US5374974A
Expired / Lapsed
US
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High speed shuttle for gating a radiation beam, particularly for semiconductor lithography apparatus
Assignee: LSI Corp
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Filing: 1993-04-30
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Granted: 1994-12-20
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Expires: 2013-04-30
Abstract
Abstract Fine, sub-micron line features and patterns are created in a sensitized layer on a semiconductor wafer by a beam of low wavelength radiation, such as X-rays or Gamma-rays. A continuous stream of such radiation is gated on and off by a shutter mechanism comprising a distortable-surface device and a beam-blocking device. The distortable-surface device is a surface acoustic wave device, a magnetostrictive device, or the like. The beam-blocking device is a beam stop, such as a knife edge, an aperture, or the like. The distortable-surface device can be selectively caused to reflect an incident beam of radiation past or into the beam-blocking device. In this manner, a continuous stream of radiation, such as from a pellet of Cobalt-60, can be quickly and precisely gated on and off to impact and to not-impact the semiconductor wafer, respectively. By moving either of the reflected beam or the semiconductor wafer, line features can be created in the sensitized layer on the semiconductor wafer.
Inventors
- 👤 Michael D. Rostoker
- 👤 Nicholas F. Pasch
- 👤 Joe Zelayeta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:40
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/09; G02B27/0938; G02B27/0994; G02B17/00; G02B26/00; G02B26/02; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70058; G03F7/702; G03F7/70375; G21; G21K; G21K1/00; G21K1/02; G21K1/04; G02F; G02F1/00; G02F1/29; G02F1/33; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2042; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/107; Y10S430/108
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
107 words
A high-speed shutter for gating a radiation beam, comprising: a first device having a top surface capable of being substantially planar in one selectable state and capable of being substantially non-planar in an other selectable state; the top surface of the first device reflecting an incident beam of energy along a path at a specified angle in the one selectable state and reflecting the incident beam of energy an other angle different from the specified angle in the other selectable state; and a second device oriented to pass the reflected incident beam at the specified angle and to block the reflected incident beam at the other angle.
Claim 2
Dependent Claim
107 words
A high-speed shutter for gating a radiation beam, comprising: a first device having a top surface capable of being substantially planar in one selectable state and capable of being substantially non-planar in an other selectable state; the top surface of the first device reflecting an incident beam of energy along a path at a specified angle in the one selectable state and reflecting the incident beam of energy an other angle different from the specified angle in the other selectable state; and a second device oriented to pass the reflected incident beam at the specified angle and to block the reflected incident beam at the other angle.
Claim 3
Dependent Claim
43 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: a reflective film is disposed on the top surface of the first device; and the reflective film is formed of a material that is substantially reflective of the incident beam.
Claim 4
Dependent Claim
20 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the incident beam is composed of gamma-rays.
Claim 5
Dependent Claim
28 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the incident beam is composed of gamma-radiation; and the reflective film is formed of aluminum.
Claim 6
Dependent Claim
28 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the incident beam is composed of gamma-radiation; and the reflective film is formed of nickel.
Claim 7
Dependent Claim
28 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the incident beam is composed of gamma-radiation; and the reflective film is formed of chromium.
Claim 8
Dependent Claim
36 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the second device is a beam-stop positioned to pass the reflected incident beam at angles of reflection within a critical range of angles.
Claim 9
Dependent Claim
36 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the second device is a beam-stop positioned to block the reflected incident beam at a reflection angle without a critical range of angles.
Claim 10
Dependent Claim
31 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the beam-stop is formed as a knife edge and is disposed along the path of the reflected beam.
Claim 11
Dependent Claim
37 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the second device is an aperture, an opening of which is positioned to pass the reflected bean only within a critical range of angles.
Claim 12
Dependent Claim
22 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the first device is a surface acoustic wave device.
Claim 13
Dependent Claim
32 words
A high-speed shutter for gating a radiation beam, according to claim 11, wherein: the top surface of the surface acoustic wave device is coated with a film reflective to the incident beam.
Claim 14
Dependent Claim
19 words
A high-speed shutter for gating a radiation beam, according to claim 12, wherein: the film is formed of aluminum.
Claim 15
Dependent Claim
19 words
A high-speed shutter for gating a radiation beam, according to claim 12, wherein: the film is formed of nickel.
Claim 16
Dependent Claim
19 words
A high-speed shutter for gating a radiation beam, according to claim 12, wherein: the film is formed of chromium.
Claim 17
Dependent Claim
20 words
A high-speed shutter for gating a radiation beam, according to claim 12, wherein: the radiation beam is a gamma-ray beam.
Claim 18
Dependent Claim
20 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the radiation beam is a gamma-ray beam.
Claim 19
Dependent Claim
34 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the first device is caused to be in the one or the other of the selectable states by an electrical signal.
Claim 20
Dependent Claim
47 words
A high-speed shutter for gating a radiation beam, according to claim 18 wherein: the first device is caused to be in the other selectable state by applying the electrical signal, and is caused to be in the one selectable state in the absence of the electrical signal.
Claim 21
Dependent Claim
20 words
A high-speed shutter for gating a radiation beam, according to claim 1, wherein: the first device is a magnetostrictive device.
Claim 22
Dependent Claim
30 words
A high-speed shutter for gating a radiation beam, according to claim 20, wherein: the top surface of the magnetostrictive device is coated with a film reflective to the incident beam.
Claim 23
Dependent Claim
19 words
A high-speed shutter for gating a radiation beam, according to claim 21, wherein: the film is formed of aluminum.
Claim 24
Dependent Claim
19 words
A high-speed shutter for gating a radiation beam, according to claim 21, wherein: the film is formed of nickel.
Claim 25
Dependent Claim
19 words
A high-speed shutter for gating a radiation beam, according to claim 20, wherein: the film is formed of chromium.
Claim 26
Dependent Claim
20 words
A high-speed shutter for gating a radiation beam, according to claim 20, wherein: the radiation beam is a gamma-radiation beam.
Claim 27
Independent Claim
169 words
A method of gating a radiation beam, comprising: providing a radiation source generating a beam of radiation; causing the beam of radiation to be incident on a surface of a distortable-surface device; reflecting the beam of radiation along a first path from the surface of the distortable-surface device in one selectable state of the distortable-surface device; reflecting the beam of radiation along a second path, different from the first path, from the surface of the distortable-surface device in an other selectable state of the distortable-surface device; positioning a blocking device downstream of the surface-distortable device; causing the beam of radiation, as reflected from the surface of the distortable-surface device, to pass by the blocking device when the beam is reflected along the first path; causing the beam of radiation, as reflected from the surface of the distortable-surface device, to impact the blocking device when the beam is reflected along the second path; and selectively causing the distortable-surface device to be in one or the other of its selectable states.
Claim 28
Independent Claim
169 words
A method of gating a radiation beam, comprising: providing a radiation source generating a beam of radiation; causing the beam of radiation to be incident on a surface of a distortable-surface device; reflecting the beam of radiation along a first path from the surface of the distortable-surface device in one selectable state of the distortable-surface device; reflecting the beam of radiation along a second path, different from the first path, from the surface of the distortable-surface device in an other selectable state of the distortable-surface device; positioning a blocking device downstream of the surface-distortable device; causing the beam of radiation, as reflected from the surface of the distortable-surface device, to pass by the blocking device when the beam is reflected along the first path; causing the beam of radiation, as reflected from the surface of the distortable-surface device, to impact the blocking device when the beam is reflected along the second path; and selectively causing the distortable-surface device to be in one or the other of its selectable states.
Claim 29
Dependent Claim
21 words
A method of gating a radiation beam, according to claim 26, wherein: the distortable-surface device is a surface acoustic wave device.
Claim 30
Dependent Claim
19 words
A method of gating a radiation beam, according to claim 26, wherein: the distortable-surface device is a magnetostrictive device.
Claim 31
Dependent Claim
19 words
A method of gating a radiation beam, according to claim 26, wherein: the blocking device is a beam stop.
Claim 32
Dependent Claim
18 words
A method of gating a radiation beam, according to claim 26, wherein: the blocking device is an aperture.
Claim 33
Dependent Claim
29 words
A method of gating a radiation beam, according to claim 26, further comprising: providing the surface of the distortable-surface device with a film substantially reflective to the incident beam.
Claim 34
Dependent Claim
32 words
A method of gating a radiation beam, according to claim 26, further comprising: collimating the beam of radiation prior to causing it to be incident on the surface of the distortable-surface device.
Claim 35
Dependent Claim
29 words
A method of gating a radiation beam, according to claim 26, further comprising: collimating the beam of radiation after reflecting the beam from the surface of the distortable-surface device.
Claim 36
Dependent Claim
20 words
A method of gating a radiation beam, according to claim 26, wherein: the beam of radiation is composed of gamma-radiation.
Claim 37
Dependent Claim
20 words
A method of gating a radiation beam, according to claim 26, wherein: the beam of radiation is composed of X-rays.
Claim 38
Dependent Claim
20 words
A method of gating a radiation beam, according to claim 26, wherein: the radiation source is a pellet of Cobalt-60.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-19 | 1998-06-20 | 1998-12-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-19 | 2002-06-20 | 2002-12-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-19 | 2006-06-20 | 2006-12-20 | $7700.00 | Window Closed / Lapsed |