US5378971A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe and a method of manufacturing the same
Assignee: Tokyo Electron Ltd
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Filing: 1993-08-19
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Granted: 1995-01-03
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Expires: 2013-08-19
Abstract
Abstract A probe is formed of an Au--Cu alloy essentially consisting of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper, by a process comprising the steps of heating the alloy to at least 350° C. and gradually cooling the heated alloy to the room temperature in at least 5 hours.
Inventors
- 👤 Satoru Yamashita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:34
CPC Classifications
C; C22; C22C; C22C5/00; C22C5/02; G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06711; G01R1/06755; G01R1/06733; G01R1/06738; G01R1/073; G01R1/07307; G01R1/07357; G01R3/00
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
47 words
A probe formed of an A--Cu alloy essentially consisting of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper, by a process comprising the steps of heating the alloy to a predetermined temperature and gradually cooling the heated alloy.
Claim 2
Dependent Claim
47 words
A probe formed of an A--Cu alloy essentially consisting of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper, by a process comprising the steps of heating the alloy to a predetermined temperature and gradually cooling the heated alloy.
Claim 3
Dependent Claim
15 words
A probe according to claim 1, wherein the predetermined temperature is at least 350° C.
Claim 4
Dependent Claim
21 words
A probe according to claim 1, wherein the predetermined temperature is a temperature between at least 350° C. and 400° C.
Claim 5
Dependent Claim
14 words
A probe according to claim 1, wherein the predetermined temperature is about 350° C.
Claim 6
Dependent Claim
22 words
A probe according to claim 1, wherein the heated alloy is gradually cooled to the room temperature in at least 5 hours.
Claim 7
Dependent Claim
31 words
A probe according to claim 1, wherein the heated alloy is cooled so that the resistance thereof is reduced to 40% of that of the alloy which has not been heated.
Claim 8
Dependent Claim
40 words
A probe formed of an A--Cu alloy having a resistance of about 0.84Ω per the length of the probe and essentially consisting of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper.
Claim 9
Dependent Claim
40 words
A probe formed of an A--Cu alloy having a resistance of about 0.84Ω per the length of the probe and essentially consisting of 74 to 76 parts by weight of gold and 24 to 26 parts by weight of copper.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |