable treatment tank having an opening at a top portion thereof; said movable treatment tank and said separating wall being formed such that, when said movable treatment tank is filled with a treatment liquid and moved through said communicating opening, a lower edge of said separating wall contacts said treatment liquid contained in said movable treatment tank over an entire width of said opening, so that atmospheres in said treatment chambers are mutually isolated.
Claim 3
Dependent Claim
47 words
The cleaning treatment apparatus according to claim 1, wherein said movable treatment tank is arranged on a movable stage that has sliding elements that engage in a freely slidable manner with a pair of guide shafts arranged in a lower portion of said treatment tank arrangement portion.
Claim 4
Dependent Claim
61 words
The cleaning treatment apparatus according to claim 2, wherein a slider pin engages in a slidable manner in an elongated guide hole formed in said movable stage, and also said slider pin is linked to one end of an operation arm, the other end of said operation arm being linked to a drive motor capable of rotating either clockwise or counterclockwise.
Claim 5
Dependent Claim
25 words
The cleaning treatment apparatus according to claim 1, wherein edges of an opening of said movable treatment tank are formed with notches to allow overflow.
Claim 6
Dependent Claim
25 words
The cleaning treatment apparatus according to claim 1, wherein the movement of said separating wall is arranged to be freely adjustable in the vertical direction.
Claim 7
Dependent Claim
20 words
The cleaning treatment apparatus according to claim 1, further comprising: treatment liquid supply pipelines connected to said movable treatment tank.
Claim 8
Dependent Claim
39 words
The cleaning treatment apparatus according to claim 1, further comprising: a treatment tank arranging portion containing said movable treatment tank, and means for isolating the space between the side wall of said arranging portion and said movable treatment tank.
Claim 9
Dependent Claim
19 words
The cleaning treatment apparatus according to claim 7, wherein said isolating means includes a freely extendable and retractable shutter.
Claim 10
Dependent Claim
32 words
The cleaning treatment apparatus according to claim 1, further comprising: a treatment tank arranging portion containing said movable treatment tank, and treatment liquid exhaust tubes connected to said treatment tank arranging portion.
Claim 11
Dependent Claim
21 words
The cleaning treatment apparatus according to claim 1, further comprising: a treatment object supporting means provided in said movable treatment tank.
Claim 12
Dependent Claim
19 words
The cleaning treatment apparatus according to claim 10, wherein said treatment object supporting means possesses a plurality of notches.
Claim 13
Dependent Claim
26 words
The cleaning treatment apparatus according to claim 10, wherein a wafer transport means is provided for shifting said object to be treated to said supporting means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-16 | 1998-07-18 | 1999-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-16 | 2002-07-18 | 2003-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-16 | 2006-07-18 | 2007-01-17 | $7700.00 | Window Closed / Lapsed |