US5377044A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reflecting diffraction grating and device, such as encoder or the like, using the same
Assignee: Canon Inc
•
Filing: 1994-02-17
•
Granted: 1994-12-27
•
Expires: 2014-02-17
Abstract
Abstract A reflecting diffraction grating is formed by depositing a metal in vacuum on a blazed diffraction grating having a cross section of regular projections and recesses to provide a metal reflecting film, and forming an SiO protective film on the reflecting film by vacuum deposition.
Inventors
- 👤 Haruo Tomono
- 👤 Yuji Matsuo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 23:52
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1852; G02B5/1861
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
51 words
A reflecting diffraction grating comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
Claim 2
Dependent Claim
51 words
A reflecting diffraction grating comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
Claim 3
Dependent Claim
21 words
A reflecting diffraction grating according to claim 1, further comprising: a protective substrate adhered on said SiO film by an adhesive.
Claim 4
Dependent Claim
21 words
A reflecting diffraction grating according to claim 1, wherein said metal reflecting film is one of Cu, Al, Ag and Cr.
Claim 5
Dependent Claim
23 words
A reflecting diffraction grating according to claim 1, wherein said metal reflecting film has a thickness within a range of 1000 Å-5000 Å.
Claim 6
Dependent Claim
22 words
A reflecting diffraction grating according to claim 1, wherein said SiO film has a thickness within a range of 500 Å-4000 Å.
Claim 7
Dependent Claim
22 words
A reflecting diffraction grating according to claim 1, wherein said reflecting diffraction grating comprises a color separation diffraction grating for color separation.
Claim 8
Dependent Claim
54 words
A scale comprising: a reflecting diffraction grating including; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
Claim 9
Dependent Claim
54 words
A scale comprising: a reflecting diffraction grating including; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
Claim 10
Independent Claim
77 words
A method of producing a reflecting diffraction grating comprising the steps of: preparing a glass substrate; forming a resin layer on said glass substrate, which has a configuration of projections and recesses in order to form a diffraction grating and is substantially thinner than said glass substrate; depositing a metal in vacuum on said projections and recesses of said diffraction grating to provide a metal reflecting film; and forming an SiO film on said metal reflecting film.
Claim 11
Independent Claim
77 words
A method of producing a reflecting diffraction grating comprising the steps of: preparing a glass substrate; forming a resin layer on said glass substrate, which has a configuration of projections and recesses in order to form a diffraction grating and is substantially thinner than said glass substrate; depositing a metal in vacuum on said projections and recesses of said diffraction grating to provide a metal reflecting film; and forming an SiO film on said metal reflecting film.
Claim 12
Dependent Claim
52 words
A method according to claim 8, wherein the method of preparing said substrate comprises the steps of: dropping a polymerization-curing-type resin on a mold having a diffraction-grating pattern; superposing the glass substrate on the resin from above; curing the polymerization-curing-type resin within the mold; and releasing the cured resin from the mold.
Claim 13
Dependent Claim
19 words
A method according to claim 8, wherein said metal reflecting film is one of Cu, Al, Ag and Cr.
Claim 14
Dependent Claim
26 words
A method according to claim 8, wherein said metal reflecting film is deposited in vacuum with a thickness is within a range of 1000 Å-5000 Å.
Claim 15
Dependent Claim
22 words
A method according to claim 8, wherein said SiO film is formed with a thickness within a range of 500 Å-4000 Å.
Claim 16
Dependent Claim
69 words
An optical apparatus comprising: a reflecting diffraction grating; and optical means for guiding light onto said diffraction grating, said reflecting diffracting grating comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 17
Dependent Claim
69 words
An optical apparatus comprising: a reflecting diffraction grating; and optical means for guiding light onto said diffraction grating, said reflecting diffracting grating comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 18
Dependent Claim
18 words
An optical apparatus according to claim 13, further comprising detection means for detecting light from said diffraction grating.
Claim 19
Dependent Claim
20 words
An optical apparatus according to claim 13, wherein said diffraction grating is a color separation diffraction grating for color separation.
Claim 20
Dependent Claim
102 words
A displacement detector comprising: a scale comprising a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 21
Dependent Claim
102 words
A displacement detector comprising: a scale comprising a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 22
Dependent Claim
16 words
A displacement detector according to claim 16, wherein said illumination means includes a laser light source.
Claim 23
Dependent Claim
18 words
A displacement detector according to claim 17, wherein said laser light source comprises a semiconductor laser light source.
Claim 24
Dependent Claim
107 words
A linear encoder comprising a displacement detector which includes: a scale with a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 25
Dependent Claim
107 words
A linear encoder comprising a displacement detector which includes: a scale with a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 26
Dependent Claim
103 words
A rotary encoder comprising a displacement detector which includes: a scale with a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprising projections and recesses; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 27
Dependent Claim
103 words
A rotary encoder comprising a displacement detector which includes: a scale with a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprising projections and recesses; a metal reflecting film on said projections and recesses; and an SiO film on said metal reflecting film.
Claim 28
Dependent Claim
120 words
A driving system comprising: a driving mechanism; and a displacement detector for detecting a driving state of said driving mechanism, said displacement detector comprising: a scale comprising a reflecting diffraction grating; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
Claim 29
Dependent Claim
120 words
A driving system comprising: a driving mechanism; and a displacement detector for detecting a driving state of said driving mechanism, said displacement detector comprising: a scale comprising a reflecting diffraction grating; illumination means for illuminating a light beam onto said diffraction grating; and detection means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film on the projections and recesses; and an SiO film on said metal reflecting film.
Claim 30
Dependent Claim
24 words
A driving system according to claim 21, further comprising: control means for controlling said driving mechanism according to an output from said displacement detector.
Claim 31
Dependent Claim
61 words
A reflecting diffraction grating comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film formed on the projections and recesses; and a film including an oxide of an Si element except SiO 2 on said metal reflecting film.
Claim 32
Dependent Claim
61 words
A reflecting diffraction grating comprising; a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film formed on the projections and recesses; and a film including an oxide of an Si element except SiO 2 on said metal reflecting film.
Claim 33
Independent Claim
81 words
A method of producing a reflecting diffraction grating comprising the steps of: preparing a glass substrate; forming a resin layer on said glass substrate having projections and recesses to provide a diffraction grating that is substantially thinner than said glass substrate; depositing a metal on said projections and recesses of said diffraction grating in a vacuum to provide a metal reflecting film; and forming a film including an oxide of an Si element except SiO 2 on said metal reflecting film.
Claim 34
Independent Claim
81 words
A method of producing a reflecting diffraction grating comprising the steps of: preparing a glass substrate; forming a resin layer on said glass substrate having projections and recesses to provide a diffraction grating that is substantially thinner than said glass substrate; depositing a metal on said projections and recesses of said diffraction grating in a vacuum to provide a metal reflecting film; and forming a film including an oxide of an Si element except SiO 2 on said metal reflecting film.
Claim 35
Dependent Claim
112 words
A displacement detector comprising: a scale comprising a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detecting means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film formed on said projections and recesses and a film including an oxide of an Si element except SiO 2 on said metal reflecting film.
Claim 36
Dependent Claim
112 words
A displacement detector comprising: a scale comprising a reflecting diffraction grating formed thereon; illumination means for illuminating a light beam onto said diffraction grating; and detecting means for detecting interfered light formed from reflected and diffracted light from said diffraction grating to measure a relative displacement between said scale and said light beam, said scale comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and comprises projections and recesses having a diffraction function; a metal reflecting film formed on said projections and recesses and a film including an oxide of an Si element except SiO 2 on said metal reflecting film.
Claim 37
Dependent Claim
60 words
A reflecting diffraction grating comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and has a configuration of projections and recesses in order to form a diffraction grating; a metal reflecting film formed along the configuration of said resin layer; and an SiO film on said metal reflecting film.
Claim 38
Dependent Claim
60 words
A reflecting diffraction grating comprising: a glass substrate; a resin layer formed on said glass substrate that is substantially thinner than said glass substrate and has a configuration of projections and recesses in order to form a diffraction grating; a metal reflecting film formed along the configuration of said resin layer; and an SiO film on said metal reflecting film.
Claim 39
Dependent Claim
21 words
A reflecting diffraction grating according to claim 26, further comprising: a protective substrate adhered on the SiO film by an adhesive.
Claim 40
Dependent Claim
21 words
A reflecting diffraction grating according to claim 26, wherein said metal reflecting film is one of Cu, Al, Ag and Cr.
Claim 41
Dependent Claim
23 words
A reflecting diffraction grating according to claim 26, wherein said metal reflecting film has a thickness within a range of 1000 Å-5000 Å.
Claim 42
Dependent Claim
22 words
A reflecting diffraction grating according to claim 26, wherein said SiO film has a thickness within a range of 500 Å-4000 Å.
Claim 43
Independent Claim
75 words
A method of producing a reflecting diffraction grating comprising the steps of: preparing a glass substrate; forming a resin layer on said glass substrate that is substantially thinner than said glass substrate and has a configuration of projections and recesses in order to form a diffraction grating; depositing a metal in vacuum along the configuration of said resin layer to form a metal reflecting film; and forming an SiO film on said metal reflecting film.
Claim 44
Independent Claim
75 words
A method of producing a reflecting diffraction grating comprising the steps of: preparing a glass substrate; forming a resin layer on said glass substrate that is substantially thinner than said glass substrate and has a configuration of projections and recesses in order to form a diffraction grating; depositing a metal in vacuum along the configuration of said resin layer to form a metal reflecting film; and forming an SiO film on said metal reflecting film.
Claim 45
Dependent Claim
52 words
A method according to claim 31, wherein the method of preparing said substrate comprises the steps of: dropping a polymerization-curing-type resin on a mold having a diffraction-grating pattern; superposing the glass substrate on the resin from above; curing the polymerization-curing-type resin within the mode; and releasing the cured resin from the mold.
Claim 46
Dependent Claim
19 words
A method according to claim 31, wherein said metal reflecting film is one of Cu, Al, Ag and Cr.
Claim 47
Dependent Claim
25 words
A method according to claim 31, wherein said metal reflecting film is deposited in vacuum with a thickness within a range of 1000 Å-5000 Å.
Claim 48
Dependent Claim
22 words
A method according to claim 31, wherein said SiO film is formed with a thickness within a range of 500 Å-4000 Å.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-26 | 1998-06-27 | 1998-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-26 | 2002-06-27 | 2002-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-26 | 2006-06-27 | 2006-12-27 | $7700.00 | Window Closed / Lapsed |