Servo accelerometer with tunnel current sensor and complementary electrostatic drive

Claim 2

An accelerometer comprising: position sensing means including a tunnel current sensor for sensing a displaced position of a proof mass from a servo null position and for generating a position sensing signal indicative of said displaced position; means responsive to said position sensing signal for providing an output signal indicative of sensed acceleration; electrostatic drive means for generating first and second electrostatic forces on said proof mass for returning said proof mass from said displaced position to said servo null position, said first electrostatic force being opposite in direction to said second electrostatic force; a frame having first and second surfaces; elastic connecting means for elastically connecting said proof mass to said frame; a first cover plate sealingly engaging said first surface; a second cover plate sealingly engaging said second surface opposite said first surface; said first and second cover plates and said frame defining a chamber in which said proof mass is disposed; and a damping fluid disposed in said chamber.

Claim 3

An accelerometer as claimed in claim 1, wherein said electrostatic drive means comprises: a first drive electrode in substantially fixed alignment with said frame; a second drive electrode disposed on a first face of said proof mass and closely spaced from said first drive electrode; a third drive electrode in substantially fixed alignment with said frame; and a fourth drive electrode disposed on a second face of said proof mass and closely spaced from said third drive electrode, said first face of said proof mass being opposite and substantially parallel to said second face of said proof mass.

Claim 4

An accelerometer as claimed in claim 2 wherein said first and second electrodes are planar and are spaced a first distance apart, and have a length and width substantially larger than the first distance, and wherein said third and fourth electrodes are planar and are spaced a second distance apart, and have a length and width substantially larger than the second distance.

Claim 5

An accelerometer as claimed in claim 3 wherein said electrostatic drive means further comprises a drive circuit which supplies a first drive voltage between said first and second drive electrodes and a second drive voltage between said third and fourth drive electrodes.

Claim 6

An accelerometer as claimed in claim 4 wherein said first and second drive voltages include a bias voltage component.

Claim 7

An accelerometer as claimed in claim 5 wherein said proof mass has a mechanical null position substantially coinciding with an electrical null position.

Claim 8

An accelerometer as claimed in claim 5 wherein said elastic connecting means is compliant along a desired direction.

Claim 9

An accelerometer as claimed in claim 5 wherein said drive circuit further provides an output signal indicative of sensed acceleration.

Claim 10

An accelerometer as claimed in claim 8 wherein said output signal has a component that is linearly related to said sensed acceleration.

Claim 11

An accelerometer as claimed in claim 9 wherein said output signal is derived from at least one of said drive voltages.

Claim 12

An accelerometer as claimed in claim 2 wherein said elastic connecting means comprises at least one flexure extending between said frame and said proof mass, said flexure permitting rotation of said proof mass about a hinge axis.

Claim 13

An accelerometer as claimed in claim 1 wherein said elastic connecting means comprises: a torsion member connected between opposite sides of said frame; and a connecting member connected between said torsion member and said proof mass.

Claim 14

An accelerometer as claimed in claim 1 wherein said elastic connecting means comprises: a plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a first face of said proof mass; and a further plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a second face of said proof mass.

Claim 15

An accelerometer as claimed in claim 1 wherein said elastic connecting means comprises a plurality of cross flexures extending between said frame and said proof mass.

Claim 16

An accelerometer as claimed in claim 1 wherein said elastic connecting means comprises a plurality of flexures extending along the length of said proof mass, said plurality of flexures adapted for S-mode bending and having a mid-portion with a thickness greater than its respective end portions.

Claim 17

An accelerometer as claimed in claim 1 wherein said frame and said proof mass have a common surface layer, said elastic connecting means comprising at least one flexure formed from said common surface layer.

Claim 18

An accelerometer as claimed in claim 16 wherein said common surface layer is comprised of a silicon crystal layer having a doping differential from the substrate forming said frame and said proof mass.

Claim 19

An accelerometer comprising: proof mass; a frame having first and second surfaces; elastic connecting means for elastically connecting said proof mass to said frame; a tunnel current sensor disposed to generate a tunnel current, the magnitude of said tunnel current being indicative of the relative position of said frame and said proof mass; a position sensing circuit connected to supply a voltage potential to said tunnel current sensor and for generating a position sensing signal from said tunnel current, said position sensing signal corresponding to a displaced position of said proof mass from a servo null position with respect to said frame; a drive circuit for generating drive voltages in response to said position sensing signal and for generating an output signal indicative of sensed acceleration; a plurality of drive electrodes disposed to provide oppositely directed electrostatic forces on said proof mass to urge said proof mass from said displaced position to said servo null position in response to said drive voltages; a first cover plate sealingly engaging said first surface of said frame; a second cover plate sealingly engaging said second surface opposite said first surface of said frame; said first and second cover plates and said frame defining a chamber in which said proof mass is disposed; and a damping fluid disposed in said chamber.

Claim 20

An accelerometer comprising: proof mass; a frame having first and second surfaces; elastic connecting means for elastically connecting said proof mass to said frame; a tunnel current sensor disposed to generate a tunnel current, the magnitude of said tunnel current being indicative of the relative position of said frame and said proof mass; a position sensing circuit connected to supply a voltage potential to said tunnel current sensor and for generating a position sensing signal from said tunnel current, said position sensing signal corresponding to a displaced position of said proof mass from a servo null position with respect to said frame; a drive circuit for generating drive voltages in response to said position sensing signal and for generating an output signal indicative of sensed acceleration; a plurality of drive electrodes disposed to provide oppositely directed electrostatic forces on said proof mass to urge said proof mass from said displaced position to said servo null position in response to said drive voltages; a first cover plate sealingly engaging said first surface of said frame; a second cover plate sealingly engaging said second surface opposite said first surface of said frame; said first and second cover plates and said frame defining a chamber in which said proof mass is disposed; and a damping fluid disposed in said chamber.

Claim 21

An accelerometer as claimed in claim 18 wherein said drive voltages include a bias voltage component.

Claim 22

An accelerometer as claimed in claim 19 wherein a mechanical null position of said proof mass and said servo null position of said proof mass substantially coincide.

Claim 23

An accelerometer as claimed in claim 19 wherein said elastic connecting means is compliant along a desired sensitive direction.

Claim 24

An accelerometer as claimed in claim 20 wherein said elastic connecting means is compliant along a desired sensitive direction.

Claim 25

An accelerometer as claimed in claim 20 wherein said elastic connecting means comprises at least one flexure extending between said frame and said proof mass, said flexure permitting rotation of said proof mass about a transversely extending hinge axis.

Claim 26

An accelerometer as claimed in claim 20 wherein said elastic connecting means comprises: a torsion member connected between opposite sides of said frame; and a connecting member connected between said torsion member and said proof mass.

Claim 27

An accelerometer as claimed in claim 20 wherein said elastic connecting means comprises: a plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a first face of said proof mass; and a further plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a second face of said proof mass.

Claim 28

An accelerometer as claimed in claim 20 wherein said elastic connecting means comprises a plurality of cross flexures extending between said frame and said proof mass.

Claim 29

An accelerometer as claimed in claim 20 wherein said elastic connecting means comprises a plurality of flexures extending along said proof mass, each flexure of said plurality of flexures being adapted for S-mode bending and having a mid-portion with a thickness greater than the respective end portions said flexure.

Claim 30

An accelerometer as claimed in claim 20 wherein said frame and said proof mass have a common surface layer, said elastic connecting means comprising at least one flexure formed from said common surface layer.

Claim 31

An accelerometer as claimed in claim 28 wherein said common surface layer is comprised of a silicon crystal layer having a doping differential from the substrate forming said frame and said proof mass.

Claim 32

An accelerometer as claimed in claim 21 wherein said elastic connecting means comprises at least one flexure extending between said frame and said proof mass, said flexure permitting rotation of said proof mass about a transversely extending hinge axis.

Claim 33

An accelerometer as claimed in claim 21 wherein said elastic connecting means comprises: a torsion member connected between opposite sides of said frame; and a connecting member connected between said torsion member and said proof mass.

Claim 34

An accelerometer as claimed in claim 22 wherein said elastic connecting means comprises: a plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a first face of said proof mass; and a further plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a second face of said proof mass.

Claim 35

An accelerometer as claimed in claim 21 wherein said elastic connecting means comprises a plurality of cross flexures extending between said frame and said proof mass.

Claim 36

An accelerometer as claimed in claim 21 wherein said elastic connecting means comprises a plurality of flexures extending along said proof mass, each flexure of said plurality of flexures being adapted for S-mode bending and having a mid-portion with a thickness greater than the respective end portions said flexure.

Claim 37

An accelerometer as claimed in claim 21 wherein said frame and said proof mass have a common surface layer, said elastic connecting means comprising at least one flexure formed from said common surface layer.

Claim 38

An accelerometer as claimed in claim 35 wherein said common surface layer is comprised of a silicon crystal layer having a doping differential from the substrate forming said frame and said proof mass.

Claim 39

An accelerometer as claimed in claim 22 wherein said elastic connecting means comprises a flexure extending between said frame and said proof mass, said flexure permitting rotation of said proof mass about a transversely extending hinge axis.

Claim 40

An accelerometer as claimed in claim 22 wherein said elastic connecting means comprises: a torsion member connected between opposite sides of said frame; and a connecting member connected between said torsion member and said proof mass.

Claim 41

An accelerometer as claimed in claim 22 wherein said elastic connecting means comprises: a plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a first face of said proof mass; and a further plurality of parallel flexures extending between said frame and said proof mass and being generally spaced from one another in a plane generally defined by a second face of said proof mass.

Claim 42

An accelerometer as claimed in claim 22 wherein said elastic connecting means comprises a plurality of cross flexures extending between said frame and said proof mass.

Claim 43

An accelerometer as claimed in claim 22 wherein said elastic connecting means comprises a plurality of flexures extending along said proof mass, each flexure of said plurality of flexures being adapted for S-mode bending and having a mid-portion with a thickness greater than the respective end portions said flexure.

Claim 44

An accelerometer as claimed in claim 22 wherein said frame and said proof mass have a common surface layer, said elastic connecting means comprising at least one flexure formed from said common surface layer.

Claim 45

An accelerometer as claimed in claim 42 wherein said common surface layer is comprised of a silicon crystal layer having a doping differential from the substrate forming said frame and said proof mass.

Claim 46

An accelerometer as claimed in claim 18 wherein said tunnel current sensor comprises: a first tunnel current electrode disposed in substantially fixed alignment with said frame; and a second tunnel current sensor electrode disposed on said proof mass in close relationship with said first tunnel current electrode.

Claim 47

An accelerometer as claimed in claim 18 wherein said plurality of drive electrodes comprises: a first electrode disposed on a first face portion of said proof mass; a second electrode disposed on said first cover plate and closely spaced from a first conducting surface, said first and second electrodes being connected to receive one of said drive voltages; a third electrode disposed on a second face portion of said proof mass, said second face portion being in a plane substantially parallel to said first face portion; and a fourth electrode disposed on said second cover plate and closely spaced from said third electrode, said third and fourth electrodes being connected to receive an other of said drive voltages.