US5366847A
Expired / Lapsed
US
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Method and apparatus for optimizing semiconductor exposure process
Assignee: Northrop Grumman Space and Mission Systems Corp
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Filing: 1993-08-30
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Granted: 1994-11-22
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Expires: 2013-08-30
Abstract
Abstract A method for optimizing a pattern where the shape of the pattern is replicated on a surface, where fine areas are identified within the pattern and are combined with neighboring areas so as to reduce the number of areas within the pattern too fine to properly resolve, thereby increasing the efficacy with which the pattern is replicated.
Inventors
- 👤 Robert Powers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:12
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
141 words
In a method of fabricating a semiconductor comprising the steps of coating a surface with a resist material, defining a desired exposure pattern formed by a plurality of rectangular figures wherein at least some of said rectangular figures are abutting, and focusing an electron beam on said rectangular figures to expose the resist material, a method of optimizing said fabricating method comprising the steps of: identifying sliver rectangular figures having at least one dimension less than a focus dimension of said electron beam; identifying at least one neighbor rectangular figure adjacent to said sliver rectangular figure; combining said at least one neighbor rectangular figure with said sliver rectangular figure to create at least one new rectangular figure with dimensions larger than said focus dimension and to reduce sliver rectangular figures; and exposing said new rectangular figure identified on the resist material.
Claim 2
Dependent Claim
141 words
In a method of fabricating a semiconductor comprising the steps of coating a surface with a resist material, defining a desired exposure pattern formed by a plurality of rectangular figures wherein at least some of said rectangular figures are abutting, and focusing an electron beam on said rectangular figures to expose the resist material, a method of optimizing said fabricating method comprising the steps of: identifying sliver rectangular figures having at least one dimension less than a focus dimension of said electron beam; identifying at least one neighbor rectangular figure adjacent to said sliver rectangular figure; combining said at least one neighbor rectangular figure with said sliver rectangular figure to create at least one new rectangular figure with dimensions larger than said focus dimension and to reduce sliver rectangular figures; and exposing said new rectangular figure identified on the resist material.
Claim 3
Dependent Claim
22 words
The method of optimizing of claim 1 further comprising the step of dividing said desired exposure pattern into a plurality of subfields.
Claim 4
Dependent Claim
31 words
The method of optimizing of claim 2 wherein said steps of identifying said sliver rectangular figures and said neighbor rectangular figures to said sliver rectangular figures are performed in one subfield.
Claim 5
Dependent Claim
28 words
The method of optimizing of claim 1 wherein said combining step further includes the step of merging the sliver rectangular figure with at least one neighbor rectangular figure.
Claim 6
Dependent Claim
45 words
The method of optimizing of claim 1 wherein said combining step further includes the steps of splitting at least one neighbor rectangular figure into a plurality of new neighbor rectangular figures and merging said sliver with at least one of said new neighbor rectangular figures.
Claim 7
Dependent Claim
93 words
The method of optimizing of claim 1 wherein said sliver rectangular figure abuts first and second neighbor rectangular figures and said combining step further includes the steps of: combining said sliver rectangular figure with said first neighbor rectangular figures; determining the number of new rectangular figures resulting from combining said sliver with said first neighbor rectangular figure; determining if all or a portion of said sliver rectangular figure would be combined with said first neighbor rectangular figure; and determining whether any of said new rectangular figures would be a new sliver rectangular figure.
Claim 8
Dependent Claim
77 words
The method of optimizing of claim 6 further comprising the steps of: combining said sliver rectangular figure with said second neighbor rectangular figure; determining the number of new rectangular figures resulting from combining said sliver with said second neighbor rectangular figure; determining if all or a portion of said sliver rectangular figure would be combined with said second neighbor rectangular figure; and determining whether any of said new rectangular figures would be a new sliver rectangular figure.
Claim 9
Dependent Claim
56 words
The method of optimizing of claim 7 further comprising the steps of: selecting, for combination with said sliver rectangular figure, one of said first and second neighbor rectangular figure which provides (a) the fewest new rectangular figures, (b) the removal of the greatest portion of the said sliver rectangular figure, and (c) the fewest new slivers.
Claim 10
Dependent Claim
130 words
The method of optimizing of claim 1 further comprising the steps of: identifying at least one vertical sliver rectangular figure having a horizontal width dimension less than the focus dimension, and abutting a plurality of neighbor rectangular figures along opposing vertical sides thereof; scanning and combining, using a vertical pass, all or a portion of said vertical sliver rectangular figure with one of said abutting neighbor rectangular figures which lies horizontally adjacent one vertical end of said vertical sliver rectangular figure to create a new rectangular figure having dimensions greater than said focus dimension; combining remaining portions of said vertical sliver rectangular figure with others of said plurality of abutting neighbor rectangular figures until all or a substantial portion of said sliver rectangular figure is combined by said vertical pass.
Claim 11
Dependent Claim
131 words
The method of optimizing of claim 9 further comprising the steps of: identifying at least one horizontal sliver rectangular figure having a vertical width dimension less than the focus dimension and abutting a plurality of neighbor rectangular figures along opposing horizontal sides thereof; scanning and combining, using a horizontal pass, all or a portion of said horizontal sliver rectangular figure with one of said neighbor rectangular figures which lies vertically adjacent one horizontal end of said horizontal sliver rectangular figure to create a new rectangular figure having dimensions greater than said focus dimension; and combining remaining portions of said horizontal sliver rectangular figure with others of said plurality of abutting neighbor rectangular figures until all or a substantial portion of said horizontal sliver rectangular figure is combined by said horizontal pass.
Claim 12
Dependent Claim
21 words
The method of optimizing of claim 10 wherein said horizontal and vertical slivers are combined using alternating horizontal and vertical passes.
References Cited (Backward Citations)
US4291231A
Cited
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