US5378802A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for removing impurities from resist components and novolak resins
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1991-09-03
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Granted: 1995-01-03
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Expires: 2011-09-03
Abstract
Abstract A method of removing ionic impurities from a resist component, comprising the steps of: (a) dissolving said resist component in a solvent; (b) contacting said resist component solution with a fibrous ion exchange resin for a sufficient amount of time to remove at least a portion of said ionic impurities onto said fibrous ion exchange resin; and (c) separating said fibrous ion exchange resin bearing said ionic impurities from said resist component solution.
Inventors
- 👤 Kenji Honda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; C; C08; C08G; C08G8/00; C08G8/04; C08G8/08; C08G8/12; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
90 words
A method of removing metal impurities from a novolak resin, comprising the steps of: (a) dissolving said novolak resin in a solvent; (b) contacting said novolak resin solution with at least one fibrous cation exchange resin for sufficient amount of time to transfer at least a major portion of said metal impurities onto said fibrous cation exchange resin, wherein said cation exchange resin is prewashed with a solution of a quaternary ammonium salt compound; and (c) separating said cation exchange resin bearing said metal impurities from said novolak resin solution.
Claim 2
Independent Claim
90 words
A method of removing metal impurities from a novolak resin, comprising the steps of: (a) dissolving said novolak resin in a solvent; (b) contacting said novolak resin solution with at least one fibrous cation exchange resin for sufficient amount of time to transfer at least a major portion of said metal impurities onto said fibrous cation exchange resin, wherein said cation exchange resin is prewashed with a solution of a quaternary ammonium salt compound; and (c) separating said cation exchange resin bearing said metal impurities from said novolak resin solution.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said contacting is carried out by adding said fibrous cation exchange resin to said novolak resin solution.
Claim 4
Dependent Claim
35 words
The method of claim 1 wherein said contacting and separating steps are carried out by passing said novolak resin solution through at least one ion exchange column or bed comprising said fibrous cation exchange resin.
Claim 5
Dependent Claim
17 words
The method of claim 1 wherein said quaternary ammonium salt compound is a polymeric ammonium salt compound.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein said solvent comprises ethyl lactate or mixtures thereof with ethyl-3-ethoxypropionate.
Claim 7
Independent Claim
87 words
A method of removing metal impurities from a resist component comprising the steps of: (a) dissolving said resist component in a solvent; (b) washing a fibrous cation exchange resin with a quaternary ammonium salt compound solution; (c) contacting said prewashed fibrous cation exchange resin with said resist component solution for a sufficient amount of time to remove at least a portion of said metal impurities onto said fibrous cation exchange resin; and (d) separating said cation exchange resin bearing said metal impurities from said resist component solution.
Claim 8
Independent Claim
87 words
A method of removing metal impurities from a resist component comprising the steps of: (a) dissolving said resist component in a solvent; (b) washing a fibrous cation exchange resin with a quaternary ammonium salt compound solution; (c) contacting said prewashed fibrous cation exchange resin with said resist component solution for a sufficient amount of time to remove at least a portion of said metal impurities onto said fibrous cation exchange resin; and (d) separating said cation exchange resin bearing said metal impurities from said resist component solution.
Claim 9
Dependent Claim
17 words
The method of claim 6 wherein said quaternary ammonium salt compound is a polymeric ammonium salt compound.
Claim 10
Dependent Claim
22 words
The method of claim 6 wherein the mode of contacting comprises adding said fibrous cation exchange resin to said resist component solution.
Claim 11
Dependent Claim
32 words
The method of claim 6 wherein said contacting and separating steps comprise passing said resist component solution through at least one ion exchange column or bed containing said fibrous cation exchange resin.
Claim 12
Dependent Claim
11 words
The method of claim 8 wherein said separating step is filtration.
Claim 13
Dependent Claim
17 words
The method of claim 6 wherein said solvent comprises ethyl lactate or mixtures thereof with ethyl-3-ethoxy propionate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |