Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
76 words
A temperature comfort sensing device comprising: a first diaphragm defining a first recess, the first diaphragm further including a thin film heater over the first recess for generating heat; and a temperature sensor for controlling a temperature of the thin film heater; and a second diaphragm defining a second recess, the second diaphragm further including a thermopile over the second recess for generating an electromotive force depending on the heat generated by the thin film heater.
Claim 2
Dependent Claim
76 words
A temperature comfort sensing device comprising: a first diaphragm defining a first recess, the first diaphragm further including a thin film heater over the first recess for generating heat; and a temperature sensor for controlling a temperature of the thin film heater; and a second diaphragm defining a second recess, the second diaphragm further including a thermopile over the second recess for generating an electromotive force depending on the heat generated by the thin film heater.
Claim 3
Dependent Claim
27 words
A temperature comfort sensing device in accordance with claim 1, further including an adhesive, wherein the first diaphragm is bonded to the second diaphragm by the adhesive.
Claim 4
Dependent Claim
30 words
A temperature comfort sensing device in accordance with claim 2, wherein the second recess is configured as an air cavity for accumulating the heat generated from the thin film heater.
Claim 5
Dependent Claim
30 words
A temperature comfort sensing device in accordance with claim 1, wherein the first and second diaphragms each includes a micro film with an average thickness of 2 to 3 μm.
Claim 6
Dependent Claim
65 words
A temperature comfort sensing device in accordance with claim 1, wherein the first diaphragm includes a first oxide film over the first recess, a first nitride film over the first oxide film, wherein the thin film heater and the temperature sensor are on the first nitride film, and wherein the device further includes a second oxide film over the thin film heater and temperature sensor.
Claim 7
Dependent Claim
27 words
A temperature comfort sensing device in accordance with claim 5, wherein the first diaphragm includes a P type silicon layer having a surface with a (100) orientation.
Claim 8
Dependent Claim
33 words
A temperature comfort sensing device in accordance with claim 5, further including an etch stop layer over the first recess, the etch stop layer including an impurity layer heavily doped with boron ions.
Claim 9
Dependent Claim
19 words
A temperature comfort sensing device in accordance with claim 5, wherein the thin film heater includes a Ni--Fe alloy.
Claim 10
Dependent Claim
98 words
A temperature comfort sensing device in accordance with claim 1, wherein the second diaphragm includes a first oxide film over the second recess; a first nitride film over the first oxide film, wherein the thermopile is on the first nitride film, and wherein the device further includes a second oxide film over the first nitride film and contacting the thermopile; a third oxide film over both the second oxide film and the thermopile; a temperature sensor contacting the third oxide film; a second nitride film on the temperature sensor; and a black body on the second nitride film.
Claim 11
Dependent Claim
27 words
A temperature comfort sensing device in accordance with claim 9, wherein the second diaphragm includes a P type silicon layer having a surface with a (100) orientation.
Claim 12
Dependent Claim
32 words
A temperature comfort sensing device accordance with claim 9, further including an etch stop layer over the second recess, the etch stop layer including an impurity layer heavily doped with boron ions.
Claim 13
Dependent Claim
42 words
A temperature comfort sensing device in accordance with claim 9, wherein the thermopile includes a first thermoelectric film having a first width and a second thermoelectric film, coupled to the first thermoelectric film, having a width substantially equal to the first width.
Claim 14
Dependent Claim
20 words
A temperature comfort sensing device in accordance with claim 12, wherein the first and second films include Sn and Bi.
Claim 15
Dependent Claim
28 words
A temperature comfort sensing device in accordance with claim 9, wherein the black body has a heat radiation amount approximately substantially equal to that of a human skin.
Claim 16
Dependent Claim
27 words
A temperature comfort sensing device in accordance with claim 14, wherein the black body includes a body selected from a group consisting of Pt, Au ad Ag.
Claim 17
Dependent Claim
81 words
A temperature comfort sensing device comprising: a lower diaphragm defining a first recess, the lower diaphragm further including a thin film heater over the first recess for generating heat depending on a room temperature and a temperature sensor for controlling a temperature of said thin film heater; and an upper diaphragm defining a second recess, the upper diaphragm further including a thermopile over the second recess for generating an electromotive force depending on said heat generated from the thin film heater.
Claim 18
Dependent Claim
81 words
A temperature comfort sensing device comprising: a lower diaphragm defining a first recess, the lower diaphragm further including a thin film heater over the first recess for generating heat depending on a room temperature and a temperature sensor for controlling a temperature of said thin film heater; and an upper diaphragm defining a second recess, the upper diaphragm further including a thermopile over the second recess for generating an electromotive force depending on said heat generated from the thin film heater.