US5366953A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming grain boundary junctions in high temperature superconductor films
Assignee: Silicon Valley Bank Inc
•
Filing: 1993-12-22
•
Granted: 1994-11-22
•
Expires: 2013-12-22
Abstract
Abstract A novel method of producing weak-link grain boundary Josephson junctions in high temperature superconducting thin films is disclosed. These junctions are reliably and reproducibly formed on uniform planar substrates (10) by the action of a seed layer (40) placed intermediate the substrate (10) and the superconductor film (20). The superconductor film (22) grown atop the seed (42) is misoriented from the rest of the film (24) by an angle between 5 DEG and 90 DEG . The grain boundary (30) so formed acts as a high quality weak-link junction for superconductor devices. The performance of these junctions can be improved by the addition of buffer layers (50, 60) between the substrate (10) and the superconductor film (20).
Inventors
- 👤 Kookrin Char
- 👤 Stephen M. Garrison
- 👤 Nathan Newman
- 👤 Gregory G. Zaharchuk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:36
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0912; H10N60/0941; Y; Y10; Y10S; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/702
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
145 words
A method of fabricating a weak-link junction on a planar surface of a uniform substrate having a first region and a second region adjacent said first region and a border between said first region and said second region comprising: (a) a first deposition step of depositing one or more intermediate layers of materials onto said substrate, at least one of said layers being a seed layer which overlies said first region only, (b) a second deposition step of depositing a film of superconducting material over said substrate and said intermediate layers, said superconducting film in said first region having a different crystal orientation than said superconducting film in said second region, whereby a weak-link junction is formed in said superconducting film by the mismatch in orientation along said border between the superconducting film in said first region and the superconducting film in said second region.
Claim 2
Independent Claim
145 words
A method of fabricating a weak-link junction on a planar surface of a uniform substrate having a first region and a second region adjacent said first region and a border between said first region and said second region comprising: (a) a first deposition step of depositing one or more intermediate layers of materials onto said substrate, at least one of said layers being a seed layer which overlies said first region only, (b) a second deposition step of depositing a film of superconducting material over said substrate and said intermediate layers, said superconducting film in said first region having a different crystal orientation than said superconducting film in said second region, whereby a weak-link junction is formed in said superconducting film by the mismatch in orientation along said border between the superconducting film in said first region and the superconducting film in said second region.
Claim 3
Dependent Claim
40 words
A method according to claim 1, wherein said first deposition step comprises: depositing a seed layer onto said substrate in said first region and said second region, and removing said seed layer from said substrate in said second region only.
Claim 4
Dependent Claim
43 words
The method of claim 1, wherein said first deposition step comprises: treating the surface of said substrate in region two only and then depositing said seed layer material, said seed layer material forming a high quality continuous film in said first region only.
Claim 5
Dependent Claim
35 words
The method of claim 1, wherein said first deposition step comprises subjecting said second region of said substrate to graphoepitaxy and then depositing said seed layer, said seed layer adhering in said first region only.
Claim 6
Dependent Claim
29 words
The method of claim 1 in which said first deposition step includes depositing at least one intermediate layer to an arbitrarily small thickness, even less than one atomic monolayer.
Claim 7
Dependent Claim
18 words
The method of claim 1 in which said first deposition step includes depositing at least one buffer layer.
Claim 8
Dependent Claim
94 words
The method of claim 6 wherein said substrate is YSZ having the orientation denoted [100] (001) and wherein said first deposition step comprises depositing a seed layer of YBCO having the orientation denoted [100] (001) in said first region, and said second deposition step comprises depositing a superconducting film of YBCO over said first region and over said second region whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [100] (001) and said YBCO in said second region having the orientation denoted [110] (001).
Claim 9
Dependent Claim
94 words
The method of claim 6 wherein said substrate is YSZ having the orientation denoted [100] (001) and wherein said first deposition step comprises depositing a seed layer of YBCO having the orientation denoted [110] (001) in said first region, and said second deposition step comprises depositing a superconducting film of YBCO over said first region and over said second region whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 10
Dependent Claim
100 words
The method of claim 6 wherein said substrate is YSZ having the orientation denoted [100] (001) and wherein said first deposition step comprises depositing a seed layer of SrTiO 3 having the orientation denoted (110) in said first region, and said second deposition step comprises depositing a superconducting film of YBCO over said first region and over said second region whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted either (110) or (103) or a mixture thereof and said YBCO in said second region having the orientation denoted [100] (001).
Claim 11
Dependent Claim
117 words
The method of claim 6 wherein said substrate is chosen from the group consisting of SrTiO 3 having the orientation denoted (110), LaAlO 3 having the orientation denoted [100] (001), and CaTiO 3 having the orientation denoted [100] (001), and wherein said first deposition step comprises depositing a seed layer of YSZ having the orientation denoted [110] (001) in said first region, and said second deposition step comprises depositing a superconducting film of YBCO over said first region and over said second region whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 12
Dependent Claim
39 words
The method of claim 1 wherein said first deposition step comprises depositing at least one seed layer in said first region only and then depositing at least one buffer layer in said first region and in said second region.
Claim 13
Dependent Claim
129 words
The method of claim 11 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102) and wherein said first deposition step comprises depositing a seed layer of MgO having the orientation denoted [110] (001) in said first region and then depositing a buffer layer of SrTiO 3 having the orientation denoted [110] (001) in said first region and having the orientation denoted [100] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 14
Dependent Claim
161 words
The method of claim 11 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102) and wherein said first deposition step comprises depositing a seed layer of SrTiO 3 having the orientation denoted [100] (001) in said first region only and then depositing a buffer layer of MgO in said first region and in said second region and then depositing a buffer layer of SrTiO 3 in said first region and in said second region wherein said buffer layers have the orientation denoted [100] (001) in said first region and have the orientation denoted [110] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [100] (001) and said YBCO in said second region having the orientation denoted [110] (001).
Claim 15
Dependent Claim
150 words
The method of claim 11 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102) and wherein said first deposition step comprises depositing a seed layer of MgO having the orientation denoted [110] (001) in said first region and then depositing at least one buffer layer chosen from the group consisting of CeO 2 , LaAlO 3 , SrTiO 3 , and CaTiO 3 wherein said buffer layer has the orientation denoted [110] (001) in said first region and has the orientation denoted [100] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 16
Dependent Claim
157 words
The method of claim 11 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102) and wherein said first deposition step comprises depositing in said first region only a seed layer chosen from the group consisting of SrTiO 3 having the orientation denoted [100] (001) and CaTiO 3 having the orientation denoted [100] (001) and then depositing a buffer layer of MgO in said first region and in said second region, wherein said buffer layer has the orientation denoted [100] (001) in said first region and has the orientation denoted [110] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [100] (001) and said YBCO in said second region having the orientation denoted [110] (001).
Claim 17
Dependent Claim
134 words
The method of claim 11 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102)and wherein said first deposition step comprises depositing a seed layer of YSZ having the orientation denoted (001) in said first region only and then depositing a buffer layer of SrTiO 3 having the orientation denoted [110] (001) in said first region and having the orientation denoted [100] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted either (110) or (103) or a mixture thereof and said YBCO in said second region having the orientation denoted [100] (001).
Claim 18
Independent Claim
52 words
The method of Clam 1 wherein said first deposition step comprises depositing at least one buffer layer in said first region only and then depositing at least one seed layer in said first region only and then depositing at least one buffer layer in said first region and in said second region.
Claim 19
Independent Claim
52 words
The method of Clam 1 wherein said first deposition step comprises depositing at least one buffer layer in said first region only and then depositing at least one seed layer in said first region only and then depositing at least one buffer layer in said first region and in said second region.
Claim 20
Dependent Claim
150 words
The method of claim 17 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102) and wherein said first deposition step comprises depositing a buffer layer of SrTiO 3 having the orientation denoted [110] (001) in said first region only, and then depositing a seed layer of MgO having the orientation denoted [110] (001) in said first region only, and then depositing a buffer layer of SrTiO 3 having the orientation denoted [110] (001) in said first region and having the orientation denoted [100] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 21
Dependent Claim
171 words
The method of claim 17 wherein said substrate is r-plane Al 2 O 3 having the orientation denoted [2021] (1102) and wherein said first deposition step comprises depositing a buffer layer of SrTiO 3 having the orientation denoted [110] (001) in said first region only, and then depositing a seed layer of MgO having the orientation denoted [110] (001) in said fist region only, and then depositing at least one buffer layer chosen from the group consisting of CeO 2 , LaAlO 3 , SrTiO 3 , and CaTiO 3 , said buffer layer having the orientation denoted [110] (001) in said first region and having the orientation denoted [100] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 22
Dependent Claim
39 words
The method of claim 1 wherein said first deposition step comprises depositing at least one buffer layer in said first region and in said second region and then depositing at least one seed layer in said first region only.
Claim 23
Dependent Claim
56 words
The method of claim 1 wherein said first deposition step comprises depositing at least one buffer layer in said first region and in said second region and then depositing at least one seed layer in said first region only, and then depositing at least one buffer layer in said first region and in said second region.
Claim 24
Dependent Claim
34 words
The method of claim 1 wherein said first deposition step comprises depositing at least one seed layer in said first region only, and depositing at least one seed layer in said second region only.
Claim 25
Dependent Claim
112 words
The method of claim 22 wherein said substrate is YSZ having the orientation denoted [100] (001) and wherein said first deposition step comprises depositing a seed layer of YBCO having the orientation denoted [100] (001) in said first region, and depositing a seed layer of YBCO having the orientation denoted [110] (001) in said second region, and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [110] (001) and said YBCO in said second region having the orientation denoted [100] (001).
Claim 26
Dependent Claim
51 words
The method of claim 1 wherein said fist deposition step comprises depositing at least one seed layer in said first region only, and depositing at least one seed layer in said second region only and then depositing at least one buffer layer in said first region and in said second region.
Claim 27
Dependent Claim
138 words
The method of claim 24 wherein said substrate is YSZ having the orientation denoted [100] (001) and wherein said first deposition step comprises depositing a seed layer of YBCO having the orientation denoted [100] (001) in said first region, and depositing a seed layer of YBCO having the orientation denoted [110] (001) in said second region, and then depositing a buffer layer of SrTiO 3 having the orientation denoted [100] (001) in said first region and [110] (001) in said second region and wherein said second deposition step comprises depositing a superconducting film of YBCO in said first region and in said second region, whereby said weak-link grain boundary junction is formed between said YBCO in said first region having the orientation denoted [100] (001) and said YBCO in said second region having the orientation denoted [110] (001).
Claim 28
Dependent Claim
68 words
The method of claim 1 wherein said first deposition step comprises depositing at least one buffer layer in said first region and in said second region and then depositing at least one seed layer in said first region only, and depositing at least one seed layer in said second region only, and then depositing at least one buffer layer in said first region and in said second region.
Claim 29
Dependent Claim
37 words
The method of claim 1 wherein said first deposition step further comprises the step of sloping the surface of an intermediate layer so it has an angle of less than 45° with the surface of the substrate.
Claim 30
Dependent Claim
37 words
The method of claim 1 wherein said first deposition step further comprises the step of sloping the surface of an intermediate layer so it has an angle of less than 10° with the surface of the substrate.
Claim 31
Dependent Claim
28 words
The method of claim 1 wherein said second deposition step comprises the step of depositing a superconducting oxide, said oxide having a superconducting transition temperature greater than 15K.
Claim 32
Dependent Claim
21 words
The method of claim 29 wherein said superconducting oxide is chosen from the group consisting of mixed-metal cuprates and mixed-metal bismuthates.
Claim 33
Dependent Claim
50 words
The method of claim 1 wherein said second deposition step comprises the step of depositing a superconducting film having a crystal lattice orientation in said first region which is rotated in-plane by more than 5° and less than 90° with respect to the crystal lattice orientation in said second region.
Claim 34
Dependent Claim
35 words
The method of claim 1 in which the method of depositing the superconducting layer is selected from the group consisting of sputtering, laser ablation, chemical vapor deposition, metal-organic chemical vapor deposition, and liquid phase epitaxy.
Claim 35
Dependent Claim
44 words
The method of claim 2, wherein said first deposition step is accomplished under substantially different process conditions than said second deposition step, said conditions being chosen from the group consisting of substrate temperature, density of plasma, partial pressure of oxygen and total gas pressure.
Claim 36
Dependent Claim
36 words
The method of claim 2 in which said intermediate layers are defined on a planar substrate using conventional lithographic techniques, and thereby induce grain boundary weak-link junctions that are located in pre-determined, specific positions and geometries.
References Cited (Backward Citations)
EP0329603A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |