Abstract A method of heat-treating a semiconductor wafer comprises: heat-treating a semiconductor wafer in an atmosphere of an inert gas which does not absorb infrared rays in a specific infrared region to determine heat-treating conditions that heat the semiconductor wafer in a desired temperature profile; and heat-treating a semiconductor wafer in an atmosphere of a process gas according to the previously determined heat-treating conditions. Since the inert gas used in predetermining the heat-treating conditions does not absorb infrared radiation in the specific infrared region corresponding to the infrared absorption range of the process gas, the temperature of the semiconductor wafer can be accurately measured by a pyrometer to determine the heat-treating conditions. In the practical heat treatment of a semiconductor wafer, the temperature of a semiconductor wafer can be accurately controlled according to the predetermined heat-treating conditions.
A method of heat-treating a semiconductor wafer, comprising: (a) heat-treating a semiconductor wafer in an atmosphere of an inert gas of symmetrical molecules which does not absorb infrared radiation in a specific infrared region corresponding to an infrared absorption range of a process gas; (b) simultaneously measuring a temperature of the semiconductor wafer by sensing emissions in specific infrared region to determine heat-treating conditions that heat the semiconductor wafer in a desired temperature profile; and (c) heat-treating semiconductor wafers in an atmosphere of said process gas of triatomic molecules according to the previously determined heat-treating conditions.
Claim 2
Independent Claim
96 words
A method of heat-treating a semiconductor wafer, comprising: (a) heat-treating a semiconductor wafer in an atmosphere of an inert gas of symmetrical molecules which does not absorb infrared radiation in a specific infrared region corresponding to an infrared absorption range of a process gas; (b) simultaneously measuring a temperature of the semiconductor wafer by sensing emissions in specific infrared region to determine heat-treating conditions that heat the semiconductor wafer in a desired temperature profile; and (c) heat-treating semiconductor wafers in an atmosphere of said process gas of triatomic molecules according to the previously determined heat-treating conditions.
Claim 3
Dependent Claim
45 words
A method of heat-treating a semiconductor wafer according to claim 1, wherein said process gas of triatomic molecules is N 2 O gas, CO 2 gas, steam or ozone, and said inert gas is N 2 gas, Ar gas or a mixture of these gases.