US5370736A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Horizontal reactor hardware design
Assignee: Texas Instruments Inc
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Filing: 1992-10-26
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Granted: 1994-12-06
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Expires: 2012-10-26
Abstract
Abstract An new horizontal reactor hardware contains a reactor tube with an insulation block and a flange with exhaust outlets. The insulation block provides high temperature control which reduces condensation and process by-product buildup within the reactor tube. A cylindrical flange, which is connected to the end of the reactor tube, provides exhaust outlets integral with and extending from the flange. The exhaust outlets isolate metal components from the process environment. The flange is held in place at the end of the reactor tube by a clamp. The clamp presses the flange against the end of the reactor tube to form a seal at the junction between the reactor tube and the flange.
Inventors
- 👤 Sudipto R. Roy
- 👤 Phil Glynn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:27
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4409; C23C16/4412; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
75 words
A horizontal reactor comprising: a quartz reactor tube; a heating element which is positioned over one portion of the reactor tube; an insulation block which is positioned over another portion of the reactor tube; a quartz flange connected to an end of the reactor tube for isolating the reactor tube from outside contaminants; and at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the flange from metal components.
Claim 2
Dependent Claim
75 words
A horizontal reactor comprising: a quartz reactor tube; a heating element which is positioned over one portion of the reactor tube; an insulation block which is positioned over another portion of the reactor tube; a quartz flange connected to an end of the reactor tube for isolating the reactor tube from outside contaminants; and at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the flange from metal components.
Claim 3
Dependent Claim
22 words
The horizontal reactor of claim 1 wherein the at least one quartz exhaust outlet extends at least two inches from the flange.
Claim 4
Dependent Claim
26 words
The horizontal reactor of claim 1, wherein the insulation block includes: a rigid insulation material; and a metal outer shell covering and supporting the insulation material.
Claim 5
Dependent Claim
16 words
The horizontal reactor of claim 3, wherein the metal outer shell is formed of stainless steel.
Claim 6
Dependent Claim
58 words
The horizontal reactor of claim 1, further comprising: a source end of the reactor tube; a first vestibule block positioned on an outside surface of the reactor tube between the source end and the heating element; and a second vestibule block positioned on an outside surface of the reactor tube between the heating element and the insulation block.
Claim 7
Dependent Claim
21 words
The horizontal reactor of claim 1 wherein the at least one quartz exhaust outlet is coupled to a metal exhaust line.
Claim 8
Dependent Claim
13 words
The horizontal reactor of claim 1 wherein the outside contaminants are metallic contaminants.
Claim 9
Dependent Claim
43 words
The horizontal reactor of claim 1, further comprising a clamp connecting the flange to the reactor tube, the clamp pressing the flange against the end of the reactor tube to form a seal at the junction between the reactor tube and the flange.
Claim 10
Dependent Claim
62 words
A horizontal reactor comprising: a quartz reactor tube; a heating element which is positioned over one portion of the reactor tube; a quartz flange connected to an end of the reactor tube for isolating the reactor tube from outside contaminants; and at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the flange from metal components.
Claim 11
Dependent Claim
62 words
A horizontal reactor comprising: a quartz reactor tube; a heating element which is positioned over one portion of the reactor tube; a quartz flange connected to an end of the reactor tube for isolating the reactor tube from outside contaminants; and at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the flange from metal components.
Claim 12
Dependent Claim
34 words
The horizontal reactor of claim 9 wherein the at least one quartz exhaust outlet includes; a first exhaust outlet; and a second exhaust outlet positioned on the flange diametrically opposite the first exhaust outlet.
Claim 13
Dependent Claim
43 words
The horizontal reactor of claim 9, further comprising a clamp connecting the flange to the reactor tube, the clamp pressing the flange against the end of the reactor tube to form a seal at the junction between the reactor tube and the flange.
Claim 14
Dependent Claim
26 words
The horizontal reactor of claim 11, wherein the clamp is positioned on an outside surface of the reactor tube and an outside surface of the flange.
Claim 15
Dependent Claim
32 words
The horizontal reactor of claim 12, wherein the clamp consists of four semicircular strips, one of the strips being wider than the other three strips for stability and alignment of the flange.
Claim 16
Dependent Claim
14 words
The horizontal reactor of claim 13, wherein the strips are formed of stainless steel.
Claim 17
Dependent Claim
18 words
The horizontal reactor of claim 9, further comprising a door which fits against an end of the flange.
Claim 18
Dependent Claim
13 words
The horizontal reactor of claim 9, wherein the flange has a cylindrical shape.
Claim 19
Independent Claim
88 words
A method of reducing process by-product buildup in a horizontal reactor tube, which comprises: heating a first portion of the reactor tube; insulating a second portion of the reactor tube to maintain a high temperature in the second portion of the reactor tube for reducing condensation inside of the second portion of the reactor tube; and directing exhaust from the reactor tube through a flange having at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the reactor tube from metal components.
Claim 20
Independent Claim
88 words
A method of reducing process by-product buildup in a horizontal reactor tube, which comprises: heating a first portion of the reactor tube; insulating a second portion of the reactor tube to maintain a high temperature in the second portion of the reactor tube for reducing condensation inside of the second portion of the reactor tube; and directing exhaust from the reactor tube through a flange having at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the reactor tube from metal components.
Claim 21
Dependent Claim
24 words
A method of reducing process by-product buildup in a horizontal reactor tube, as recited in claim 17, wherein the outside contaminants are metallic contaminants.
Claim 22
Independent Claim
55 words
A method of reducing process by-product buildup in a horizontal reactor tube, which comprises: heating a first portion of the reactor tube; and directing exhaust from the reactor tube through a flange having at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the reactor tube from metal components.
Claim 23
Independent Claim
55 words
A method of reducing process by-product buildup in a horizontal reactor tube, which comprises: heating a first portion of the reactor tube; and directing exhaust from the reactor tube through a flange having at least one quartz exhaust outlet integral with and extending outward from the flange for isolating the reactor tube from metal components.
References Cited (Backward Citations)
US3828722A
Cited
US4347431A
Cited
US4699084A
Cited
US4803948A
Cited
US4711197A
Cited
US4920920A
Cited
US4793283A
Cited
US5064367A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-05 | 1998-06-06 | 1998-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-05 | 2002-06-06 | 2002-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-05 | 2006-06-06 | 2006-12-06 | $7700.00 | Window Closed / Lapsed |