US5368937A
Expired / Lapsed
US
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Improved carbon containing thin film formed by increasing bias voltage during a plasma CVD process
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1990-12-12
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Granted: 1994-11-29
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Expires: 2010-12-12
Abstract
Abstract The present invention discloses a carbon film on a substrate formed by increasing a bias voltage during a plasma CVD process, wherein the entire carbon film is amorphous and the hardness of the film increases away from the substrate in the direction of the thickness of the film.
Inventors
- 👤 Kenji Itoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:08
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/517; C23C16/22; C23C16/26; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04; Y; Y02; Y02P; Y02P20/00; Y02P20/10; Y02P20/129; Y10; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
151 words
A carbon film on a substrate formed by the process of: placing an object in a reaction chamber on one of a pair of electrodes where the one electrode constitutes a substrate; introducing a reaction gas comprising carbon into said reaction chamber; inputting rf power to the pair of electrodes to decompose the reaction gas; inputting a bias voltage to at least one of the pair of electrodes and depositing a coating on said object; and increasing the bias voltage during deposition of said coating thereby increasing the hardness of the coating with respect to the thickness of the coating wherein the entire coating is amorphous and the hardness of the coating increases away from the substrate in the direction of the thickness of the coating by said increasing the bias during deposition of the coating such that the proportion of carbon bonds based on the Sp 2 orbital is reduced.
Claim 2
Dependent Claim
151 words
A carbon film on a substrate formed by the process of: placing an object in a reaction chamber on one of a pair of electrodes where the one electrode constitutes a substrate; introducing a reaction gas comprising carbon into said reaction chamber; inputting rf power to the pair of electrodes to decompose the reaction gas; inputting a bias voltage to at least one of the pair of electrodes and depositing a coating on said object; and increasing the bias voltage during deposition of said coating thereby increasing the hardness of the coating with respect to the thickness of the coating wherein the entire coating is amorphous and the hardness of the coating increases away from the substrate in the direction of the thickness of the coating by said increasing the bias during deposition of the coating such that the proportion of carbon bonds based on the Sp 2 orbital is reduced.
Claim 3
Dependent Claim
28 words
The carbon film of claim 1, wherein the bias is continuously increased during deposition of the carbon film to continuously increase the hardness of the deposited carbon film.
Claim 4
Dependent Claim
65 words
The carbon film of claim 1, wherein said carbon film includes: a lower carbon film conforming to the surface of the substrate; an intermediate carbon film on said lower film; and an upper carbon film; wherein the hardness of said upper film is greater than that of said intermediate film and the hardness of the intermediate film is greater than that of the lower film.
Claim 5
Dependent Claim
20 words
The carbon film of claim 1 wherein pressure in the reaction chamber is decreased during deposition of said carbon film.
Claim 6
Dependent Claim
22 words
The carbon film of claim 1, wherein the rf power input to the electrodes is increased during deposition of said carbon film.
Claim 7
Dependent Claim
13 words
The carbon film of claim 1 where said bias is a DC bias.
References Cited (Backward Citations)
US4770940A
Cited
US4647494A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |